Patent classifications
H01J35/105
X-RAY GENERATION APPARATUS
An X-ray generation apparatus includes an electron gun configured to emit an electron beam, a rotary anode unit having a target generating an X-ray by receiving the electron beam and configured to rotate the target, a magnetic lens having a coil configured to generate a magnetic force acting on the electron beam between the electron gun and the target, and a wall portion disposed between the target and the coil so as to face the target. The wall portion is formed with an electron passage hole through which the electron beam passes and a flow path configured to allow a coolant to flow.
X-ray source and method for manufacturing an X-ray source
An X-ray source (10) for generating X-rays (11) is provided. The X-ray source (10) comprises an emitter arrangement (12) for generating electrons or for generating X-rays, at least one feedthrough (38) for supplying electrical power to the emitter arrangement (12), and an insulator (20) configured for isolating an electrical potential of the at least one feedthrough (38) from a ground potential. Therein, the at least one feedthrough (38) extends at least partly through the insulator (20), and at least a part of the insulator (20) is in thermal contact with at least a part of the emitter arrangement (12). Further, the insulator (20) comprises at least one cooling channel (28) formed completely in an interior volume (25) of the insulator (20) and configured to dissipate heat from the emitter arrangement (12), wherein a distance (29) between an outer surface (26) of the insulator (20) and the cooling channel (28) is at least as large as half of a thickness (27) of the cooling channel (20).
A ROTARY ANODE FOR AN X-RAY SOURCE
The rotatable anode of a rotating anode X-ray source has demanding requirements placed upon it. For example, it may rotate at a frequency as high as 200 Hz. X-ray emission is stimulated by applying a large voltage to the cathode, causing electrons to collide with the focal track. The focal spot generated at the electron impact position may have a peak temperature between 2000 C. and 3000 C. The constant rotation of the rotating anode protects the focal track to some extent, however the average temperature of the focal track immediately following a CT acquisition protocol may still be around 1500 C. Therefore, demanding requirements are placed upon the design of the rotating anode. The present application proposes a multi-layer coating for the target region of a rotating X-ray anode which improves mechanical resilience and thermal resilience, whilst reducing the amount of expensive refractory metals required.
X-ray source with rotating liquid-metal target
- Aleksandr Yurievich VINOKHODOV ,
- Vladimir Vitalievich IVANOV ,
- Konstantin Nikolaevich KOSHELEV ,
- Mikhail Sergeyevich KRIVOKORYTOV ,
- Vladimir Mikhailovich KRIVTSUN ,
- Aleksandr Andreevich LASH ,
- Vyacheslav Valerievich MEDVEDEV ,
- Yury Viktorovich SIDELNIKOV ,
- Oleg Feliksovich YAKUSHEV ,
- Denis Alexandrovich GLUSHKOV ,
- Samir Ellwi ,
- Oleg Borisovich KHRISTOFOROV
An X-ray beam is generated in an interaction zone of an electron beam and a target, the zone being an annular layer of a molten fusible metal in an annular channel of a rotating anode assembly. The channel has a surface profile which prevents slopping of the molten metal in the radial direction and in both directions along the rotation axis. The liquid-metal target forms a circular cylindrical surface due to the centrifugal force acting thereupon. The linear velocity of the target is preferably higher than 80 m/s; in a vacuum chamber, a changeable membrane made of carbon nanotubes is installed in the X-ray beam path and a protective screen with apertures for electron beam entry and X-ray beam exit is arranged around the interaction zone. The technical result consists in an X-ray source with increased power, brightness, lifetime and ease of use.
Systems and methods for X-ray imaging
A system and method for generating X-rays are disclosed. The method may include emitting an electron beam from a cathode to a focal track of a rotating target. The method may further include deflecting the electron beam onto a first region of the focal track at a first time, and deflecting the electron beam onto a second region of the focal track at a second time. The first region of the focal track may be separated from the second region of the focal track. The method may further include generating X-rays in response to the electron beam deflected onto the first region of the focal track or onto the second region of the focal track.
