Embodiments herein describe techniques for a semiconductor device including a package substrate. The package substrate includes a via pad at least partially in a core layer. A first dielectric layer having a first dielectric material is above the via pad and the core layer, where the first dielectric layer has a first through hole that is through the first dielectric layer to reach the via pad. A second dielectric layer having a second dielectric material is at least partially filling the first through hole, where the second dielectric layer has a second through hole that is through the second dielectric layer to reach the via pad. A via is further within the second through hole of the second dielectric layer, surrounded by the second dielectric material, and in contact with the via pad. Other embodiments may be described and/or claimed.

Disclosed are redistribution substrates and semiconductor packages including the same. For example, a redistribution substrate including a dielectric pattern, and a first redistribution pattern in the dielectric pattern is provided. The first redistribution pattern may include: a first via part having a first via seed pattern and a first via conductive pattern on the first via seed pattern, and a first wiring part having a first wiring seed pattern and a first wiring conductive pattern, the first wiring part being disposed on the first via part and having a horizontal width that is different from a horizontal width of the first via part. Additionally, the first wiring seed pattern may cover a bottom surface and a sidewall surface of the first wiring conductive pattern, and the first via conductive pattern is directly connected to the first wiring conductive pattern.

A semiconductor package includes: a substrate structure having a first surface and an opposite second surface; a semiconductor chip on the first surface; and a connection bump on the second surface. The substrate structure includes: interconnection patterns disposed at different levels relative to the second surface; connection vias connecting the interconnection patterns; and a passivation layer covering a portion of the interconnection patterns and having an opening. The interconnection patterns include a first pattern and a second pattern, wherein the first pattern and the second pattern are adjacent to the second surface, and wherein a side surface of the first pattern faces a side surface of the second pattern. The second pattern includes a pad pattern and a metal layer in contact with the pad pattern and the connection bump. The first pattern has a first thickness and the second pattern has a pad thickness that is greater than the first thickness.

In one example, a semiconductor device, includes a substrate having a substrate top side, a substrate bottom side, a substrate dielectric structure, and a substrate conductive structure. The substrate conductive structure includes a transceiver pattern proximate to a substrate top side. An antenna structure includes an antenna dielectric structure coupled to the substrate top side, an antenna conductive structure having an antenna element, and a cavity below the antenna element. The antenna element overlies the transceiver pattern. The cavity includes a cavity ceiling, a cavity base, and a cavity sidewall between the cavity ceiling and the cavity base. Either a bottom surface of the antenna element defines the cavity ceiling and a perimeter portion of the antenna element is fixed to the antenna dielectric structure, or the antenna dielectric structure includes a body portion having a bottom surface that defines the cavity ceiling and the antenna element is vertically spaced apart from the bottom surface of the body portion. An semiconductor component is coupled to a bottom side of the substrate and is coupled to the transceiver pattern. Other examples and related methods are also disclosed herein.

A package substrate according to an embodiment includes a first substrate; and a first chip mounted on the first substrate; wherein the first substrate includes: a first insulating layer including a first region overlapping the first chip in a vertical direction and a second region other than the first region; and a circuit pattern disposed on the first region and the second region of the first insulating layer; wherein the circuit pattern includes: a pad portion including a first portion disposed on an upper surface of the second region of the first insulating layer, a second portion buried in the first region of the first insulating layer, and a third portion including at least a part buried in the first region of the first insulating layer and connecting between the first portion and the second portion; wherein at least a part of the first chip is disposed in the first region of the first insulating layer; wherein the first region of the first insulating layer surrounds a lower surface and a side surface of the first chip, and wherein the first region and the second region of the first insulating layer are a single insulating layer.

A semiconductor device, a semiconductor device package, and a method of manufacturing a semiconductor device package are provided. The semiconductor device includes an electronic component and a first protection layer. The electronic component includes a first conductive pad protruded out of a first surface of the electronic component. The first protection layer covers an external surface of the first conductive pad. The first surface of the electronic component is exposed from the first protection layer.

The present disclosure is directed to systems and methods for providing a dielectric layer on a semiconductor substrate capable of supporting very high density interconnects (i.e., ≥100 IO/mm). The dielectric layer includes a maleimide polymer in which a thiol-terminated functional group crosslinks with an epoxy resin. The resultant dielectric material provides a dielectric constant of less than 3 and a dissipation factor of less than 0.001. Additionally, the thiol functional group forms coordination complexes with noble metals present in the conductive structures, thus by controlling the stoichiometry of epoxy to polyimide, the thiol-polyimide may beneficially provide an adhesion enhancer between the dielectric and noble metal conductive structures.

A semiconductor device includes a wiring board, a semiconductor chip arranged on the wiring board, and a plurality of bumps arranged between the wiring board and the semiconductor chip, wherein the wiring board includes a first conductor, a second conductor, a third conductor, a first via, a second via, and a third via, wherein the second conductor is arranged at a position closer to a center of the semiconductor chip than the first conductor is to the center, as seen in a thickness direction, the first conductor and the second conductor are arranged next to each other without another conductor interposed therebetween, as seen in the thickness direction, and a first distance between the first conductor and the second conductor is larger than a second distance between the first conductor and the third conductor.

A package substrate includes; a conductive line extending in a first horizontal direction, a conductive pad on an upper surface of the package substrate and horizontally spaced apart from the conductive line in a second horizontal direction, and a protective layer covering the conductive line and including an opening selectively exposing a portion of the conductive pad. The opening has an elongated elliptical shape having a minor axis defined by a width extending in the first horizontal direction and a major axis defined by a length extending in the second horizontal direction.

A semiconductor package includes a base chip including a passivation layer on an upper surface thereof, a semiconductor chip on the base chip, a bump on a lower surface of the semiconductor chip, an underfill layer covering the bump and covering the lower surface of the semiconductor chip, an encapsulant covering the semiconductor chip on the base chip, and an organic material layer on the passivation layer, wherein the base chip includes silicon (Si), the passivation layer has a first region in contact with the underfill layer and a second region, surrounding the first region, and the organic material layer is on the second region.