A method and structure for a transfer process for an acoustic resonator device. In an example, a bulk acoustic wave resonator (BAWR) with an air reflection cavity is formed. A piezoelectric thin film is grown on a crystalline substrate. One or more patterned electrodes are deposited on the surface of the piezoelectric film. An etched sacrificial layer is deposited over the one or more electrodes and a planarized support layer is deposited over the sacrificial layer. The support layer is etched to form one or more cavities overlying the electrodes to expose the sacrificial layer. The sacrificial layer is etched to release the cavities around the electrodes. Then, a cap layer is fusion bonded to the support layer to enclose the electrodes in the support layer cavities.

A method and structure for a transfer process for an acoustic resonator device. In an example, a bulk acoustic wave resonator (BAWR) with an air reflection cavity is formed. A piezoelectric thin film is grown on a crystalline substrate. Patterned electrodes are deposited on the surface of the piezoelectric film. An etched sacrificial layer is deposited over the electrodes and a planarized support layer is deposited over the sacrificial layer. The device can include temperature compensation layers (TCL) that improve the device TCF. These layers can be thin layers of oxide type materials and can be configured between the top electrode and the piezoelectric layer, between the bottom electrode and the piezoelectric layer, between two or more piezoelectric layers, and any combination thereof. In an example, the TCLs can be configured from thick passivation layers overlying the top electrode and/or underlying the bottom electrode.

Provided are an electroacoustic conversion film web, an electroacoustic conversion film, and a method of manufacturing an electroacoustic conversion film web in which costs can be reduced by reducing the number of operations without damage to thin film electrodes, the points of electrode lead-out portions can be freely determined, and thus high productivity can be achieved. A preparation step of preparing an electrode laminated body in which a single thin film electrode and a single protective layer are laminated and a lamination step of laminating the electrode laminated body and an piezoelectric layer are included. A non-adhered portion that is not adhered to the piezoelectric layer is provided in at least one end portion of the thin film electrode in a case where the electrode laminated body and the piezoelectric layer are laminated in the lamination step.

A manufacturing method of a microphone is disclosed, wherein a patterned upper electrode is obtained by a first deposition of conductive material in such a way to form pads of the patterned electrode, and pillars are formed by of successive depositions of rigid conductive material, in aligned position on the pads of the patterned electrode. The first deposition and the successive depositions are made by screen-printing, dispenser-printing or spray-coating of material in liquid or semifluid state.

The present invention relates to a zinc oxide-based piezoelectric device, utilizable both as a sensor and as an actuator. More in particular, the present invention relates to a piezoelectric device (1, 101) comprising at least two carbon fibre crossed yarns (2a, 2b; 102a, 102b), at the intersection of which a zinc oxide layer (3, 103) in nanorod form is arranged, wherein an end (4a, 4b) of each of said yarns (2a, 2b; 102a, 102b) is connected to an operative unit (5).

A method of additively-manufacturing a flexible sensor system having a lattice topology includes a number of electrical interconnects, each having one or more electrically-conductive layers alternately sandwiched between two or more dielectric layers, and two or more sensors defining a sensor array, each sensor located at an intersection of and electrically connected to the interconnects on the lattice topology and electrically-connected to the interconnects. Each of the electrically-conductive layers includes a cured material base and silver, copper, aluminum, gold, platinum, ruthenium, carbon, and/or alloys thereof, and each of the dielectric layers includes a cured material base. The additively-manufactured flexible sensor system is configured to be installed on the surface of an asset for the monitoring of that asset.

The present invention relates to compositions obtained by mixing specific electroactive fluoro-terpolymers and specific electroactive fluorinated copolymers. The invention also concerns liquid formulations (inks) that can be used through conventional processing technologies for printed electronics and microelectronics in a safe environment, based on these compositions. Another aspect of this invention are the films manufactured using these formulations, and the devices comprising at least one layer of these films.

A method and structure for a transfer process for an acoustic resonator device. In an example, a bulk acoustic wave resonator (BAWR) with an air reflection cavity is formed. A piezoelectric thin film is grown on a crystalline substrate. A first patterned electrode is deposited on the surface of the piezoelectric film. An etched sacrificial layer is deposited over the first electrode and a planarized support layer is deposited over the sacrificial layer, which is then bonded to a substrate wafer. The crystalline substrate is removed and a second patterned electrode is deposited over a second surface of the film. The sacrificial layer is etched to release the air reflection cavity. Also, a cavity can instead be etched into the support layer prior to bonding with the substrate wafer. Alternatively, a reflector structure can be deposited on the first electrode, replacing the cavity.

A system for a wireless communication infrastructure using single crystal devices. The wireless system can include a controller coupled to a power source, a signal processing module, and a plurality of transceiver modules. Each of the transceiver modules includes a transmit module configured on a transmit path and a receive module configured on a receive path. The transmit modules each include at least a transmit filter having one or more filter devices, while the receive modules each include at least a receive filter. Each of these filter devices includes a single crystal acoustic resonator device formed with a thin film transfer process with at least a first electrode material, a single crystal material, and a second electrode material. Wireless infrastructures using the present single crystal technology perform better in high power density applications, enable higher out of band rejection (OOBR), and achieve higher linearity as well.

The present invention relates to a piezoelectric nanogenerator (PENG) that is capable of harvesting mechanical energy into electricity. The PENG comprises one dimensional (1D) and two dimensional (2D) nanostructures integrated together to form a composite nanostructure. A major advantage of the present invention is that the composite nanostructure provides enhanced electrical output and enhanced mechanical stability as compared to previously reported 1D or 2D nanostructures alone. Also described is a hybrid nanogenerator that combines the PENG with a triboelectric nanogenerator (TENG). A method of synthesizing the composite nanostructure PENG, in which the 1D and 2D nanostructures are grown together on the same substrate using a low temperature hydrothermal method is also described. The provided method is simple and cost-effective.