A soft magnetic alloy which includes nanocrystal parts and amorphous parts is provided. The nanocrystal parts include αFe(—Si) as a main component, and include at least one of elements selected from B, P, C, Ti, Zr, Hf, Nb, Ta, Mo, V, W, Cr, Al, Mn, Zn, and Cu as a sub-component. When a total content ratio of the sub-component in the nanocrystal parts is set as α (at %), and a total content ratio of the sub-components of the nanocrystal parts included in the amorphous parts is set as β (at %), 0.01≤(α/β)≤0.40, and a crystallinity degree is 5% or more and 70% or less.

A magnetic base body relating to one embodiment of the present invention includes a main body and an oxide film formed on the surface of the main body. The main body includes an oxide phase containing Si and a plurality of metal magnetic particles bound via the oxide phase. In the metal magnetic particles, Fe accounts for 98.5 wt % or more. When an XRD diffraction pattern of the magnetic base body is observed, a ratio Ia/Ib is 10 or more where Ia denotes an integrated intensity of peaks derived from the (220) plane of Fe.sub.2O.sub.3 and Ib denotes an integrated intensity of peaks derived from the (104) plane of Fe.sub.3O.sub.4.

A magnetic material includes a soft magnetic metal grain containing Fe, and a multilayer oxide film covering the surfaces of the soft magnetic metal grain. The multilayer oxide film has a first oxide layer of crystalline nature containing Fe, and a second oxide layer of amorphous nature containing Si. In an embodiment, the silicon oxide film of amorphous nature is formed by dripping, divided into multiple sessions, a treatment solution containing TEOS (tetraethoxy silane), ethanol, and water into a mixed solution containing the soft magnetic metal grain, ethanol, and ammonia water, to mix the solutions.

A magnetic material includes a soft magnetic metal grain containing Fe, and a multilayer oxide film covering the surfaces of the soft magnetic metal grain. The multilayer oxide film has a first oxide layer of crystalline nature containing Fe, and a second oxide layer of amorphous nature containing Si. In an embodiment, the silicon oxide film of amorphous nature is formed by dripping, divided into multiple sessions, a treatment solution containing TEOS (tetraethoxy silane), ethanol, and water into a mixed solution containing the soft magnetic metal grain, ethanol, and ammonia water, to mix the solutions.

A multilayer film includes a substrate; a first magnetic layer disposed on the substrate and a second magnetic layer disposed on the first magnetic layer. The first magnetic layer includes Fe.sub.(50-80)N.sub.(10-20)B.sub.(1-20)M.sub.(0-10), wherein M is Si, Ta, Zr, Ti, Co, or a combination thereof. The second magnetic layer includes Fe.sub.(50-90)N.sub.(10-50) or Fe.sub.(60-90)N.sub.(1-10)Ta.sub.(5-30). The multilayer magnetic film has, over a frequency range of 50 MHz to 10 GHz, a magnetic permeability of greater than or equal to 1800 over a selected frequency band in the frequency range; a magnetic loss tangent of less than or equal to 0.3 over a selected frequency band in the frequency range; and a cutoff frequency of greater than or equal to 1 GHz, or greater than or equal to 2 GHz.

A multilayer film includes a substrate; a first magnetic layer disposed on the substrate and a second magnetic layer disposed on the first magnetic layer. The first magnetic layer includes Fe.sub.(50-80)N.sub.(10-20)B.sub.(1-20)M.sub.(0-10), wherein M is Si, Ta, Zr, Ti, Co, or a combination thereof. The second magnetic layer includes Fe.sub.(50-90)N.sub.(10-50) or Fe.sub.(60-90)N.sub.(1-10)Ta.sub.(5-30). The multilayer magnetic film has, over a frequency range of 50 MHz to 10 GHz, a magnetic permeability of greater than or equal to 1800 over a selected frequency band in the frequency range; a magnetic loss tangent of less than or equal to 0.3 over a selected frequency band in the frequency range; and a cutoff frequency of greater than or equal to 1 GHz, or greater than or equal to 2 GHz.

A soft magnetic metal powder having soft magnetic metal particles including Fe, wherein a surface of the soft magnetic metal particle is covered by a coating part, the coating part has a first coating part and a second coating part in this order from the surface of the soft magnetic metal particle towards outside, the first coating part includes oxides of Fe as a main component, the second coating part includes a compound of at least one element selected from the group consisting of P, Si, Bi, and Zn, and a ratio of trivalent Fe atom among Fe atoms of oxides of Fe included in the first coating part is 50% or more.

A soft magnetic metal powder having soft magnetic metal particles including Fe, wherein a surface of the soft magnetic metal particle is covered by a coating part, the coating part has a first coating part and a second coating part in this order from the surface of the soft magnetic metal particle towards outside, the first coating part includes oxides of Fe as a main component, the second coating part includes a compound of at least one element selected from the group consisting of P, Si, Bi, and Zn, and a ratio of trivalent Fe atom among Fe atoms of oxides of Fe included in the first coating part is 50% or more.

A soft magnetic metal powder having soft magnetic metal particles, wherein a surface of the soft magnetic metal particle is covered by a coating part, the coating part has a first coating part, a second coating part, and a third coating part in this order from the surface of the soft magnetic metal particle towards outside, the first coating part includes oxides of Si as a main component, the second coating part includes oxides of Fe as a main component, and the third coating part includes a compound of at least one element selected from the group consisting of P, Si, Bi, and Zn.

A soft magnetic metal powder having soft magnetic metal particles, wherein a surface of the soft magnetic metal particle is covered by a coating part, the coating part has a first coating part, a second coating part, and a third coating part in this order from the surface of the soft magnetic metal particle towards outside, the first coating part includes oxides of Si as a main component, the second coating part includes oxides of Fe as a main component, and the third coating part includes a compound of at least one element selected from the group consisting of P, Si, Bi, and Zn.