Liquid metal rotating anode X-ray source for semiconductor metrology
Methods and systems for realizing a high brightness, liquid based x-ray source suitable for high throughput x-ray metrology are presented herein. A high brightness x-ray source is produced by bombarding a rotating liquid metal anode material with a stream of electrons to generate x-ray radiation. A rotating anode support structure supports the liquid metal anode material in a fixed position with respect to the support structure while rotating at the constant angular velocity. In another aspect, a translational actuator is coupled to the rotating assembly to translate the liquid metal anode in a direction parallel to the axis of rotation. In another aspect, an output window is coupled to the rotating anode support structure. Emitted x-rays are transmitted through the output window toward the specimen under measurement. In another further aspect, a containment window maintains the shape of the liquid metal anode material independent of rotational angular velocity.
System and method for improving x-ray production in an x-ray device
An x-ray device is presented. The x-ray device includes a cathode configured to emit an electron beam. Also, the x-ray device includes an anode configured to rotate about a longitudinal axis of the x-ray device and positioned to receive the emitted electron beam, where the anode includes a target element disposed on an anode surface of the anode and a track element embedded in the target element, where the track element is configured to generate x-rays in response to the emitted electron beam impinging on a focal spot on the track element, where at least a portion of the track element is configured to transition from a first phase to a second phase based on heat generated in at least a portion of the track element, and where at least the portion of the track element is configured to distribute the generated heat across the anode.
X-RAY DEVICE AND METHOD OF APPLYING X-RAY RADIATION
The present disclosure provides an x-ray device including a housing configured to provide a vacuum therein, a cathode arranged inside the housing and configured to emit electrons, an anode arranged inside the housing and configured to produce x-ray radiation when impacted by electrons emitted by the cathode, and a converter configured to convert the x-ray radiation produced by the anode into monochromatic x-ray radiation, wherein the anode is configured to produce x-ray radiation in transmission and is arranged between the cathode and the converter. The present disclosure may be used in medical imaging, therapy, spectroscopy, and the like. Geometries and configurations may be improved compared to previously known x-ray devices when it comes to requirements for space, materials used, complexity of electrical wiring, distance between cathode and anode, and providing supplementary functions.
X-ray generator
A X-ray generating device includes a chamber, a rotating body in the chamber, a starting material storage vessel for storing a target starting material in liquid form, and a starting material supply mechanism for applying the target starting material onto a surface of the rotating body. The X-ray generating device also includes an energy beam inlet window disposed at an opening of the chamber and configured to transmit an energy beam, which will be directed onto the target starting material on the surface of the rotating body and introduce the energy beam from the exterior of the chamber to the interior of the chamber, and an X-ray outlet window disposed at the opening of the chamber and configured to transmit the X-rays, which are generated upon irradiating the target starting material with the energy beam, and allow the X-rays to proceed to the exterior of the chamber.
X-RAY SOURCE AND METHOD FOR MANUFACTURING AN X-RAY SOURCE
An X-ray source (10) for generating X-rays (11) is provided. The X-ray source (10) comprises an emitter arrangement (12) for generating electrons or for generating X-rays, at least one feedthrough (38) for supplying electrical power to the emitter arrangement (12), and an insulator (20) configured for isolating an electrical potential of the at least one feedthrough (38) from a ground potential. Therein, the at least one feedthrough (38) extends at least partly through the insulator (20), and at least a part of the insulator (20) is in thermal contact with at least a part of the emitter arrangement (12). Further, the insulator (20) comprises at least one cooling channel (28) formed completely in an interior volume (25) of the insulator (20) and configured to dissipate heat from the emitter arrangement (12), wherein a distance (29) between an outer surface (26) of the insulator (20) and the cooling channel (28) is at least as large as half of a thickness (27) of the cooling channel (20).