Patent classifications
H01L29/511
SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME
The present disclosure relates to a semiconductor device and a method of forming the same, and the semiconductor device includes a substrate, a gate line and a stress layer. The substrate has a plurality of first fins protruded from the substrate. The gate line is disposed over the substrate, across the first fins, to further include a gate electrode and a gate dielectric layer, wherein the dielectric layer is disposed between the gate electrode layer and the first fins. The stress layer is disposed only on lateral surfaces of the first fins and on a top surface of the substrate, wherein a material of the stress layer is different from a material of the first fins.
CAPACITORS FOR HIGH TEMPERATURE SYSTEMS, METHODS OF FORMING SAME, AND APPLICATIONS OF SAME
A capacitor is provided for high temperature systems. The capacitor includes: a substrate formed from silicon carbide material; a dielectric stack layer, including a first layer deposited on the substrate and a second layer deposited on the first layer; a Schottky contact layer deposited on the second layer; and an Ohmic contact layer deposited on the substrate. The first layer is formed with aluminum nitride (AlN) epitaxially, and the second layer is formed with aluminum oxide (Al.sub.2O.sub.3). AlN and Al.sub.2O.sub.3 are ultrawide band gap materials, and as a result, they can be use as the dielectric in the capacitor, allowing the capacitance changes to be less than 10% between −250° C. and 600° C., which is very effective for the high temperature systems.
Transistors, memory cells and semiconductor constructions
Some embodiments include a semiconductor construction having a gate extending into a semiconductor base. Conductively-doped source and drain regions are within the base adjacent the gate. A gate dielectric has a first segment between the source region and the gate, a second segment between the drain region and the gate, and a third segment between the first and second segments. At least a portion of the gate dielectric comprises ferroelectric material. In some embodiments the ferroelectric material is within each of the first, second and third segments. In some embodiments, the ferroelectric material is within the first segment or the third segment. In some embodiments, a transistor has a gate, a source region and a drain region; and has a channel region between the source and drain regions. The transistor has a gate dielectric which contains ferroelectric material between the source region and the gate.
Integrated epitaxial metal electrodes
Systems and methods are described herein to include an epitaxial metal layer between a rare earth oxide and a semiconductor layer. Systems and methods are described to grow a layered structure, comprising a substrate, a first rare earth oxide layer epitaxially grown over the substrate, a first metal layer epitaxially grown over the rare earth oxide layer, and a first semiconductor layer epitaxially grown over the first metal layer. Specifically, the substrate may include a porous portion, which is usually aligned with the metal layer, with or without a rare earth oxide layer in between.
Dummy dielectric fin design for parasitic capacitance reduction
A semiconductor device includes a first device fin and a second device fin. A first source/drain component is epitaxially grown over the first device fin. A second source/drain component is epitaxially grown over the second device fin. A first dummy fin structure is disposed between the first device fin and the second device fin. A gate structure partially wraps around the first device fin, the second device fin, and the first dummy fin structure. A first portion of the first dummy fin structure is disposed between the first source/drain component and the second source/drain component and outside the gate structure. A second portion of the first dummy fin structure is disposed underneath the gate structure. The first portion of the first dummy fin structure and the second portion of the first dummy fin structure have different physical characteristics.
Semiconductor device
A semiconductor device includes: a first electrode; a first semiconductor layer of first conductivity type provided on the first electrode; a second semiconductor layer of first conductivity type provided on the first semiconductor layer; a first semiconductor region of second conductivity type provided on the second semiconductor layer; a second semiconductor region of second conductivity type provided on the second semiconductor layer; a first insulating film provided in a trench between the first semiconductor region and the second semiconductor region, the trench reaching the second semiconductor layer from above the first semiconductor region and the second semiconductor region, the first insulating film containing silicon oxide; a second electrode provided in the trench, the second electrode facing the second semiconductor layer via the first insulating film, the second electrode containing polysilicon; a third electrode provided above the second electrode, the third electrode facing the first semiconductor region and the second semiconductor region via a second insulating film containing silicon oxide; a third insulating film provided between the second electrode and the third electrode, the third insulating film containing silicon nitride; a third semiconductor region of first conductivity type provided on the first semiconductor region; a fourth semiconductor region of first conductivity type provided on the second semiconductor region; an interlayer insulating film provided on the third electrode; and a fourth electrode provided on the interlayer insulating film, the fourth electrode being electrically connected to the third semiconductor region and the fourth semiconductor region.
FERROELECTRIC SEMICONDUCTOR DEVICE AND METHOD OF EXTRACTING DEFECT DENSITY OF THE SAME
Provided are a ferroelectric semiconductor device and a method of extracting a defect density of the same. A ferroelectric electronic device includes a first layer, an insulating layer including a ferroelectric layer and a first interface that is adjacent to the first layer, and an upper electrode over the insulating layer, wherein the insulating layer has a bulk defect density of 10.sup.16 cm.sup.−3eV.sup.−1 or more and an interface defect density of 10.sup.10 cm.sup.−2eV.sup.−1 or more.
Semiconductor device
A semiconductor device includes a semiconductor layer of a first conductivity type. A well region that is a second conductivity type well region is formed on a surface layer portion of the semiconductor layer and has a channel region defined therein. A source region that is a first conductivity type source region is formed on a surface layer portion of the well region. A gate insulating film is formed on the semiconductor layer and has a multilayer structure. A gate electrode is opposed to the channel region of the well region where a channel is formed through the gate insulating film.
SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME
A semiconductor structure is provided. The semiconductor structure includes a first channel layer over a first region of a substrate, a first gate dielectric layer over the first channel layer, and a first gate electrode structure over the first gate dielectric layer. The first gate electrode structure includes a barrier layer over the first gate dielectric layer, a barrier oxide over and in contact with the barrier layer, and a metal fill layer over the barrier oxide. The barrier layer is made of a nitride of a metal, and the barrier oxide is made of an oxide of the metal.
Semiconductor Device and Method of Manufacturing the Same
A semiconductor device (field effect transistor) includes a gate insulating layer between both of a bottom part and a lateral surface of a recess part and a penetration portion of a gate electrode. The gate insulating layer is composed of an oxide of a substance which a barrier layer is composed of For example, the gate insulating layer is composed of a layer of In oxide and a layer of Al oxide.