A semiconductor device includes; a semiconductor substrate including a major surface; a first diffusion region in the major surface in a main cell region; a second diffusion region in the major surface in a terminal region; an insulating film on the major surface and having first and second contact holes on the first and second diffusion regions respectively; a first electrode in the first contact hole and connected to the first diffusion region; a second electrode in the second contact hole and connected to the second diffusion region; a semi-insulating film covering the second electrode; and a third electrode on the first electrode, wherein the first and second electrodes are made of the same material, the first electrode does not completely fill the first contact hole, the second electrode completely fills the second contact hole, and the third electrode completely fills the first contact hole.

A monolithic, vertical, planar semiconductor structure with a number diodes having different intrinsic regions is described. The diodes have intrinsic regions of different thicknesses as compared to each other. In one example, the semiconductor structure includes an N-type silicon substrate, an intrinsic layer formed on the N-type silicon substrate, and a dielectric layer formed on the intrinsic layer. A number of openings are formed in the dielectric layer. Multiple anodes are sequentially formed into the intrinsic layer through the openings formed in the dielectric layer. For example, a first P-type region is formed through a first one the openings to a first depth into the intrinsic layer, and a second P-type region is formed through a second one of the openings to a second depth into the intrinsic layer. Additional P-type regions can be formed to other depths.

A diode is made of a p-type layer and an n-type layer connected in series between a bottom and top electrode. The p-type and n-type layers have a thickness below 20 nm. A p-type dopant concentration and an n-type dopant concentration are high enough to keep a total resistance across the diode at less than 250Ω when the diode is forward biased while still retaining the characteristics of a diode. In some embodiments, the ratio of an ON current to an OFF current is greater than 2.5×10.sup.4. Alternate embodiments of the diode, arrays of diodes and methods of making diodes are disclosed. Example arrays include memory arrays using diodes and phase change memories (PCMs) connected in series as array elements. The arrays can be stacked in layers and can be made/embodied in the back-end-of-the line (BEOL).

A method of manufacturing a diode structure includes forming a first stack on a silicon layer on a substrate. A first sidewall spacer extending along and covering a sidewall of the first stack is formed. The silicon layer is selectively etched to a first predetermined depth, thereby forming a second stack. The remaining silicon layer includes a silicon base. A second sidewall spacer extending along and covering a sidewall of the second stack is formed. The silicon base is selectively etched to form a third stack on the substrate. With the second sidewall spacer as a mask, lateral plasma ion implantation is performed. Defects at the interface between two adjacent semiconductor layers can be reduced by the method.

Various embodiments of the present disclosure are directed towards a semiconductor structure including a buffer layer disposed between an active layer and a substrate. The active layer overlies the substrate. The substrate and the buffer layer include a plurality of pillar structures that extend vertically from a bottom surface of the active layer in a direction away from the active layer. A top electrode overlies an upper surface of the active layer. A bottom electrode underlies the substrate. The bottom electrode includes a conductive body and a plurality of conductive structures that respectively extend continuously from the conductive body, along sidewalls of the pillar structures, to a lower surface of the active layer.

A diode pack comprises a plurality of diodes seated in an assembly within a housing. The diode pack also includes a plurality of radial studs extending from an axial end of the housing relative to an axis of rotation extending through the housing. Each of the radial studs is electrically connected to a respective diode within the assembly. The diode pack further includes a center stud captured within the housing between the assembly and the housing and along the axis of rotation. A method of making a diode pack includes forming a housing of an electrically insulate material, removing a portion of the housing along an axis of rotation of the housing, mounting a center stud in the housing where the portion was removed, and assembling an assembly of diodes into the housing.

A method of manufacturing a diode structure includes forming a first stack on a silicon layer on a substrate. A first sidewall spacer extending along and covering a sidewall of the first stack is formed. The silicon layer is selectively etched to a first predetermined depth, thereby forming a second stack. The remaining silicon layer includes a silicon base. A second sidewall spacer extending along and covering a sidewall of the second stack is formed. The silicon base is selectively etched to form a third stack on the substrate. With the second sidewall spacer as a mask, lateral plasma ion implantation is performed. Defects at the interface between two adjacent semiconductor layers can be reduced by the method.

A p-type semiconductor region is formed in a front surface side of an n-type semiconductor substrate. An n-type field stop (FS) region including protons as a donor is formed in a rear surface side of the semiconductor substrate. A concentration distribution of the donors in the FS region include first, second, third and fourth peaks in order from a front surface to the rear surface. Each of the peaks has a peak maximum point, and peak end points formed at both sides of the peak maximum point. The peak maximum points of the first and second peaks are higher than the peak maximum point of the third peak. The peak maximum point of the third peak is lower than the peak maximum point of the fourth peak.

Exemplary methods of forming a semiconductor structure may include forming a layer of metal on a semiconductor substrate. The layer of metal may extend along a first surface of the semiconductor substrate. The semiconductor substrate may be or include silicon. The methods may include performing an anneal to produce a metal silicide. The methods may include implanting ions in the metal silicide to increase a barrier height over 0.65 V.

Vertical etch heterolithic integrated circuit devices are described. A method of manufacturing NIP diodes is described in one example. A P-type substrate is provided, and an intrinsic layer is formed on the P-type substrate. An oxide layer is formed on the intrinsic layer, and one or more openings are formed in the oxide layer. One or more N-type regions are implanted in the intrinsic layer through the openings in the oxide layer. The N-type regions form cathodes of the NIP diodes. A dielectric layer deposited over the oxide layer is selectively etched away with the oxide layer to expose certain ranges of the intrinsic layer to define a geometry of the NIP diodes. The intrinsic layer and the P-type substrate are vertically etched away within the ranges to expose sidewalls of the intrinsic layer and the P-type substrate. The P-type substrate forms the anodes of the NIP diodes.