The present disclosure provides a semiconductor device. The semiconductor device includes a semiconductor component, a re-routing layer, a bonding dielectric and an insulating layer. The re-routing layer is disposed over the semiconductor component and electrically coupled to the semiconductor component. The bonding dielectric is disposed over the semiconductor component to surround a top portion of the re-routing layer. The insulating layer is disposed between the semiconductor component and the bonding dielectric to surround a bottom portion of the re-routing layer.

The present disclosure provides a method for preparing a semiconductor device structure with fine patterns at different levels. The method includes forming a hard mask material over a substrate; etching the hardmask material to form hard mask pillars; forming spacers over sidewall surfaces of the hard mask pillars; etching the hard mask pillars and the target material by using the spacers as a mask to integrally forming a plurality of target structures, a high-level recesses in one of the plurality of target structures and a low-level recess between two target structures; and integrally forming a high-level conductive pattern in the high-level conductive pattern and a low-level conductive pattern in the low-level recess.

A semiconductor structure and a fabrication method are provided. The semiconductor structure includes: a substrate; a gate structure on the substrate and extending along a first direction; source/drain doped layers in the substrate at sides of the gate structure; a first conductive structure on the source/drain doped layers; an opening at a top of the gate structure and the first conductive structure; and a second conductive structure in the opening. The opening extends along a second direction and the second direction is different from the first direction. The second conductive structure is insulated from the first conductive structure and in contact with the gate structure.

The present disclosure provides a semiconductor device structure with fine patterns at different levels and a method for forming the semiconductor device structure, which can prevent the collapse of the fine patterns and reduces the parasitic capacitance between fine patterns The semiconductor device structure includes a substrate; a first target structure disposed over the substrate, wherein the first target structure comprises a first portion, a second portion, and a third portion, a height of the first portion and a height of the second portion are greater than a height of the third portion; a second target structure disposed over the target layer, wherein the second target structure comprises a fourth portion, a fifth portion, and a sixth portion: a low-level conductive pattern positioned between the first target structure and the second target structure; and a high-level conductive pattern positioned in the first target structure.

A semiconductor device is provided and includes first and second dielectrics, first and second conductive elements, a self-formed-barrier (SFB) and a liner. The first and second dielectrics are disposed with one of first-over-second dielectric layering and second-over-first dielectric layering. The first and second conductive elements are respectively suspended at least partially within a lower one of the first and second dielectrics and at least partially within the other one of the first and second dielectrics. The self-formed-barrier (SFB) is formed about a portion of one of the first and second conductive elements which is suspended in the second dielectric. The liner is deposited about a portion of the other one of the first and second conductive elements which is partially suspended in the first dielectric.

The present disclosure provides a semiconductor device. The semiconductor device includes a semiconductor component, a re-routing layer, a bonding dielectric and an insulating layer. The re-routing layer is disposed over the semiconductor component and electrically coupled to the semiconductor component. The bonding dielectric is disposed over the semiconductor component to surround a top portion of the re-routing layer. The insulating layer is disposed between the semiconductor component and the bonding dielectric to surround a bottom portion of the re-routing layer.

An interconnect dielectric material having an opening formed therein is first provided. A surface nitridation process is then performed to form a nitridized dielectric surface layer within the interconnect dielectric material. A metal layer is formed on the nitridized dielectric surface layer and then an anneal is performed to form a metal nitride layer between the metal layer and the nitridized dielectric surface layer. A portion of the originally deposited metal layer that is not reacted with the nitridized dielectric surface is then selectively removed and thereafter an electrical conducting structure is formed directly on the metal nitride layer that is present in the opening.

Apparatuses and methods to provide a fully self-aligned via are described. A first metallization layer comprises a set of first conductive lines extending along a first direction on a first insulating layer on a substrate, the set of first conductive lines recessed below a top portion of the first insulating layer. A capping layer is on the first insulating layer, and a second insulating layer is on the capping layer. A second metallization layer comprises a set of second conductive lines on the second insulating layer and on a third insulating layer above the first metallization layer. The set of second conductive lines extend along a second direction that crosses the first direction at an angle. At least one via is between the first metallization layer and the second metallization layer. The via is self-aligned along the second direction to one of the first conductive lines. The tapering angle of the via opening may be in a range of from about 60 to about 120.

A semiconductor device includes a lower wiring, an interlayer insulation film above the lower wiring and including a first portion having a first density, and a second portion on the first portion, the first portion and the second portion having a same material, and the second portion having a second density smaller than the first density, an upper wiring in the second portion of the interlayer insulating film, and a via in the first portion of the interlayer insulating film, the via connecting the upper wiring and the lower wiring.

A process for manufacturing interconnect BEOL structures from a patternable low-k dielectric on a microcircuit substrate having an optional anti-reflective coating comprises applying to the microcircuit substrate a via coating for forming a via comprising a low-k patternable dielectric coating, exposing the via coating to a via pattern, developing the exposed via coating, curing the exposed and developed via coating to form a via film, applying a trench coating for forming a trench comprising a patternable low-k dielectric coating, exposing the trench coating to a trench pattern, developing the exposed and developed trench coating, followed by curing the trench coating to form a trench film; Curing one of the uncured coatings to form a film prevents it from inter-mixing with the other applied uncured coating. Articles of manufacture comprise products made by this process as well as dual-damascene integrated spun-on patterned low-k dielectrics, and single-damascene integrated spun-on patterned low-k dielectrics.