The inventive concept provides an apparatus for treating a substrate by using a supercritical fluid. In an embodiment, the apparatus may include a process chamber that provides a treatment space, and including a chamber heater that increases a temperature of an interior of the treatment space, a substrate support provided in the treatment space and that supports the substrate, and a substrate heating member that heats a lower surface of the substrate while contacting the lower surface of the substrate.

Provided is a uniformly-heating system for curing concrete. A uniformly-heating system for curing concrete according to an embodiment of the present application includes a plurality of unit heating devices each is coupled to an external panel of a form for concrete manufacturing in a in close contact state therewith, and a power supply unit that supplies power to the plurality of unit heating devices, wherein the unit heating device includes a body housing that is attached to a surface of the form and has a predetermined unit area, a gripping portion that is coupled to an upper surface of the body housing, and a planar heating heater that is coupled to a lower surface of the body housing.

A process for manufacturing a PTC heating element that includes at least one PTC component (20) and a carrier (14, 16) permanently connected to the PTC component on at least one side (24, 26) of thereof The process includes applying electrically conductive sintered material (28, 30, 36, 38) on the one side of the PTC component, which side is to be permanently connected to a carrier. Subsequently, a contact of the PTC component is established with at least one carrier such that sintered material, which was applied between the PTC component and the carrier and is intended for establishing a connection between the at least one PTC component and the at least one carrier, is positioned. The sintered material, which material has been positioned between the PTC component and the carrier, is sintered by heating or/and by applying pressure.

A process for manufacturing a PTC heating element that includes at least one PTC component (20) and a carrier (14, 16) permanently connected to the PTC component on at least one side (24, 26) of thereof The process includes applying electrically conductive sintered material (28, 30, 36, 38) on the one side of the PTC component, which side is to be permanently connected to a carrier. Subsequently, a contact of the PTC component is established with at least one carrier such that sintered material, which was applied between the PTC component and the carrier and is intended for establishing a connection between the at least one PTC component and the at least one carrier, is positioned. The sintered material, which material has been positioned between the PTC component and the carrier, is sintered by heating or/and by applying pressure.

An electric heater (1, 1′) for heating a substance inside a tank (100), the electric heater (1, 1′) comprising: at least one resistive wire (4) adapted to be connected to a source of electricity, said at least one resistive wire (4) being provided with a sheath (41) made of electrically insulating material; at least a first thermally conductive sheet (5) made of metal fixed to the at least one resistive wire (4); at least two protective layers (2, 3) made of polymer material, fixed to each other; wherein the at least one resistive wire (4) and the at least a first sheet (5) are arranged between the at least two protective layers (2, 3).

An electric heater (1, 1′) for heating a substance inside a tank (100), the electric heater (1, 1′) comprising: at least one resistive wire (4) adapted to be connected to a source of electricity, said at least one resistive wire (4) being provided with a sheath (41) made of electrically insulating material; at least a first thermally conductive sheet (5) made of metal fixed to the at least one resistive wire (4); at least two protective layers (2, 3) made of polymer material, fixed to each other; wherein the at least one resistive wire (4) and the at least a first sheet (5) are arranged between the at least two protective layers (2, 3).

A support unit includes a first plate on which a substrate is seated, a second plate located under the first plate, a third plate located under the second plate, a ground electrode disposed between the first plate and the second plate, and a heater electrode disposed between the second plate and the third plate. The first plate includes a first dielectric plate, a conductive plate disposed under the first dielectric plate, and a second dielectric plate disposed under the conductive plate.

A support unit includes a first plate on which a substrate is seated, a second plate located under the first plate, a third plate located under the second plate, a ground electrode disposed between the first plate and the second plate, and a heater electrode disposed between the second plate and the third plate. The first plate includes a first dielectric plate, a conductive plate disposed under the first dielectric plate, and a second dielectric plate disposed under the conductive plate.

A braze-free substrate heating device including a heater block body, a heater block lid, and a heating element. The heating element sits inside the heater block body. The heater block lid is on the heating element, such that the heating element is sandwiched between the heater block lid and the floor of the heater block body. The heating element is held in place by compressing the heater block lid into the heater block body and attaching the heater block lid to the top of the heater block body so that the heating element is fully supported over its surface area, and can maintain uniform thermal contact with the heater block lid and heater block body over its entire surface area.

A braze-free substrate heating device including a heater block body, a heater block lid, and a heating element. The heating element sits inside the heater block body. The heater block lid is on the heating element, such that the heating element is sandwiched between the heater block lid and the floor of the heater block body. The heating element is held in place by compressing the heater block lid into the heater block body and attaching the heater block lid to the top of the heater block body so that the heating element is fully supported over its surface area, and can maintain uniform thermal contact with the heater block lid and heater block body over its entire surface area.