Patent classifications
H01L21/68778
Apparatus and method for adjustment of a handling device for handling electronic components
Disclosed is an apparatus for handling electronic components and a method of adjusting the position of at least one handling device of an apparatus for handling electronic components. The apparatus comprises a rotary device; an imaging device located on the rotary device which is positionable by the rotary device; a plurality of pick heads arranged circumferentially around the rotary device, each pick head being operable to hold an electronic component; a fiducial mark located at a fixed position relative to the rotary device such that the rotary device is rotatable relative to the fiducial mark, the fixed position of the fiducial mark being indicative of an arrangement of an electronic component which is held by a respective pick head; and at least one handling device for handling the electronic components, the position of the at least one handling device being adjustable for aligning the at least one handling device with the arrangement of the electronic component held by the pick head; wherein the imaging device is operative to capture at least one image comprising the fiducial mark and the at least one handling device for deriving an offset between the at least one handling device and the arrangement of the electronic component as indicated by the fixed position of the fiducial mark.
WORKPIECE HOLDING BODY AND FILM-FORMING APPARATUS
According to an embodiment of the present invention, the workpiece holding body 20 for surface processing includes the holder 21 and the adhesive sheet 22. The adhesive sheet 22 includes the first surface 22a (the first adhesive layer 221) and the second surface 22b (the second adhesive layer 222), the first surface 22a (the first adhesive layer 221) being bonded to the holder 21 at a first adhesive force, the second surface 22b (the second adhesive layer 222) being capable of holding a workpiece (the component main-body 110) at a second adhesive force, the second adhesive force being higher than the first adhesive force.
Carrier system, exposure apparatus, carrier method, exposure method, device manufacturing method, and suction device
A carrier system is provided with a wafer stage which holds a mounted wafer and is also movable along an XY plane, a chuck unit which holds the wafer from above in a non-contact manner above a predetermined position and is vertically movable, and a plurality of vertical movement pins, which can support from below the wafer held by the chuck unit on the wafer stage when the wafer stage is positioned at the predetermined position above and can also move vertically. Then, flatness of the wafer is measured by a Z position detection system, and based on the measurement results, the chuck unit and the vertical movement pins that hold (support) the wafer are independently driven.
CARRIER SYSTEM, EXPOSURE APPARATUS, CARRIER METHOD, EXPOSURE METHOD, DEVICE MANUFACTURING METHOD, AND SUCTION DEVICE
A carrier system and method carries a plate-like object to an object mounting member provided with an object mounting section. The system includes an adjustment device that changes a shape of the plate-like object into a predetermined shape before the plate-like object is mounted onto the object mounting section. The plate-like object whose shape is changed into the predetermined shape is mounted onto the object mounting section.
SUPPORT FOR FLEXIBLE WORKPIECES
Clamping of edges of flexible workpieces to a support surface is improved by creating a region of reduced pressure proximate the edges, by shaping air conduits so that they narrow in the edge regions.
Display device and method for manufacturing the same
A method for producing a display device includes locating a substrate, including a plurality of pixels, on a jig including a magnet; locating a plate formed of a magnetic material on the substrate to secure the substrate; and folding back an end portion of the substrate in a state where the substrate is held between the jig and the plate.
Package on package devices and methods of packaging semiconductor dies
Package on package (PoP) devices and methods of packaging semiconductor dies are disclosed. A PoP device includes a first packaged die and a second packaged die coupled to the first packaged die. Metal stud bumps are disposed between the first packaged die and the second packaged die. The metal stud bumps include a stick region, a first ball region coupled to a first end of the stick region, and a second ball region coupled to a second end of the stick region. The metal stud bumps include a portion that is partially embedded in a solder joint.
Frame mounting after foil expansion
An apparatus which comprises an expansion unit configured for expanding a foil, and a mounting unit configured for subsequently mounting the expanded foil on a frame and a workpiece, in particular a wafer, on the expanded foil.
Plate support body and conveyance apparatus
A plate support body detachably supports a plate in a vertical position. The plate support body comprises a base body disposed in a direction along a peripheral edge of the plate, and a plurality of placing members which are juxtaposed in the direction along the peripheral edge and respectively protrude from the base body, a peripheral edge part of the lower side of the plate being placed on the placing members. A first placing member corresponding to a central part of the peripheral edge part of the lower side of the plate in the direction along the peripheral edge has the shortest protruded length from the base body, and a second placing member corresponding to either end of the peripheral edge part of the lower side of the plate in the direction along the peripheral edge has a constant protruded length from the base body.
Post-Baking Device and Post-Baking Method for Forming Black Matrix
A post-baking device and post-baking method for forming a black matrix are disclosed, and the post-baking device includes a housing defining an inner accommodation space therein, a plurality of heating elements provided within the housing, and at least one bracket provided in the inner accommodation space. The at least one bracket is configured to bear the substrate formed with the black matrix, and the bracket is rotatable with respect to the plurality of heating elements.