In a first processing chamber, a feedstock may be combined with plasma from, for example, three plasma torches to form a first fluid mixture. Each torch may have a working gas including water vapor, oxygen, and carbon dioxide. The first fluid mixture may be cooled and may contact a first heat exchange device. The output fluid from the first heat exchange device may be separated into one or more components. A syngas may be derived from the one or more components and have a ratio of carbon monoxide to hydrogen of about 1:2. The syngas may be transferred to a catalyst bed to be converted into one or more fluid fuels.

Exemplary embodiments of the inventive concept provide a plasma treatment apparatus with a substrate support unit, a plasma unit, a first rotation driving unit, and a gas supply part. The substrate support unit supports a substrate. The plasma unit generates a plasma and provides the plasma to the substrate. The first rotation driving unit is coupled to the plasma unit to rotate the plasma unit with respect to the substrate support unit. The gas supply part supplies a source gas to the plasma unit. The plasma unit includes a body, a first electrode located in the body, a second electrode located in the body and facing the first electrode, and a pipe located between the first and second electrodes to flow the source gas therethrough.

A plasma generation system for generating a multilayer plasma includes a plasma generator that includes an inner electrode, an intermediate electrode surrounding the inner electrode and defining therebetween an inner plasma channel having an inner plasma outlet, and an outer electrode surrounding the intermediate electrode and defining therebetween an outer plasma channel having an outer plasma outlet; a process gas unit configured to provide a first and a second process gas inside the inner and outer plasma channels, respectively; and a power supply unit configured to energize the first process gas into a first plasma that flows along the inner plasma channel and out through the inner plasma outlet as an inner layer of the multilayer plasma, and to energize the second process gas into a second plasma that flows along the outer plasma channel and out through the outer plasma outlet as an outer layer of the multilayer plasma.

A plasma generation system for generating a multilayer plasma includes a plasma generator that includes an inner electrode, an intermediate electrode surrounding the inner electrode and defining therebetween an inner plasma channel having an inner plasma outlet, and an outer electrode surrounding the intermediate electrode and defining therebetween an outer plasma channel having an outer plasma outlet; a process gas unit configured to provide a first and a second process gas inside the inner and outer plasma channels, respectively; and a power supply unit configured to energize the first process gas into a first plasma that flows along the inner plasma channel and out through the inner plasma outlet as an inner layer of the multilayer plasma, and to energize the second process gas into a second plasma that flows along the outer plasma channel and out through the outer plasma outlet as an outer layer of the multilayer plasma.