H01L29/0808

Method for creating the high voltage complementary BJT with lateral collector on bulk substrate with resurf effect

Complementary high-voltage bipolar transistors formed in standard bulk silicon integrated circuits are disclosed. In one disclosed embodiment, collector regions are formed in an epitaxial silicon layer. Base regions and emitters are disposed over the collector region. An n-type region is formed under collector region by implanting donor impurities into a p-substrate for the PNP transistor and implanting acceptor impurities into the p-substrate for the NPN transistor prior to depositing the collector epitaxial regions. Later in the process flow these n-type and p-type regions are connected to the top of the die by a deep n+ and p+ wells respectively. The n-type well is then coupled to VCC while the p-type well is coupled to GND, providing laterally depleted portions of the PNP and NPN collector regions and hence, increasing their BVs.

Semiconductor device

A semiconductor device is provided. The semiconductor device includes a first doped region and a second doped region of a first conductive type and a third doped region of a second conductive type located in a substrate. The second doped region is located at a side of the first doped region. A top-view pattern of the second doped region has at least one recess portion. The third doped region is located between the first doped region and the second doped region. A top-view pattern of the third doped region has at least one protruded portion corresponding to the at least one recess portion.

DISHING PREVENTION COLUMNS FOR BIPOLAR JUNCTION TRANSISTORS
20190103367 · 2019-04-04 ·

In some embodiments, a bipolar junction transistor (BJT) is provided. The BJT may include a collector region that is disposed within a semiconductor substrate. A base region that is disposed within the semiconductor substrate and arranged within the collector region. An emitter region that is disposed within the semiconductor substrate and arranged within the base region. A pre-metal dielectric layer that is disposed over an upper surface of the semiconductor substrate and that separates the upper surface of the semiconductor substrate from a lowermost metal interconnect layer. A first plurality of dishing prevention columns that are arranged over the emitter region and within the pre-metal dielectric layer, where the plurality of dishing prevention columns each include a dummy gate that is conductive and electrically floating.

Lateral bipolar transistors

The present disclosure relates to semiconductor structures and, more particularly, to a lateral bipolar transistor and methods of manufacture. The structure includes: an extrinsic base having at least one sidewall with a gradient concentration of semiconductor material; an emitter on a first side of the extrinsic base; and a collector on a second side of the extrinsic base.

Lateral PNP bipolar transistor with narrow trench emitter

A lateral bipolar transistor includes trench emitter and trench collector regions to form ultra-narrow emitter regions, thereby improving emitter efficiency. The same trench process is used to form the emitter/collector trenches as well as the trench isolation structures so that no additional processing steps are needed to form the trench emitter and collector. In embodiments of the present invention, the trench emitter and trench collector regions may be formed using ion implantation into trenches formed in a semiconductor layer. In other embodiments, the trench emitter and trench collector regions may be formed by out-diffusion of dopants from heavily doped polysilicon filled trenches.

BIPOLAR JUNCTION TRANSISTOR AND METHOD FOR FABRICATING THE SAME
20190067461 · 2019-02-28 ·

A method for fabricating bipolar junction transistor (BJT) includes the steps of: providing a substrate having an emitter region, a base region, and a collector region; performing a first implantation process to form a first well region in the base region; and performing a second implantation process to form a second well region in the emitter region. Preferably, the first well region and the second well region comprise different concentration.

Bipolar junction transistor and method for fabricating the same
10217853 · 2019-02-26 · ·

A method for fabricating bipolar junction transistor (BJT) includes the steps of: providing a substrate having an emitter region, a base region, and a collector region; performing a first implantation process to form a first well region in the base region; and performing a second implantation process to form a second well region in the emitter region. Preferably, the first well region and the second well region comprise different concentration.

Operation of double-base bipolar transistors with additional timing phases at switching transitions

Methods and systems for operating a double-base bidirectional power bipolar transistor. Two timing phases are used to transition into turn-off: one where each base is shorted to its nearest emitter/collector region, and a second one where negative drive is applied to the emitter-side base to reduce the minority carrier population in the bulk substrate. A diode prevents reverse turn-on while negative base drive is being applied.

METHOD FOR MANUFACTURING A BJT FINFET DEVICE

A method for manufacturing a fin-type bipolar semiconductor device includes providing a substrate comprising a first region of a first conductivity type and a second region of a second conductivity type adjacent the first region, etching the substrate to form a third region in the first region, a first set of fins on the third region, a fourth region in the second region, and a second set of fins on the fourth region, performing a first implantation into a first portion of the second set of fins and a corresponding portion of the fourth region to form an emitter region of the first conductivity type, a remaining portion of the fourth region not being doped forming a base region adjacent the emitter region and forming a junction in the fourth region, and performing a second implantation into a second portion of the second set of fins different from the first portion.

LATERAL BIPOLAR JUNCTION TRANSISTOR WITH ABRUPT JUNCTION AND COMPOUND BURIED OXIDE
20190043945 · 2019-02-07 ·

A lateral bipolar junction transistor (LBJT) device that may include a dielectric stack including a pedestal of a base region passivating dielectric and a nucleation dielectric layer; and a base region composed of a germanium containing material or a type III-V semiconductor material in contact with the pedestal of the base region passivating dielectric. An emitter region and collector region may be present on opposing sides of the base region contacting a sidewall of the pedestal of the base region passivating dielectric and an upper surface of the nucleation dielectric layer.