H01L2224/82031

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

A semiconductor device includes a first integrated circuit and a second integrated circuit. The first integrated circuit includes a semiconductor substrate and a dielectric layer disposed on a top surface of the semiconductor substrate. The second integrated circuit is disposed on the dielectric layer of the first integrated circuit and includes a dummy opening extending through the second integrated circuit and having a metal layer covering the inner walls of the dummy opening and in contact with the dielectric layer, wherein the metal layer is electrically grounded or electrically floating.

Interposer-Type Component Carrier and Method of Manufacturing the Same
20210320068 · 2021-10-14 ·

An interposer-type component carrier includes a stack comprising at least one electrically conductive layer structure and at least one electrically insulating layer structure; a cavity formed in an upper portion of the stack; an active component embedded in the cavity and having at least one terminal facing upwards; and a redistribution structure having only one electrically insulating layer structure above the component. A method of manufacturing an interposer-type component carrier is also disclosed.

Semiconductor device with through silicon via structure

A semiconductor device includes at least one wafer and at least one TSV (through silicon via) structure. The at least one wafer each includes a substrate, an isolation structure, and a conductive pad. The isolation structure is formed in the substrate and extends from a first side of the substrate toward a second side opposite to the first side of the substrate. The conductive pad is formed at a dielectric layer disposed on the first side of the substrate, wherein the conductive pad is electrically connected to an active area in the substrate. The at least one TSV structure penetrates the at least one wafer. The conductive pad contacts a sidewall of the at least one TSV structure, and electrically connects the at least one TSV structure and the active area in the substrate. The isolation structure separates from and surrounds the at least one TSV structure.

Semiconductor device with through silicon via structure

A semiconductor device includes at least one wafer and at least one TSV (through silicon via) structure. The at least one wafer each includes a substrate, an isolation structure, and a conductive pad. The isolation structure is formed in the substrate and extends from a first side of the substrate toward a second side opposite to the first side of the substrate. The conductive pad is formed at a dielectric layer disposed on the first side of the substrate, wherein the conductive pad is electrically connected to an active area in the substrate. The at least one TSV structure penetrates the at least one wafer. The conductive pad contacts a sidewall of the at least one TSV structure, and electrically connects the at least one TSV structure and the active area in the substrate. The isolation structure separates from and surrounds the at least one TSV structure.

Apparatuses and methods for arranging through-silicon vias and pads in a semiconductor device
11081467 · 2021-08-03 · ·

A semiconductor device may include a bond pad/probe pad pair that includes a bond pad and a probe pad positioned to be adjacent to each other to form an L shape. The device may also include a through-silicon via (TSV) pad positioned to be at least partially or entirely inside the recess area of the L shape. The bond pad and the probe pad may each have an opening, and at least a portion of the opening of the bond pad may extend into a portion of the opening of the probe pad. The arrangement of the bond pad, the probe pad and the TSV may be implemented in a wafer-on-wafer (WOW) that includes multiple stacked wafers. A method of fabricating the TSV may include etching the stacked wafers to form a TSV opening that extends through the multiple wafers, and filling the TSV opening with conductive material.

Interposer-type component carrier and method of manufacturing the same

An interposer-type component carrier includes a stack comprising at least one electrically conductive layer structure and at least one electrically insulating layer structure; a cavity formed in an upper portion of the stack; an active component embedded in the cavity and having at least one terminal facing upwards; and a redistribution structure having only one electrically insulating layer structure above the component. A method of manufacturing an interposer-type component carrier is also disclosed.

Semiconductor package including cap layer and dam structure and method of manufacturing the same

A semiconductor package and a method of manufacturing the same are provided. The semiconductor package includes a semiconductor die, a cap layer, a conductive terminal, and a dam structure. The semiconductor die has a first surface. The cap layer is over the semiconductor die and has a second surface facing the first surface of the semiconductor die. The conductive terminal penetrates the cap layer and electrically connects to the semiconductor die. The dam structure is between the semiconductor die and the cap layer and surrounds a portion of the conductive terminal between the first surface and the second surface, thereby forming a gap between the cap layer and the semiconductor die.

INTEGRATED CIRCUIT CHIP, METHOD OF MANUFACTURING THE INTEGRATED CIRCUIT CHIP, AND INTEGRATED CIRCUIT PACKAGE AND DISPLAY APPARATUS INCLUDING THE INTEGRATED CIRCUIT CHIP

An integrated circuit (IC) chip includes a via contact plug extending inside a through hole passing through a substrate and a device layer, a via contact liner surrounding the via contact plug, a connection pad liner extending along a bottom surface of the substrate, a dummy bump structure integrally connected to the via contact plug, and a bump structure connected to the connection pad liner. A method of manufacturing an IC chip includes forming an under bump metallurgy (UBM) layer inside and outside the through hole and forming a first connection metal layer, a second connection metal layer, and a third connection metal layer. The first connection metal layer covers the UBM layer inside the through hole, the second connection metal layer is integrally connected to the first connection metal layer, and the third connection metal layer covers the UBM layer on the connection pad liner.

LIGHT-EMITTING APPARATUS INCLUDING SACRIFICIAL PATTERN

A light-emitting apparatus includes a substrate, pads disposed on the substrate, a sacrificial pattern layer and a light-emitting diode element disposed on the sacrificial pattern layer. The light-emitting diode element includes a first type semiconductor layer, a second type semiconductor layer, an active layer, and electrodes. A connection patterns disposed on at least one of the electrodes and the pads. Materials of the connection patterns include hot fluidity conductive materials. The connection patterns cover an outermost sidewall of the sacrificial pattern layer and are electrically connected to the at least one of the electrodes and the pads. The sacrificial pattern layer is located between the connection patterns, and the sacrificial pattern layer is overlapped with the pads in a normal direction of the substrate.

Method of forming contacts to an embedded semiconductor die and related semiconductor packages
11043409 · 2021-06-22 · ·

A method of forming contacts to an embedded semiconductor die includes embedding a semiconductor die in an encapsulation material, the semiconductor die having a first terminal at a first side of the semiconductor die, forming a first metal mask on a first surface of the encapsulation material, the first metal mask being positioned over the first side of the semiconductor die and exposing a first part of the encapsulation material aligned with the first terminal of the semiconductor die, directing a pressurized stream of liquid toward the first surface of the encapsulation material with the first metal mask, to remove the first exposed part of the encapsulation material and form a first contact opening to the first terminal of the semiconductor die, and forming an electrically conductive material in the first contact opening. Related semiconductor packages are also described.