Example systems have a defrost system that can receive a first RF signal at a first frequency to defrost a load. An air treatment device can receive a second RF signal at a second frequency and perform an air treatment process. An RF signal source has a power output, and a switching arrangement selectively electrically connects the defrost system and the first air treatment device to the power output of the RF signal source. A controller can electrically connect one of the defrost system and the first air treatment device to the power output of the RF signal source. When the defrost system is electrically connected, the RF signal source outputs the first RF signal at the first frequency, and when the first air treatment device is electrically connected, the RF signal source outputs the second RF signal at the second frequency.

In some general aspects, a surface of a structure within a chamber of an extreme ultraviolet (EUV) light source is cleaned using a method. The method includes generating a plasma state of a material that is present at a location adjacent to a non-electrically conductive body that is within the chamber. The generation of the plasma state of the material includes electromagnetically inducing an electric current at the location adjacent the non-electrically conductive body to thereby transform the material that is adjacent the non-electrically conductive body from a first state into the plasma state. The plasma state of the material includes plasma particles, at least some of which are free radicals of the material. The method also includes enabling the plasma particles to pass over the structure surface to remove debris from the structure surface without removing the structure from the chamber of the EUV light source.

The invention relates to a plasma activated fluid processing system, comprising: an alternating current, AC, source (10), one reaction chamber (14), wherein the one reaction chamber comprises a plurality of reaction electrodes (11) and a corresponding ground electrode (12), each reaction electrode and corresponding ground electrode separated by a gap;
or a plurality of reaction chambers (14), wherein each reaction chamber comprises at least one reaction electrode (11) and a corresponding ground electrode, the reaction electrode and corresponding ground electrode separated by a gap;
wherein the AC source is electrically connected on one side to each ground electrode in parallel and on another side to each reaction electrode in parallel, wherein each reaction electrode is connected to ground (13) via a capacitor (21), and wherein an inductor (20) is provided between each reaction electrode and the AC source.

A plasma reactor includes a chamber body having an interior space that provides a plasma chamber, a gas distribution port to deliver a processing gas to the plasma chamber, a workpiece support to hold a workpiece, an antenna array comprising a plurality of monopole antennas extending partially into the plasma chamber, and an AC power source to supply a first AC power to the plurality of monopole antennas.

A system for treating a substrate comprising a treatment module and a substrate plane. The substrate extending along a substrate plane to treat the substrate and wherein a fluid is deliverable via the module to a local region between the module and the substrate plane to treat the substrate with a predetermined treatment.

The present disclosure describes systems and methods for controlling the electrical generation of nitric oxide. In some aspects, a system for generating nitric oxide comprises a plasma chamber housing two or more electrodes in communication with a resonant high voltage circuit configured to send a signal to the plasma chamber for generating nitric oxide in a product gas from a flow of a reactant gas, and a controller configured to generate a pulse width modulation signal having multiple harmonic frequencies to excite the resonant high voltage circuit. The controller is configured to adjust the duty cycle of the pulse width modulation signal, the controller selecting the duty cycle based on a target voltage before plasma formation and a target current after plasma formation in the plasma chamber.

A method of producing hydrogen ions includes generating a diode-type HF plasma PL. This allows to set or adjust the energy of ions output by the plasma source in an improved manner.

A plasma reactor includes a chamber body having an interior space that provides a plasma chamber, a gas distribution port to deliver a processing gas to the plasma chamber, a workpiece support to hold a workpiece, an antenna array comprising a plurality of monopole antennas extending partially into the plasma chamber, and an AC power source to supply a first AC power to the plurality of monopole antennas. The plurality of monopole antennas can extend through a first gas distribution plate. A grid filter can be positioned between the workpiece support and the plurality of monopole antennas.

A matchless plasma source is described. The matchless plasma source includes a controller that is coupled to a direct current (DC) voltage source of an agile DC rail to control a shape of an amplified square waveform that is generated at an output of a half-bridge transistor circuit. The matchless plasma source further includes the half-bridge transistor circuit used to generate the amplified square waveform to power an electrode, such as an antenna, of a plasma chamber. The matchless plasma source also includes a reactive circuit between the half-bridge transistor circuit and the electrode. The reactive circuit has a high-quality factor to negate a reactance of the electrode. There is no radio frequency (RF) match and an RF cable that couples the matchless plasma source to the electrode.

A method for sterilizing ambient air includes the steps of: a) installing a plasma-based smart window including an atmospheric pressure plasma device which includes first and second transparent flat patterned electrodes sandwiched between a light-transmissive substrate and a light-transmissive cover plate; and b) applying a power supply parameter of a predetermined magnitude between the first and second transparent flat patterned electrodes at ambient temperature and pressure to generate a surface plasma proximate to the light-transmissive substrate or the light-transmissive cover plate so as to inactivate microorganisms in the ambient air.