A method of manufacturing a semiconductor device includes forming a conductive layer over a first substrate, forming at least one circuit element at least partially from a semiconductor material of a second substrate, bonding the first substrate to the second substrate, etching a through via extending through the second substrate to partially expose the conductive layer, depositing at least one conductive material in the through via to form a conductive through via electrically coupled to the conductive layer and over the second substrate to form a first contact structure electrically coupling the conductive through via to the at least one circuit element. The at least one circuit element includes at least one of a Schottky diode, a capacitor, or a resistor.

A dielectric and isolation lower fin material is described that is useful for fin-based electronics. In some examples, a dielectric layer is on first and second sidewalls of a lower fin. The dielectric layer has a first upper end portion laterally adjacent to the first sidewall of the lower fin and a second upper end portion laterally adjacent to the second sidewall of the lower fin. An isolation material is laterally adjacent to the dielectric layer directly on the first and second sidewalls of the lower fin and a gate electrode is over a top of and laterally adjacent to sidewalls of an upper fin. The gate electrode is over the first and second upper end portions of the dielectric layer and the isolation material.