H01S3/1115

EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
20170027047 · 2017-01-26 · ·

An extreme ultraviolet light (EUV) generation system is configured to improve conversion efficiency of energy of a laser system to EUV energy by improving the efficiency of plasma generation. The EUV generation system includes a target generation unit configured to output a target toward a plasma generation region in a chamber. The laser system is configured to generate a first pre-pulse laser beam, a second pre-pulse laser beam, and a main pulse laser beam so that the target is irradiated with the first pre-pulse laser beam, the second pre-pulse laser beam, and the main pulse laser beam in this order. In addition, the EUV generation system includes a controller configured to control the laser system so that a fluence of the second pre-pulse laser beam is equal to or higher than 1 J/cm.sup.2 and equal to or lower than a fluence of the main pulse laser beam.

Novel technique for the detection of trace gases using Intracavity Fiber Laser Absorption Spectroscopy (IFLAS)
20170025812 · 2017-01-26 ·

A gas detection system uses intracavity fiber laser absorption spectroscopy. The fiber laser is stabilized by a saturable absorber, and the sensitivity is enhanced by multiple circulations of amplified spontaneous emission light under threshold conditions, and multi-longitudinal mode oscillation of the laser.

LASER APPARATUS FOR THE EMISSION OF ULTRA-SHORT LIGHT PULSES AT HIGH ENERGY AND HIGH REPETITION FREQUENCY AND RESPECTIVE OPTOELECTRONIC DEVICE
20250125576 · 2025-04-17 ·

The present invention relates to an emission LASER apparatus of ultrashort light pulses with high energy and high repetition frequency as well as an optoelectronic device that uses this LASER apparatus. In particular, the aforementioned optoelectronic device is particularly suitable for use for precision machining. Furthermore, the present invention also relates to a method of emitting packets of ultrashort light pulses with high energy and high repetition frequency by means of the aforementioned optoelectronic device.

LASER APPARATUS FOR THE EMISSION OF ULTRA-SHORT LIGHT PULSES AT HIGH ENERGY AND HIGH REPETITION FREQUENCY AND RESPECTIVE OPTOELECTRONIC DEVICE
20250125576 · 2025-04-17 ·

The present invention relates to an emission LASER apparatus of ultrashort light pulses with high energy and high repetition frequency as well as an optoelectronic device that uses this LASER apparatus. In particular, the aforementioned optoelectronic device is particularly suitable for use for precision machining. Furthermore, the present invention also relates to a method of emitting packets of ultrashort light pulses with high energy and high repetition frequency by means of the aforementioned optoelectronic device.

Compact ultra-short pulse source amplifiers
09553421 · 2017-01-24 · ·

The present invention relates to compact, low noise, ultra-short pulse sources based on fiber amplifiers, and various applications thereof. At least one implementation includes an optical amplification system having a fiber laser seed source producing seed pulses at a repetition rate corresponding to the fiber laser cavity round trip time. A nonlinear pulse transformer, comprising a fiber length greater than about 10 m, receives a seed pulse at its input and produces a spectrally broadened output pulse at its output, the output pulse having a spectral bandwidth which is more than 1.5 times a spectral bandwidth of a seed pulse. A fiber power amplifier receives and amplifies spectrally broadened output pulses. A pulse compressor is configured to temporally compress spectrally broadened pulses amplified by said power amplifier. Applications include micro-machining, ophthalmology, molecular desorption or ionization, mass-spectroscopy, and/or laser-based, biological tissue processing.

Apparatuses comprising films with free-standing region
12291447 · 2025-05-06 · ·

An apparatus, comprising a film (103) comprising a network of conductive and/or semi-conductive high aspect ratio molecular structures is presented. The apparatus also comprises a frame (102) arranged to support the film (103) at least at least two support positions so that a free-standing region (101) of the film (103) extends between the at least two support positions. The two or more electrical contact areas electrically coupled to the film (103), and these electrical contact areas are arranged to pass electric charge across the free-standing region (101) of the film (103) at a current between 0.01 and 10 amperes.

GASEOUS LASER SYSTEMS WITH EDGE-DEFINING ELEMENT AND RELATED TECHNIQUES
20250174957 · 2025-05-29 ·

Gaseous laser systems and related techniques are disclosed. Techniques disclosed herein may be utilized, in accordance with some embodiments, in providing a gaseous laser system with a configuration that provides (A) pump illumination with distinct edge surfaces for an extended depth and (B) an output beam illumination from a resonator cavity with distinct edges in its reflectivity profile, thereby providing (C) pump beam and resonator beam illumination on a volume so that the distinct edge surfaces of its pump and resonator beam illumination are shared-edge surfaces with (D) further edge surfaces of the amplifier volume at the surfaces illuminated directly by the pump or resonator beams, as defined by optical windows and (optionally) by one or more flowing gas curtains depleted of the alkali vapor flowing along those optical windows. Techniques disclosed herein may be implemented, for example, in a diode-pumped alkali laser (DPAL) system, in accordance with some embodiments.

Fiber structure, pulse laser device, supercontinuum light source, and production method for fiber structure

A fiber structure includes first and second optical fibers disposed such that tip portions thereof butt and a sheet-shaped saturable absorber sandwiched between the tip portion of the first optical fiber and the tip portion of the second optical fiber. Each of the tip portions of the first optical fiber and the second optical fiber has a core, a cladding provided around the core, and a ferrule provided around the cladding. The tip portion of the first optical fiber has a protruding shape protruding to a tip side. The saturable absorber has an adhering part at least adhering to the core of the first optical fiber and a non-adhering part present around the adhering part and not adhering to the tip portion of the first optical fiber.

Fiber structure, pulse laser device, supercontinuum light source, and production method for fiber structure

A fiber structure includes first and second optical fibers disposed such that tip portions thereof butt and a sheet-shaped saturable absorber sandwiched between the tip portion of the first optical fiber and the tip portion of the second optical fiber. Each of the tip portions of the first optical fiber and the second optical fiber has a core, a cladding provided around the core, and a ferrule provided around the cladding. The tip portion of the first optical fiber has a protruding shape protruding to a tip side. The saturable absorber has an adhering part at least adhering to the core of the first optical fiber and a non-adhering part present around the adhering part and not adhering to the tip portion of the first optical fiber.

Fiber laser with two counter-propagating, orthogonally polarized pulses for high precision metrology

Apparatus, systems, and methods for a bidirectional mode-locked all-polarization maintaining fiber laser with two counter-propagating, orthogonally polarized pulses are applicable in a variety of applications. A mode-locked fiber laser can be realized with a laser cavity including a first polarization maintaining gain fiber, a second polarization maintaining gain fiber, and a saturable absorber. The saturable absorber can be arranged with the first polarization maintaining gain fiber and the second polarization maintaining gain fiber to generate two counter-propagating pulses, being orthogonally polarized with respect to each other. The laser cavity can include a circulator arranged to provide separate paths for the two counter-propagating pulses in a portion of the fiber laser cavity.