A semiconductor device includes a substrate and a contact pad over the substrate. The semiconductor device further includes a conductive via electrically connected to the contact pad. The conductive via includes a conductive via layer having a first thickness, and a first conductive layer, wherein the first conductive layer is between the contact pad and the conductive via layer. The semiconductor device further includes a conductive pillar electrically connected to the conductive via. The conductive pillar includes a conductive pillar layer having a second thickness, and a second conductive layer having outer edges substantially aligned with outer edges of the conductive pillar layer, wherein the second conductive layer is between the conductive via layer and the conductive pillar layer. A ratio of the first thickness to the second thickness ranges from about 0.33 to about 0.55.

A manufacturing method of a flip-chip nitride semiconductor light emitting element includes a step of providing a nitride semiconductor light emitting element structure; a protective layer forming step; a first resist pattern forming step; a protective layer etching step; a first metal layer forming step; a first resist pattern removing step; a third metal layer forming step; a second resist pattern forming step; a second metal layer forming step; a second resist pattern removing step; and a third metal layer removing step.

A semiconductor including a plurality of structured contacts suitable for forming electrical connections to respective contacts of another semiconductor component, wherein each of said structured contacts comprises a planar contact surface and a plurality of upright tube-shaped structures extending outward from the planar contact surface is disclosed. The tube-shaped structures may be arranged in a regular array on the respective contact surfaces and are produced by a sequence of steps including the patterning of a dielectric layer formed on the front surface of the component, said patterning resulting in openings in said dielectric layer, and the deposition of a conformal layer on said patterned dielectric layer, thereby lining the bottom and sidewalls of the openings. The conformal layer may be removed from the upper surface of the dielectric layer and the material of said layer is removed selectively with respect to the conformal layer, resulting in said tube-shaped structures.

Electroplating methods enable the plating of photoresist defined features which have substantially uniform morphology. The electroplating methods include copper electroplating baths with reaction products of -amino acids and bisepoxides to electroplate the photoresist defined features. Such features include pillars, bond pads and line space features.

Electroplating methods enable the plating of photoresist defined features which have substantially uniform morphology. The electroplating methods include copper electroplating baths with reaction products of pyridyl alkylamines and bisepoxides to electroplate the photoresist defined features. Such features include pillars, bond pads and line space features.

Embodiments of mechanisms for forming a package structure are provided. The package structure includes a semiconductor die and a substrate. The package structure includes a pillar bump and an elongated solder bump bonded to the semiconductor die and the substrate. A height of the elongated solder bump is substantially equal to a height of the pillar bump. The elongated solder bump has a first width, at a first horizontal plane passing through an upper end of a sidewall surface of the elongated solder bump, and a second width, at a second horizontal plane passing through a midpoint of the sidewall surface. A ratio of the second width to the first width is in a range from about 0.5 to about 1.1.

Masking methods for atomic-layer-deposition processes for electrode-based devices are disclosed, wherein solder is used as a masking material. The methods include exposing electrical contact members of an electrical device having an active device region and a barrier layer formed by atomic layer deposition. This includes depositing solder elements on the electrical contact members, then forming the barrier layer using atomic layer deposition, wherein the barrier layer covers the active device region and also covers the solder elements that respectively cover the electrical contact members. The solder elements are then melted, which removes respective portions of the barrier layer covering the solder elements. Similar methods are employed for exposing contacts when forming layered capacitors.

A semiconductor device and a manufacturing method thereof. The semiconductor device includes a semiconductor substrate (300) provided with a plurality of pads (301), columnar electrodes on the pads (301) and a solder ball (321) provided on the columnar electrode. The columnar electrode comprises a main body (307) and a groove in the main body (307), and an opening of the groove is overlapped with the top surface of the columnar electrode. The solder ball (321) comprises a metal bump (320) arranged on the top of the columnar electrode and a filling part (319) filled in the groove. The solder ball and the columnar electrode form a structure similar to a bolt; thus the binding force between the solder ball and the columnar electrode is improved.

A device package includes a die, fan-out redistribution layers (RDLs) over the die, and an under bump metallurgy (UBM) over the fan-out RDLs. The UBM comprises a conductive pad portion and a trench encircling the conductive pad portion. The device package further includes a connector disposed on the conductive pad portion of the UBM. The fan-out RDLs electrically connect the connector and the UBM to the die.

A chip package on package structure includes a primary chip stack unit having pins insulated and spaced from each other on a first surface; a first bonding layer disposed on the first surface, where the first bonding layer includes bonding components insulated and spaced from each other, each bonding component includes a bonding part, and any two bonding parts are insulated and have a same cross-sectional area, and the bonding components are separately bonded to the pins; and secondary chip stack units, disposed on a surface of a side that is of the first bonding layer and that is away from the primary chip stack unit, where the secondary chip stack unit has micro bumps insulated and spaced from each other, and each of the micro bumps is bonded to one of the bonding components.