Patent classifications
H01L21/8256
RESISTORS FOR INTEGRATED CIRCUITS
A thin-film integrated circuit comprising a first semiconductor device, a second semiconductor device, a first resistor, and a second resistor is provided. A semiconducting region of the first semiconductor device, a resistor body of the first resistor, a semiconducting region of the second semiconductor device, and a resistor body of the second resistor are formed from at least one of a first source material and a second source material, and a material of the resistor body of the first resistor and a material of the resistor body of the second resistor have different electrical properties.
THIN-FILM COMPONENTS FOR INTEGRATED CIRCUITS
A thin-film electronic component includes a first terminal, a second terminal, and a first current path between the first terminal and the second terminal, wherein the first current path is formed from a first segment of a first material and a first segment of a second material arranged in series between the first terminal and the second terminal.
Stacked thin film transistors
Embodiments herein describe techniques for a semiconductor device including a first transistor above a substrate, an insulator layer above the first transistor, and a second transistor above the insulator layer. The first transistor includes a first channel layer above the substrate, and a first gate electrode above the first channel layer. The insulator layer is next to a first source electrode of the first transistor above the first channel layer, next to a first drain electrode of the first transistor above the first channel layer, and above the first gate electrode. The second transistor includes a second channel layer above the insulator layer, and a second gate electrode separated from the second channel layer by a gate dielectric layer. Other embodiments may be described and/or claimed.
Stacked thin film transistors
Embodiments herein describe techniques for a semiconductor device including a first transistor above a substrate, an insulator layer above the first transistor, and a second transistor above the insulator layer. The first transistor includes a first channel layer above the substrate, and a first gate electrode above the first channel layer. The insulator layer is next to a first source electrode of the first transistor above the first channel layer, next to a first drain electrode of the first transistor above the first channel layer, and above the first gate electrode. The second transistor includes a second channel layer above the insulator layer, and a second gate electrode separated from the second channel layer by a gate dielectric layer. Other embodiments may be described and/or claimed.
SEMICONDUCTOR DEVICE
A semiconductor device with little characteristic variation is provided. A transistor includes an oxide semiconductor; a first conductor and a second conductor over the oxide semiconductor; a first insulator over the first conductor; a second insulator over the second conductor; a third insulator that is positioned over the first insulator and the second insulator and provided with a first opening overlapping with a region between the first conductor and the second conductor; a fourth insulator positioned over the oxide semiconductor and between the first conductor and the second conductor; and a third conductor over the fourth insulator. A capacitor includes the second conductor; the third insulator provided with a second opening reaching the second conductor; a fifth insulator positioned inside the second opening; and a fourth conductor over the fifth insulator. A plug is positioned to penetrate the first insulator, the third insulator, the first conductor, and the oxide semiconductor. The plug is electrically connected to the first conductor. The first insulator and the second insulator are each formed using a metal oxide including an amorphous structure.
Devices Having a Semiconductor Material That Is Semimetal in Bulk and Methods of Forming the Same
Devices, and methods of forming such devices, having a material that is semimetal when in bulk but is a semiconductor in the devices are described. An example structure includes a substrate, a first source/drain contact region, a channel structure, a gate dielectric, a gate electrode, and a second source/drain contact region. The substrate has an upper surface. The channel structure is connected to and over the first source/drain contact region, and the channel structure is over the upper surface of the substrate. The channel structure has a sidewall that extends above the first source/drain contact region. The channel structure comprises a bismuth-containing semiconductor material. The gate dielectric is along the sidewall of the channel structure. The gate electrode is along the gate dielectric. The second source/drain contact region is connected to and over the channel structure.
Devices Having a Semiconductor Material That Is Semimetal in Bulk and Methods of Forming the Same
Devices, and methods of forming such devices, having a material that is semimetal when in bulk but is a semiconductor in the devices are described. An example structure includes a substrate, a first source/drain contact region, a channel structure, a gate dielectric, a gate electrode, and a second source/drain contact region. The substrate has an upper surface. The channel structure is connected to and over the first source/drain contact region, and the channel structure is over the upper surface of the substrate. The channel structure has a sidewall that extends above the first source/drain contact region. The channel structure comprises a bismuth-containing semiconductor material. The gate dielectric is along the sidewall of the channel structure. The gate electrode is along the gate dielectric. The second source/drain contact region is connected to and over the channel structure.
Field-effect transistors having transition metal dichalcogenide channels and methods of manufacture
A transistor that is formed with a transition metal dichalcogenide material is provided. The transition metal dichalcogenide material is formed using a direct deposition process and patterned into one or more fins. A gate dielectric and a gate electrode are formed over the one or more fins. Alternatively, the transition metal dichalcogenide material may be formed using a deposition of a non-transition metal dichalcogenide material followed by a treatment to form a transition metal dichalcogenide material. Additionally, fins that utilized the transition metal dichalcogenide material may be formed with sidewalls that are either perpendicular to a substrate or else are sloped relative to the substrate.
Field-effect transistors having transition metal dichalcogenide channels and methods of manufacture
A transistor that is formed with a transition metal dichalcogenide material is provided. The transition metal dichalcogenide material is formed using a direct deposition process and patterned into one or more fins. A gate dielectric and a gate electrode are formed over the one or more fins. Alternatively, the transition metal dichalcogenide material may be formed using a deposition of a non-transition metal dichalcogenide material followed by a treatment to form a transition metal dichalcogenide material. Additionally, fins that utilized the transition metal dichalcogenide material may be formed with sidewalls that are either perpendicular to a substrate or else are sloped relative to the substrate.
Stacked transistor architecture including nanowire or nanoribbon thin film transistors
Stacked transistor structures including one or more thin film transistor (TFT) material nanowire or nanoribbon channel regions and methods of forming same are disclosed. In an embodiment, a second transistor structure has a TFT material nanowire or nanoribbon stacked on a first transistor structure which also includes nanowires or nanoribbons comprising TFT material or group IV semiconductor. The top and bottom channel regions may be configured the same or differently, with respect to shape and/or semiconductor materials. Top and bottom transistor structures (e.g., NMOS/PMOS) may be formed using the top and bottom channel region structures. An insulator region may be interposed between the upper and lower channel regions.