The present disclosure provides an excimer laser system. A master oscillator chamber may generate laser pulses with a narrowed line width and a small energy by means of a line width narrowing module, as a seed light. The seed light is refracted by a master oscillator wavefront engineering box and then incident into a power amplifier chamber through a beam splitting system. The beam splitting system, a first high reflectance mirror, a second high reflectance mirror and a third high reflectance mirror may constitute a quadrilateral annular optical path, The power amplifier chamber may have a first pair of Brewster windows and a second pair of Brewster windows, wherein the first pair of Brewster windows is located in a first optical path of the annular optical path along with a discharging electrode of the power amplifier chamber, and the second pair of Brewster windows is located in a second optical path of annular optical path which is parallel to a first amplification optical path. The present disclosure reduces the length of a ring cavity of an excimer laser system with a ring cavity structure, increasing the amplification times and achieving a deeper gain saturation amplification than a traditional structure, thereby improving the output characteristic of the excimer laser system.

A laser apparatus is provided, comprising a semiconductor substrate, an active layer disposed on the semiconductor substrate, a folded waveguide disposed on the active layer and forming a resonant structure, the folded waveguide comprising at least two substantially straight waveguide portions coupled by a connecting waveguide structure, with the folded waveguide having a first end and a second end located at one or more edges of the semiconductor substrate, wherein at least one of the ends includes a mirror, and an electrode coupled to the folded waveguide and configured to create photons in the folded waveguide when receiving electrical power. The waveguide emits laser light comprising the photons, with the laser light emitted at an edge of the semiconductor substrate.

A laser oscillator configured to limit a mode hopping over a long duration. A laser oscillator has an optical resonator including an output coupler and a rear mirror positioned on an optical axis, at least one folding mirror positioned on the optical axis and between the output coupler and the rear mirror, and a discharge tube positioned between the output coupler or the rear mirror and the folding mirror. At least one folding mirror has a toric surface shape, a saddle surface shape or a cylindrical shape, and is configured to rotate about a straight line as a rotation axis, which extends through one point on a surface of the folding mirror and is perpendicular to the surface of the folding mirror.

A resonator for a laser includes a first resonator wall and a second resonator wall with a lasing medium disposed in a gap therebetween. The resonator further includes a first mirror disposed at a first end of the first and second resonator walls and a second mirror disposed at a second end of the first and second resonator walls. The mirrors cooperate to form an intra-cavity laser beam that travels along a plurality of paths through the lasing medium. Furthermore, the first mirror and the second mirror form a laser resonator for a parasitic laser mode. A parasitic mode suppressor is located within the superfluous region.

There is provided a slab amplifier including an optical system (48, 51) provided in a chamber (47) to allow a seed beam having entered from a first window into the space between a pair of electrodes (42, 43) to be repeatedly reflected between the space so that the seed beam is amplified to be an amplified beam; a first aperture plate (61) provided between the first window and the electrodes, and having an opening of a dimension equal to or greater than a cross-section of the seed beam and equal to or smaller than a dimension of the first window; and a second aperture plate (62) provided between the second window and the electrodes, and having an opening of a dimension equal to or greater than a cross-section of the amplified beam and equal to or smaller than a dimension of the second window.

Laser device comprising at least two gas laser units (10), stacked in layers, each laser unit comprising a plurality of resonator tubes (12), the resonator tubes being in fluidic communication with each other and forming a common tubular space, connecting elements (20, 21) for connecting adjacent resonator tubes so as to form a loop, mirrors (22) arranged in the connecting elements for reflecting the laser light between the resonator tubes, a rear mirror (44) and a partially reflecting output coupler (42) for coupling out a laser beam. In each laser unit an integrated output flange (40) comprises the rear mirror, the partially reflecting output coupler and an output mirror (46) which deflects the laser beam passing through the output coupler to a scanning device (80) located in the central space (8) surrounded by the resonator tubes. The invention also relates to a method for marking an object.

The invention relates to a marking apparatus (100) for marking an object with laser light, comprising a plurality of lasers (10), in particular gas lasers (10), and a control unit for individually activating each of the lasers (10) to emit a laser beam according to a sign to be marked. A deflection device (30) is provided by which at least two laser beams are combined on a common spot.

The invention relates to a marking apparatus for marking an object with laser light, comprising a plurality of lasers and a control unit for individually activating each of the lasers to emit a laser beam (90a-i) according to a sign to be marked. A set of deflection means (30) for directing the laser beams (90a-i) toward the object to be marked is provided, a set of telescopic means (40) comprising at least one telescopic means (40a-i) per laser beam (90a-i) is provided, and each telescopic means (40a-i) is adjustable for individually setting a focal length of the respective laser beam (90a-i).

The invention relates to a marking apparatus for marking an object with laser light, comprising a plurality of lasers and a control unit for individually activating each of the lasers to emit a laser beam (90) according to a sign to be marked. A set of deflection means (30) for rearranging the laser beams (90) into a desired array of laser beams (90) is provided, the set of deflection means (30) comprises at least two deflection means (33a-i, 34a-i) per laser beam (90), in particular at least two mapping mirrors (33a-i, 34a-i) or at least one optical waveguide and one lens per laser beam (90a-i), and each deflection means (33a-i, 34a-i) is individually adjustable in its deflection direction and/or individually shiftable.

The invention relates to a marking apparatus (100) for marking an object with laser light, comprising a plurality of gas lasers (10) and a control unit for individually activating each of the gas lasers (10) to emit a laser beam according to a sign to be marked. The gas lasers (10) are stacked such that the laser beams emitted by the gas lasers (10) form an array of laser beams, in particular a linear array with parallel laser beams, each gas laser (10a-i) comprises laser tubes (12) that at least partially surround an inner area (5). The apparatus (100) further comprises beam-delivery means (14) for directing the array of laser beams into the inner area (5) and a set of deflection means (30) for rearranging the array of laser beams into a desired array of laser beams. The set of deflection means (30) is arranged in the inner area (5) and comprises at least one deflection means (33a, 33i) per laser beam, in particular at least one mapping mirror (33a, 33i) or one optical waveguide per laser beam. Each deflection means (30) is individually adjustable in its deflection direction and/or individually shiftable.