Patent classifications
H01S3/0805
Pulse laser apparatus and method for Kerr lens mode locking based creation of laser pulses
A pulse laser apparatus (100) for creating laser pulses (1), in particular soliton laser pulses (1), based on Kerr lens mode locking of a circulating light field in an oscillator cavity (10), comprises at least two resonator mirrors (11, 12, . . . ) spanning a resonator beam path (2) of the oscillator cavity (10), at least one Kerr-medium (21, 22, 23) for introducing self-phase modulation and self-focusing to the circulating light field in the oscillator cavity (10), at least one gain-medium (31) for amplifying the circulating light field in the oscillator cavity (10), and a tuning device (40) for setting a first mode-locking condition and a second mode-locking condition of the oscillator cavity (10) such that an intra-cavity threshold-power for mode-locking at the first mode-locking condition is lower than that at the second mode-locking condition, wherein the first mode-locking condition is adapted for starting or shutting-down of the Kerr lens mode locking and the second mode-locking condition is adapted for continuous Kerr lens mode locking and a resonator-internal peak-power of the circulating light field is higher at the second mode-locking condition than at the first mode-locking condition. Furthermore, a method of operating a pulse laser apparatus is described.
Method for manufacturing optical element and optical element
A method for manufacturing an optical element includes a bonding step of bonding a first and a second element portion to each other without interposing an adhesive therebetween. The bonding step includes: a first step of fixing the first and the second element portion with an intermediate layer disposed between these portion, the intermediate layer containing an element substitutable for a constituent element of a bonded portion in the first and the second element portion, the intermediate layer being colored; and a second step of integrating a part of the intermediate layer with the first and the second element portion, and making a part of the intermediate layer transparent to laser light by irradiating the intermediate layer with giant pulse laser light and causing it to be absorbed into the intermediate layer after the first step.
Laser resonator, and method of designing laser resonator
A laser resonator includes a pair of optical elements forming a first optical path having a focused beam waist, one or more mirrors forming a second optical path of approximately parallel light connected to the first optical path, and a laser medium arranged in the second optical path. Induced emission light generated from the laser medium reciprocates or circles in a path formed by the first optical path and the second optical path. A distance between the pair of optical elements is adjustable, and a beam diameter at the second optical path is adjusted by adjusting the distance between the pair of optical elements.
LASER DEVICE, LIGHT SOURCE, AND MEASUREMENT APPARATUS
Provided is a laser device in which: a laser medium doped with ytterbium emits light upon absorption of excitation light; the light emitted by the laser medium is amplified to obtain output light; and the output light is outputted in the form of a plurality of pulses. In the laser device, a spatial filter is disposed in the optical path of the light emitted by the laser medium or is disposed in the optical path of the output light outputted from an optical resonator, the spatial filter being configured to filter out a portion of the light or of the output light around the optical axis.
LASER ASSEMBLY WITH SPECTRAL BEAM COMBINING
A laser assembly (1210) for generating an assembly output beam (1212) includes a laser subassembly (1216) that emits a plurality of spaced apart first laser beams (1220A), a plurality of spaced apart second laser beams (1220B), a transform lens assembly (1244), a wavelength selective beam combiner (1246), and a path length adjuster (1299). The transform lens assembly (1244) collimates and directs the laser beams (1220A) (1220B) to spatially overlap at a focal plane of the transform lens assembly (1244). The path length adjuster (1299) is positioned in a path of the first laser beams (1220A), the path length adjuster (1299) being adjustable to adjust of a path length the first laser beams (1220A) relative to the second laser beams (1220B).
METHOD AND APPARATUS FOR IMMERSION GRATING LITHOGRAPHY
The present application is directed to an improved immersion grating assembly that provides additional wavelength dispersion and higher optical efficiency at ultraviolet wavelengths relative to prior art devices. More specifically, the immersion grating disclosed herein may be used to narrow the spectrum of light emitted by excimer laser systems. Narrower spectral linewidth of excimer laser systems may enable the creation of smaller feature sizes in semiconductor structures manufactured using UV photolithography processes.
LASER DEVICE, METHOD FOR CONTROLLING LASER DEVICE, AND MASS SPECTROSCOPE
A laser device for laser resonance ionization includes a wavelength variable grating-type titanium-doped sapphire laser and includes a titanium (Ti) doped titanium sapphire crystal disposed within a resonator. The titanium sapphire crystal is fixedly disposed on a stage. The titanium-doped sapphire crystal can be moved in the optical axis direction by the stage, thereby changing the position of the titanium-doped sapphire crystal. The switching between the wideband mode and the high-output mode can be performed by changing the position of the titanium-doped sapphire crystal.
Solid-state laser device
A solid-state laser device includes a resonator composed of a pair of mirrors, a laser rod disposed in the resonator, and a laser chamber. The resonator and the laser rod are disposed in a housing. The laser rod is inserted through a hole of the laser chamber and is supported in a state in which two end portions are exposed. An O-ring is disposed at an exposed root of at least one rod end portion exposed from the laser chamber. The solid-state laser device includes a cover member that is disposed on a rod side surface of the rod end portion between the O-ring and a rod end surface and that blocks incidence of stray light, which is generated in the housing, on the O-ring.
PULSE LASER APPARATUS AND METHOD FOR KERR LENS MODE LOCKING BASED CREATION OF LASER PULSES
A pulse laser apparatus (100) for creating laser pulses (1), in particular soliton laser pulses (1), based on Kerr lens mode locking of a circulating light field in an oscillator cavity (10), comprises at least two resonator mirrors (11, 12, . . . ) spanning a resonator beam path (2) of the oscillator cavity (10), at least one Kerr-medium (21, 22, 23) for introducing self-phase modulation and self-focusing to the circulating light field in the oscillator cavity (10), at least one gain-medium (31) for amplifying the circulating light field in the oscillator cavity (10), and a tuning device (40) for setting a first mode-locking condition and a second mode-locking condition of the oscillator cavity (10) such that an intra-cavity threshold-power for mode-locking at the first mode-locking condition is lower than that at the second mode-locking condition, wherein the first mode-locking condition is adapted for starting or shutting-down of the Kerr lens mode locking and the second mode-locking condition is adapted for continuous Kerr lens mode locking and a resonator-internal peak-power of the circulating light field is higher at the second mode-locking condition than at the first mode-locking condition. Furthermore, a method of operating a pulse laser apparatus is described.
TWO-DIMENSIONAL MULTI-BEAM STABILIZER AND COMBINING SYSTEMS AND METHODS
A system and method for stabilizing and combining multiple emitted beams into a single system using both WBC and WDM techniques.