An embodiment semiconductor structure includes a metal layer. The semiconductor structure also includes a redistribution layer (RDL) structure including an RDL platform and a plurality of RDL pillars disposed between the RDL platform and the metal layer. Additionally, the semiconductor structure includes an under-bump metal (UBM) layer disposed on the RDL platform and a solder bump disposed on the UBM layer, where the UBM layer, the RDL platform, and the RDL pillars form an electrical connection between the solder bump and the metal layer.

A method for attaching a semiconductor die to a substrate includes providing a substrate that includes an attachment layer at a surface of the substrate. The attachment layer is covered by a protective flash plating layer. The protective flash plating layer has a reflow temperature less than or equal to a reflow temperature of the attachment layer. The method further includes preheating the substrate to a temperature greater than or equal to a reflow temperature of the attachment layer, attaching a semiconductor die to the attachment layer, and cooling the substrate and semiconductor die.

A method for forming conductive structures between two substrates is disclosed. The method comprises: forming a first patterned base layer and a second patterned base layer on a first substrate and a second substrate, wherein the first and second patterned base layers comprise through-holes; forming first and second metallic contact structures in the through holes of the first and second patterned base layer, wherein both the first and second metallic contact structures have front surfaces that are higher than respective front surfaces of the first and second patterned base layers; forming a first and a second patterned polymer layer on the respective front surfaces of the first and second patterned base layer, wherein the first and second metallic contact structures are exposed from and higher than respective front surfaces of the first and second patterned polymer layer; passivating the front surfaces of the first and second metallic contact structures; bonding the front surfaces of the first and second metallic contact structures with each other; and bonding the front surfaces of the first and second patterned polymer layers with each other after the front surfaces of the first and second metallic contact structures are bonded with each other.

In an embodiment of the present invention, a method of forming a semiconductor device includes providing a semiconductor substrate including a first chip region and a second chip region. A first contact pad is formed over the first chip region and a second contact pad is formed over the second chip region. The first and the second contact pads are at least as thick as the semiconductor substrate. The method further includes dicing through the semiconductor substrate between the first and the second contact pads. The dicing is performed from a side of the semiconductor substrate including the first contact pad and the second contact pad. A conductive liner is formed over the first and the second contact pads and sidewalls of the semiconductor substrate exposed by the dicing.

An embodiment semiconductor structure includes a metal layer. The semiconductor structure also includes a redistribution layer (RDL) structure including an RDL platform and a plurality of RDL pillars disposed between the RDL platform and the metal layer. Additionally, the semiconductor structure includes an under-bump metal (UBM) layer disposed on the RDL platform and a solder bump disposed on the UBM layer, where the UBM layer, the RDL platform, and the RDL pillars form an electrical connection between the solder bump and the metal layer.

A semiconductor package including a first semiconductor die, a second semiconductor die, a first insulating encapsulation, a dielectric layer structure, a conductor structure and a second insulating encapsulation is provided. The first semiconductor die includes a first semiconductor substrate and a through substrate via (TSV) extending from a first side to a second side of the semiconductor substrate. The second semiconductor die is disposed on the first side of the semiconductor substrate. The first insulating encapsulation on the second semiconductor die encapsulates the first semiconductor die. A terminal of the TSV is coplanar with a surface of the first insulating encapsulation. The dielectric layer structure covers the first semiconductor die and the first insulating encapsulation. The conductor structure extends through the dielectric layer structure and contacts with the through substrate via. The second insulating encapsulation contacts with the second semiconductor die, the first insulting encapsulation, and the dielectric layer structure.

A method for attaching an integrated circuit (IC) to an IC package substrate includes forming a solder bump on a bond pad of an IC die, forming a solder-wetting protrusion on a bond pad of an IC package substrate, and bonding the solder bump of the IC die to the solder-wetting protrusion of the IC package substrate.

A described example includes: a semiconductor die having bond pads on a device side surface; a passivation layer overlying the device side surface of the semiconductor die with openings in the passivation layer, the passivation layer having a planar surface facing away from the device side surface of the semiconductor die; post connects formed on the bond pads and in the openings in the passivation layer, the post connects having a proximate end on the bond pads and extending from the bond pads to a distal end that lies beneath the planar surface of the passivation layer; solder at the distal ends of the post connects and contacting sidewalls of the openings in the passivation layer; and solder joints formed between the solder at the distal ends of the post connects and a package substrate, the device side surface of the semiconductor die facing the package substrate.

A semiconductor package including a first semiconductor die, a second semiconductor die, a first insulating encapsulation, a dielectric layer structure, a conductor structure and a second insulating encapsulation is provided. The first semiconductor die includes a first semiconductor substrate and a through substrate via (TSV) extending from a first side to a second side of the semiconductor substrate. The second semiconductor die is disposed on the first side of the semiconductor substrate. The first insulating encapsulation on the second semiconductor die encapsulates the first semiconductor die. A terminal of the TSV is coplanar with a surface of the first insulating encapsulation. The dielectric layer structure covers the first semiconductor die and the first insulating encapsulation. The conductor structure extends through the dielectric layer structure and contacts with the through substrate via. The second insulating encapsulation contacts with the second semiconductor die, the first insulting encapsulation, and the dielectric layer structure.

A described example includes: a semiconductor die having bond pads on a device side surface; a passivation layer overlying the device side surface of the semiconductor die with openings in the passivation layer, the passivation layer having a planar surface facing away from the device side surface of the semiconductor die; post connects formed on the bond pads and in the openings in the passivation layer, the post connects having a proximate end on the bond pads and extending from the bond pads to a distal end that lies beneath the planar surface of the passivation layer; solder at the distal ends of the post connects and contacting sidewalls of the openings in the passivation layer; and solder joints formed between the solder at the distal ends of the post connects and a package substrate, the device side surface of the semiconductor die facing the package substrate.