A piezoelectric element includes a first and a second electrode, a piezoelectric layer between the first electrode and the second electrode, and an orientation control layer between the first electrode and the piezoelectric layer. The orientation control layer contains perovskite complex oxide containing potassium, sodium, calcium, and niobium and preferentially oriented in the (100) plane.

A method and structure for a transfer process for an acoustic resonator device. In an example, a bulk acoustic wave resonator (BAWR) with an air reflection cavity is formed. A piezoelectric thin film is grown on a crystalline substrate. A first patterned electrode is deposited on the surface of the piezoelectric film. An etched sacrificial layer is deposited over the first electrode and a planarized support layer is deposited over the sacrificial layer, which is then bonded to a substrate wafer. The crystalline substrate is removed and a second patterned electrode is deposited over a second surface of the film. The sacrificial layer is etched to release the air reflection cavity. Also, a cavity can instead be etched into the support layer prior to bonding with the substrate wafer. Alternatively, a reflector structure can be deposited on the first electrode, replacing the cavity.

A method and structure for a transfer process for an acoustic resonator device. In an example, a bulk acoustic wave resonator (BAWR) with an air reflection cavity is formed. A piezoelectric thin film is grown on a crystalline substrate. A first patterned electrode is deposited on the surface of the piezoelectric film. An etched sacrificial layer is deposited over the first electrode and a planarized support layer is deposited over the sacrificial layer, which is then bonded to a substrate wafer. The crystalline substrate is removed and a second patterned electrode is deposited over a second surface of the film. The sacrificial layer is etched to release the air reflection cavity. Also, a cavity can instead be etched into the support layer prior to bonding with the substrate wafer. Alternatively, a reflector structure can be deposited on the first electrode, replacing the cavity.

A piezoelectric film which is better in heat and deformation resistant properties than those in the prior art is provided along with a method of manufacture. The film is a piezoelectric film that is composed of a copolymer of vinylidene fluoride and trifluoroethylene, the copolymer having a content of vinylidene fluoride in a range of not less than 82 mol % and not more than 86 mol % and having a molecular weight not less than 600,000. The piezoelectric film is subjected to a heat treatment for crystallization of the copolymer at a temperature ranging from not less than 140? C. to not more than 150? C., and is thereby caused to develop piezoelectric property. The piezoelectric film further has a heat resistance of not less than 140? C. and a breaking distortion of not less than 8% and not more than 55%, and an excellent deformation resistant property.

A rotary wing aircraft that comprises a structural arrangement with at least one first fiber reinforced polymer component and at least one second fiber reinforced polymer component that are spaced apart from each other by an interspace and that are rigidly attached to an associated structural component, wherein the at least one first fiber reinforced polymer component and the at least one second fiber reinforced polymer component are at least partly interconnected by means of an electrically conductive connection, and wherein the electrically conductive connection comprises at least one sprayed layer of electrically conductive particles, the at least one sprayed layer of electrically conductive particles being provided in the interspace.

A piezoelectric element includes: a piezoelectric body; and a first electrode which is disposed on the piezoelectric body, and in which in a plan view viewed from a direction where the first electrode and the piezoelectric body are aligned, a region which is a surface of the piezoelectric body on which the first electrode is disposed, located at a vicinity of the first electrode, and within 10 m from an outer edge of the first electrode has a crystal surface.

According to an illustrative embodiment of the present invention, a self-powered piezoelectric structure is provided which includes a base material that can be bent by an externally applied force, and a catalyst layer formed on the base material, wherein the catalyst layer is formed by using a mixture of a catalytic material, which can be activated when the energy is applied thereto from an outside, and a piezoelectric material.

According to the present invention, a method of producing a functional device includes the imprinting step and the functional solid material layer formation step. In the imprinting step, a functional solid material precursor layer obtained from a functional solid material precursor solution as a start material is imprinted so that a first temperature of a heat source for supplying heat to the functional solid material precursor layer is higher than a second temperature of the functional solid material precursor layer in at least part of a time period while a mold for forming an imprinted structure is pressed against the functional solid material precursor layer. In the functional solid material layer formation step, after the imprinting step, the functional solid material precursor layer is heat treated at a third temperature higher than the first temperature in an atmosphere containing oxygen to form a functional solid material layer from the functional solid material precursor layer.

A method for producing a piezoelectric element includes a step of forming a first electrode layer, a step of forming a piezoelectric body layer on the first electrode layer, a step of forming a second electrode layer on the piezoelectric body layer, a step of patterning the second electrode layer, a step of patterning the piezoelectric body layer by wet etching, and a step of forming an organic insulating layer on a side surface of the patterned piezoelectric body layer.

Provided are an electroacoustic conversion film web, an electroacoustic conversion film, and manufacturing methods thereof in which costs can be reduced by reducing the number of operations without damage to thin film electrodes, the points of electrode lead-out portions can be freely determined, and thus high productivity can be achieved. A preparation step of preparing an electrode laminated body in which a single thin film electrode and a single protective layer are laminated and a lamination step of laminating the electrode laminated body and an piezoelectric layer are included. A non-adhered portion that is not adhered to the piezoelectric layer is provided in at least one end portion of the thin film electrode in a case where the electrode laminated body and the piezoelectric layer are laminated in the lamination step.