H01J35/105

HIGH-TEMPERATURE COMPONENT AND METHOD FOR PRODUCING A HIGH-TEMPERATURE COMPONENT
20200095669 · 2020-03-26 ·

A high-temperature component of a refractory metal or a refractory metal alloy has an emissivity-increasing coating. The coating is formed of tantalum nitride and/or zirconium nitride; and tungsten with a tungsten content between 0 and 98 wt. %.

SYSTEMS AND METHODS FOR X-RAY IMAGING

A system and method for generating X-rays are disclosed. The method may include emitting an electron beam from a cathode to a focal track of a rotating target. The method may further include deflecting the electron beam onto a first region of the focal track at a first time, and deflecting the electron beam onto a second region of the focal track at a second time. The first region of the focal track may be separated from the second region of the focal track. The method may further include generating X-rays in response to the electron beam deflected onto the first region of the focal track or onto the second region of the focal track.

X-ray tube assembly including a first cylindrical pipe, a second cylindrical pipe, and an elastic member

According to one embodiment, an X-ray tube assembly includes a cathode, an anode target, a joint including an inflow part into which a coolant flows, a first cylindrical pipe to which the joint is connected at one end, and the anode target is joined at an outer bottom part of the other end, a second cylindrical pipe whose first end part is fitted into the inflow part, and whose second end part is arranged to eject the coolant toward the bottom part of the first cylindrical pipe, the second cylindrical pipe being placed inside the first cylindrical pipe and an elastic member provided between the first end part and the first cylindrical pipe.

Multilayer X-ray source target

The present disclosure relates to the production and use of a multi-layer X-ray source target. In certain implementations, layers of X-ray generating material may be interleaved with thermally conductive layers. To prevent delamination of the layers, various mechanical, chemical, and structural approaches are related, including approaches for reducing the internal stress associated with the deposited layers and for increasing binding strength between layers.

Systems and methods for X-ray imaging

A system and method for generating X-rays are disclosed. The method may include emitting an electron beam from a cathode to a focal track of a rotating target. The method may further include deflecting the electron beam onto a first region of the focal track at a first time, and deflecting the electron beam onto a second region of the focal track at a second time. The first region of the focal track may be separated from the second region of the focal track. The method may further include generating X-rays in response to the electron beam deflected onto the first region of the focal track or onto the second region of the focal track.

X-ray systems and methods including X-ray anodes with gradient profiles
10438768 · 2019-10-08 ·

An anode for an X-ray tube can include one or more of an yttrium-oxide derivative, titanium diboride, boron carbide, titanium suboxide, reaction-bonded silicon carbide, and reaction-bonded silicon nitride. Upon collision with an anode, the kinetic energy of an electron beam in an X-ray tube is converted to high-frequency electromagnetic waves, i.e., X-rays. An anode from one or more of the above materials and a gradient distribution of conductive metals can reduce costs and/or weight, extend the life of the anode or associated components (e.g., bearings) and simultaneously provide a higher heat storage capacity as compared to traditional molybdenum and tungsten anodes.

TARGET STRUCTURE FOR GENERATION OF X-RAY RADIATION

A target structure for generation of x-ray radiation may include a heat sink; and a target element for electrons to strike, the target element being in the heat sink to cool the target element, wherein the heat sink includes a metal-diamond composite material.

X-RAY GENERATOR

A X-ray generating device includes a chamber, a rotating body in the chamber, a starting material storage vessel for storing a target starting material in liquid form, and a starting material supply mechanism for applying the target starting material onto a surface of the rotating body. The X-ray generating device also includes an energy beam inlet window disposed at an opening of the chamber and configured to transmit an energy beam, which will be directed onto the target starting material on the surface of the rotating body and introduce the energy beam from the exterior of the chamber to the interior of the chamber, and an X-ray outlet window disposed at the opening of the chamber and configured to transmit the X-rays, which are generated upon irradiating the target starting material with the energy beam, and allow the X-rays to proceed to the exterior of the chamber.

SYSTEM AND METHOD FOR IMPROVING X-RAY PRODUCTION IN AN X-RAY DEVICE
20190189386 · 2019-06-20 ·

An x-ray device is presented. The x-ray device includes a cathode configured to emit an electron beam. Also, the x-ray device includes an anode configured to rotate about a longitudinal axis of the x-ray device and positioned to receive the emitted electron beam, where the anode includes a target element disposed on an anode surface of the anode and a track element embedded in the target element, where the track element is configured to generate x-rays in response to the emitted electron beam impinging on a focal spot on the track element, where at least a portion of the track element is configured to transition from a first phase to a second phase based on heat generated in at least a portion of the track element, and where at least the portion of the track element is configured to distribute the generated heat across the anode.

Liquid Metal Rotating Anode X-Ray Source For Semiconductor Metrology
20190115184 · 2019-04-18 ·

Methods and systems for realizing a high brightness, liquid based x-ray source suitable for high throughput x-ray metrology are presented herein. A high brightness x-ray source is produced by bombarding a rotating liquid metal anode material with a stream of electrons to generate x-ray radiation. A rotating anode support structure supports the liquid metal anode material in a fixed position with respect to the support structure while rotating at the constant angular velocity. In another aspect, a translational actuator is coupled to the rotating assembly to translate the liquid metal anode in a direction parallel to the axis of rotation. In another aspect, an output window is coupled to the rotating anode support structure. Emitted x-rays are transmitted through the output window toward the specimen under measurement. In another further aspect, a containment window maintains the shape of the liquid metal anode material independent of rotational angular velocity.