A method and apparatus for characterizing an optical element. The optical element is part of a laser and is mounted on a translation stage to scan the optical element transverse to an intracavity laser beam. A performance characteristic of the laser is recorded as a function of position of the optical element.

A laser system, comprising: a laser cavity, a gain medium positioned within the laser cavity, a pump source optically coupled to the gain medium, an input minor positioned at a first end of the laser cavity, an output coupler positioned at a second end of the laser cavity, a first etalon positioned within the laser cavity, and a q-switching element positioned within the laser cavity, wherein the laser system is configured to provide a laser beam at a selected wavelength ranging of 1700 to 3000 nm with a tunable spectral range of at least 10 nm. A method for using the laser system e.g., for producing a pulsed laser beam is further disclosed.

Examples of compact control electronics for precision frequency combs are disclosed. Application of digital control architecture in conjunction with compact and configurable analog electronics provides precision control of phase locked loops with reduced or minimal latency, low residual phase noise, and/or high stability and accuracy, in a small form factor.

A surface plasmon infrared nano-pulse laser having a multi-resonance competition mechanism, consisting of the four parts of a surface plasmon nano-pin resonance chamber (1), a spacer layer (2), a gain medium (3), and a two-dimensional material layer (4). The surface plasmon nano-pin resonance chamber (1) consists of a metal nano rod (11) and one or more nano sheets (12) grown thereon, the surface plasmon nano-pin resonance chamber (1) and the gain medium (3) being isolated by the isolating layer (2), and the two-dimensional material layer (4) covering a surface of the surface plasmon nano-pulse laser; positive and negative electrodes (5) are located at two ends of the surface plasmon nano-pulse laser, and a layer of a two-dimensional material having a feature of saturatable absorption is introduced to a surface of the nano-pin resonance chamber.

A laser system, comprised of: a laser cavity; a gain medium a pump, a saturable absorber (SA); a first mirror and a second mirror; wherein a ratio of an area of the beam area within the SA to an area of the laser beam within the gain medium is greater than 1, and wherein the beam generates a gain medium radius spot on the gain medium and a saturable absorber radius spot on the saturable absorber such that a ratio between a saturable absorber radius spot on the saturable absorber and the gain medium radius spot on the gain medium is within a range of 1.7-7 is disclosed. A method for using the laser system e.g., for producing a pulsed energy is further disclosed.

Apparatus and methods for producing ultrashort optical pulses are described. A high-power, solid-state, passively mode-locked laser can be manufactured in a compact module that can be incorporated into a portable instrument. The mode-locked laser can produce sub-50-ps optical pulses at a repetition rates between 200 MHz and 50 MHz, rates suitable for massively parallel data-acquisition. The optical pulses can be used to generate a reference clock signal for synchronizing data-acquisition and signal-processing electronics of the portable instrument.

Apparatus and methods for producing ultrashort optical pulses are described. A high-power, solid-state, passively mode-locked laser can be manufactured in a compact module that can be incorporated into a portable instrument. The mode-locked laser can produce sub-50-ps optical pulses at a repetition rates between 200 MHz and 50 MHz, rates suitable for massively parallel data-acquisition. The optical pulses can be used to generate a reference clock signal for synchronizing data-acquisition and signal-processing electronics of the portable instrument.

An extreme ultraviolet light (EUV) generation system is configured to improve conversion efficiency of energy of a laser system to EUV energy by improving the efficiency of plasma generation. The EUV generation system includes a target generation unit configured to output a target toward a plasma generation region in a chamber. The laser system is configured to generate a first pre-pulse laser beam, a second pre-pulse laser beam, and a main pulse laser beam so that the target is irradiated with the first pre-pulse laser beam, the second pre-pulse laser beam, and the main pulse laser beam in this order. In addition, the EUV generation system includes a controller configured to control the laser system so that a fluence of the second pre-pulse laser beam is equal to or higher than 1 J/cm.sup.2 and equal to or lower than a fluence of the main pulse laser beam.

The technology disclosed in this patent document allows mode locking of both selected longitudinal and transverse modes to produce laser pulses. The laser light produced based on such mode locking exhibits a 3-dimensional mode profile based on the locked longitudinal and transverse modes.

An electrodeless laser-driven light source includes a laser that generates a CW sustaining light. A pump laser generates pump light. A Q-switched laser crystal receives the pump light generated by the pump laser and generates pulsed laser light at an output in response to the generated pump light. A first optical element projects the pulsed laser light along a first axis to a breakdown region in a gas-filled bulb comprising an ionizing gas. A second optical element projects the CW sustaining light along a second axis to a CW plasma region in the gas-filled bulb comprising the ionizing gas. A detector detects plasma light generated by a CW plasma and generates a detection signal at an output. A controller generates control signals that control the pump light to the Q-switched laser crystal so as to extinguish the pulsed laser light within a time delay after the detection signal exceeds a threshold level.