A semiconductor device, a pad structure, and fabricating methods thereof are provided, relating to the field of semiconductor technology. The pad structure includes a substrate, a first dielectric layer, a groove, a bonding pad and a test pad. The first dielectric layer is disposed on the substrate, and the groove is disposed in the first dielectric layer. One of the bonding pad and the test pad is disposed outside the groove and on the surface of the first dielectric layer not adjacent to the substrate, and the other one is disposed on a bottom of the groove. The semiconductor device, the pad structure, and related fabricating methods improve the production yield and stability of the semiconductor device.

A semiconductor structure is disclosed, including a substrate, an insulating layer on the substrate, a barrier layer on the insulating layer, a bonding dielectric layer on the barrier layer, and a bonding pad extending through the insulating layer, the barrier layer and the bonding dielectric layer. A top surface of the bonding pad exposed from the bonding dielectric layer for bonding to another bonding pad on another substrate. A liner on a bottom surface of the bonding pad directly contacts the substrate.

A semiconductor structure is disclosed, including a substrate, an insulating layer on the substrate, a barrier layer on the insulating layer, a bonding dielectric layer on the barrier layer, and a bonding pad extending through the insulating layer, the barrier layer and the bonding dielectric layer. A top surface of the bonding pad exposed from the bonding dielectric layer for bonding to another bonding pad on another substrate. A liner on a bottom surface of the bonding pad directly contacts the substrate.

A semiconductor component is provided. The semiconductor component includes a substrate and a pad. The pad has an upper surface and a slot, wherein the slot is recessed with respect to the upper surface.

Provided is a die structure including a die, a bonding structure, and a protection structure. The die includes a substrate and a metal feature disposed over the substrate. The bonding structure is disposed over the die. The bonding structure includes a bonding dielectric layer and a bonding metal layer disposed in the bonding dielectric layer. The bonding metal layer is electrically connected to the metal feature of the die. The protection structure is disposed between a top portion of the bonding metal layer and a top portion of the bonding dielectric layer. A die stack structure and a method of fabricating the die structure are also provided.

A front-end method of fabricating nickel plated caps over copper bond pads used in a memory device. The method provides protection of the bond pads from an oxidizing atmosphere without exposing sensitive structures in the memory device to the copper during fabrication.

A nanowire bonding interconnect for fine-pitch microelectronics is provided. Vertical nanowires created on conductive pads provide a debris-tolerant bonding layer for making direct metal bonds between opposing pads or vias. Nanowires may be grown from a nanoporous medium with a height between 200-1000 nanometers and a height-to-diameter aspect ratio that enables the nanowires to partially collapse against the opposing conductive pads, creating contact pressure for nanowires to direct-bond to opposing pads. Nanowires may have diameters less than 200 nanometers and spacing less than 1 m from each other to enable contact or direct-bonding between pads and vias with diameters under 5 m at very fine pitch. The nanowire bonding interconnects may be used with or without tinning, solders, or adhesives. A nanowire forming technique creates a nanoporous layer on conductive pads, creates nanowires within pores of the nanoporous layer, and removes at least part of the nanoporous layer to reveal a layer of nanowires less than 1 m in height for direct bonding.

A front-end method of fabricating nickel plated caps over copper bond pads used in a memory device. The method provides protection of the bond pads from an oxidizing atmosphere without exposing sensitive structures in the memory device to the copper during fabrication.

A method of manufacture of an integrated circuit system includes: providing a semiconductor wafer with a bond pad; attaching a detachable carrier to the semiconductor wafer, the detachable carrier including a carrier frame portion and a terminal structure; removing the carrier frame portion with the terminal structure attached to the semiconductor wafer; and forming an encapsulation encapsulating the semiconductor wafer, the bond pad, and the terminal structure.

A semiconductor structure is provided. The semiconductor structure includes a semiconductor substrate and a first conductive bump. The semiconductor substrate has an integrated circuit and an interconnection metal layer, and a tilt surface is formed on an edge of the semiconductor substrate. The first conductive bump is electrically connected to the integrated circuit via the interconnection metal layer, and is disposed on the tilt surface, wherein a profile of the first conductive bump extends beyond a side surface of the edge of the semiconductor layer.