Apparatus and method for plasma synthesis of carbon nanotubes couple a plasma nozzle to a reaction tube/chamber. A process gas comprising a carbon-containing species is supplied to the plasma nozzle. Radio frequency radiation is supplied to the process gas within the plasma nozzle, so as to sustain a plasma within the nozzle in use, and thereby cause cracking of the carbon-containing species. The plasma nozzle is arranged such that an afterglow of the plasma extends into the reaction tube/chamber. The cracked carbon-containing species also pass into the reaction tube/chamber. The cracked carbon-containing species recombine within the afterglow, so as to form carbon nanotubes in the presence of a catalyst.

Disclosed herein are embodiments of strain tolerant particle structures, methods of manufacturing such structures, and precursors to form said structures. In some embodiments, the structures can be formed of a network of nano-scale walls. The structures can be incorporated into powders, which can then be used for any number of applications, such as microwave plasma processing.

An apparatus for powder spheroidisation by microwave-induced plasma comprises a microwave generator (4), a microwave cavity (20), a waveguide (6) connecting the microwave generator to the microwave cavity, a plasma tube (3) partially located in the microwave cavity, a powder supply (2) connected to the plasma tube to feed a powder precursor flow thereinto, a gas supply (1) connected to the plasma tube to feed a process gas flow thereinto, in order to form a plasma torch in the plasma tube by coupling the process gas flow with the microwave radiation, and a compressed air supply (9). The microwave cavity comprises at least one opening (25) for the compressed air (91) so that the latter can cool the plasma tube from outside, and the gas supply is connected to the powder supply to let the process gas (11) carry the powder precursor (21) into the plasma tube, and so into the plasma torch in order to make spheroids (31) from the powder precursor by in-flight melting.

An ion beam treatment or implantation system includes an ion source emitting a plurality of parallel ion beams having a given spacing. A first lens magnet having a non-uniform magnetic field receives the plurality of ion beams from the ion source and focuses the plurality of ion beams toward a common point. The system may optionally include a second lens magnet having a non-uniform magnetic field receiving the ion beams focused by the first lens magnet and redirecting the ion beams such that they have a parallel arrangement having a closer spacing than said given spacing in a direction toward a target substrate.

A plasma generating system includes a waveguide for transmitting a microwave energy therethrough and an inner wall disposed within the waveguide to define a plasma cavity, where a plasma is generated within the plasma cavity using the microwave energy. The plasma generating system further includes: an adaptor having a gas outlet through which an exhaust gas processed by the plasma exits the plasma cavity; and a recuperator directly attached to the adaptor and having a gas passageway that is in fluid communication with the gas outlet in the adaptor. The recuperator recovers heat energy from the exhaust gas and heats an input gas using the heat energy.

The present invention provides a plasma generating system that includes: a plasma cavity for generating a plasma therewithin by use of microwave energy; an adaptor electrically grounded and having a gas outlet through which an exhaust gas processed by the plasma exits the plasma cavity; and an ignition device mounted on the adaptor. The ignition device includes: a first electrode electrically grounded; and a second electrode electrically floating and configured to convert a portion of the microwave energy into an electrostatic discharge to thereby develop a voltage difference between the first and second electrodes, where the voltage difference generates a spark discharge between the first electrode and the second electrode to create the plasma.

A plasma generating system includes a waveguide for transmitting a microwave energy therethrough and an inner wall disposed within the waveguide to define a plasma cavity, where a plasma is generated within the plasma cavity using the microwave energy. The plasma generating system further includes: an adaptor mounted on a first side of the waveguide and physically separated from the waveguide by a first gap and having a gas outlet through which a gas processed by the plasma exits the plasma cavity; and an EM seal disposed in the first gap and configured to block leakage of the microwave energy through the first gap.

The present invention provides a plasma generating system that includes: a programmable logic controller (PLC) and a plurality of reactor systems coupled to the PLC by a daisy chain network. Each of the plurality of reactor systems include: a microwave generator for generating microwave energy; and a power supply for providing electrical power to the microwave generator and including a controller, where the controller comprises: at least one microprocessor; and a module communicatively coupled to the at least one processor and including at least one of digital input-output (DIO) and analogue input-output (AIO).

The present invention provides a plasma generating system that includes: a plasma cavity for generating a plasma therewithin by use of microwave energy; an adaptor electrically grounded and having a gas outlet through which an exhaust gas processed by the plasma exits the plasma cavity; and an ignition device mounted on the adaptor. The ignition device includes: a first electrode electrically grounded; and a second electrode electrically floating and configured to convert a portion of the microwave energy into an electrostatic discharge to thereby develop a voltage difference between the first and second electrodes, where the voltage difference generates a spark discharge between the first electrode and the second electrode to create the plasma.

A plasma generating system includes a waveguide for transmitting a microwave energy therethrough and an inner wall disposed within the waveguide to define a plasma cavity, where a plasma is generated within the plasma cavity using the microwave energy. The plasma generating system further includes: an adaptor mounted on a first side of the waveguide and physically separated from the waveguide by a first gap and having a gas outlet through which a gas processed by the plasma exits the plasma cavity; and an EM seal disposed in the first gap and configured to block leakage of the microwave energy through the first gap.