An x-ray tube includes an electron emitter to emit an electron beam; and a multilayer anode including a first anode layer facing the electron beam and a second anode layer facing away from the electron beam. The first anode layer includes a first anode material to generate a braking radiation via the electron beam and the second anode layer includes a second anode material to generate a further x-ray radiation via the braking radiation. Thee further x-ray radiation is relatively more monochromatic than the braking radiation and wherein the first anode layer and the second anode layer adjoin in a planar manner.

An analytical X-ray tube with an anode target material that emits characteristic X-rays in response to excitation by an electron beam may include any of several advantageous features. The target material is deposited on a diamond substrate layer, and a metal carbide intermediate layer may be provided between the target material and substrate that provides enhanced bonding therebetween. An interface layer may also be used that provides an acoustic impedance matching between the target material and the substrate. For a low thermal conductivity target material, a heat dissipation layer of a higher thermal conductivity material may also be included between the target material and substrate to enhance thermal transfer. The target material may have a thickness that corresponds to a maximum penetration depth of the electrons of the electron beam, and the structure may be such that a predetermined temperature range is maintained at the substrate interface.

A target for generating x-rays includes at least one substrate including a first material and a plurality of discrete structures including at least one second material configured to generate x-rays in response to electron bombardment. The discrete structures are distributed across a first surface of the at least one substrate in an array pattern function A that has a corresponding function B such that a combination operation of the array pattern function A with the corresponding function B generates a resultant function C comprising a first portion with a single peak and a substantially flat second portion surrounding the first portion. The combination operation includes a cross-correlation operation or a convolution operation

A target assembly for generating radiation may comprise a target, a substrate and a window. The target may be capable of generating first radiation when impinged by a beam. The window may be at least partially permeable to the beam. The window and the substrate may form at least part of a hermetically sealed chamber and the target may be positioned in the chamber. The chamber may be filled with air having a normal or reduced content of oxygen.

An inspection radiation source is provided. The inspection radiation source includes an electron accelerator for generating an electron current, and a target for the electron current including a first part and a second part. This first part is configured to be at least partly exposed to the electron current on an impact area having a first width in a direction substantially perpendicular to the electron current, and inhibit propagation of the electron current. The second part has a second width in the direction substantially perpendicular to the electron current, the second width of the second part being smaller than the first width of the impact area, the second part being configured to be at least partly exposed to the electron current, and generate inspection radiation by emitting X-rays in response to being exposed to the electron current.

In an X-ray generating apparatus 101 in which an X-ray tube 102 is anode-grounded to a protruding portion 107c of a container 107, electrical discharge between the X-ray tube 102 and the container 107 is reduced. The container 107 includes the protruding portion 107c in such a way that, in the axial direction Dt, a bent portion 107d is positioned between an anode-side joint portion 128 where the insulating tube 4 and the anode 103 are joined to each other and a cathode-side joint portion 122 where the insulating tube 4 and the cathode 104 are joined to each other.

A beam injector may include a cathode emitter to emit electrons and an electrode to bias at least a portion of the electrons to remain on the cathode emitter and focus the emitted electrons into an electron beam. The beam injector may also include a resistor coupled between the cathode emitter and the electrode and configured to allow self-regulation of a voltage potential on the electrode based at least in part on a current of the electron beam.

A system and method for generating X-ray radiation. The system includes an electron source operable to generate an electron beam and an X-ray target for generating X-ray radiation upon interaction with the electron beam. The method includes moving the electron beam over an edge separating a first region and a second region of the X-ray target, wherein the first region and the second region have different capability to generate X-ray radiation upon interaction with the electron beam. The system allows for a lateral extension of the electron beam to be determined based on a change in a quantity indicative of the interaction between the electron beam and the first region and between the electron beam and the second region, and the movement of the electron beam.

Disclosed is a low pressure wire ion plasma discharge source including an elongated ionization chamber housing at least two parallel anode wires extending longitudinally within the ionization chamber. A first of the at least two anode wires is connected to a DC voltage supply and a second of the at least two anode wires is connected to a pulsed voltage supply.

A target assembly for generating radiation may comprise a target, a substrate and a window. The target may be capable of generating first radiation when impinged by a beam. The window may be at least partially permeable to the beam. The window and the substrate may form at least part of a hermetically sealed chamber and the target may be positioned in the chamber. The chamber may be filled with air having a normal or reduced content of oxygen.