An electrodeless laser-driven light source includes a laser that generates a CW sustaining light. A pump laser generates pump light. A Q-switched laser crystal receives the pump light generated by the pump laser and generates pulsed laser light at an output in response to the generated pump light. A first optical element projects the pulsed laser light along a first axis to a breakdown region in a gas-filled bulb comprising an ionizing gas. A second optical element projects the CW sustaining light along a second axis to a CW plasma region in the gas-filled bulb comprising the ionizing gas. A detector detects plasma light generated by a CW plasma and generates a detection signal at an output. A controller generates control signals that control the pump light to the Q-switched laser crystal so as to extinguish the pulsed laser light within a time delay after the detection signal exceeds a threshold level.

An electrodeless laser-driven light source includes a laser that generates a CW sustaining light. A pump laser generates pump light. A Q-switched laser crystal receives the pump light generated by the pump laser and generates pulsed laser light at an output in response to the generated pump light. A first optical element projects the pulsed laser light along a first axis to a breakdown region in a gas-filled bulb comprising an ionizing gas. A second optical element projects the CW sustaining light along a second axis to a CW plasma region in the gas-filled bulb comprising the ionizing gas. A detector detects plasma light generated by a CW plasma and generates a detection signal at an output. A controller generates control signals that control the pump light to the Q-switched laser crystal so as to extinguish the pulsed laser light within a time delay after the detection signal exceeds a threshold level.

An optical element includes an optical material including a first edge and an opposing second edge. The optical element further includes a plurality of micro-channels arranged within the optical material. Each of the micro-channels of the plurality of micro-channels extends from the first edge to the second edge of the optical material.

A method and a laser for breaking through the limitation of fluorescence spectrum on laser wavelength is disclosed. The method includes: exciting electrons to a high energy level by pump light, and suppressing an oscillation of radiation light by laser cavity coating, using a laser resonance to enhance a transition probability of an electron-phonon coupling from the high energy level to a multi-phonon coupling level, so as to realize the emission and enhancement of breakthrough fluorescence spectrum and realize the radiation light oscillation, wherein the laser cavity includes an incident mirror, a folding mirror, a tuning element and an exit mirror arranged in sequence along an optical path direction, the laser gain medium is located between an incident mirror and a folding mirror in the laser resonator, and the tuning element is arranged in the laser cavity at a Brewster angle.

[Object] To provide a compact and high-performance laser device and a laser apparatus.

[Solving Means] A laser device according to the present disclosure includes an excitation light source having a first reflective layer with respect to a first wavelength; a laser medium having a second reflective layer with respect to a second wavelength on a first surface facing to the excitation light source and a third reflective layer with respect to the first wavelength on a second surface opposite to the first surface; and a saturable absorber having a fourth reflective layer with respect to the second wavelength on a third surface opposite to the laser medium.

Provided is a laser device in which: a laser medium doped with ytterbium emits light upon absorption of excitation light; the light emitted by the laser medium is amplified to obtain output light; and the output light is outputted in the form of a plurality of pulses. In the laser device, a spatial filter is disposed in the optical path of the light emitted by the laser medium or is disposed in the optical path of the output light outputted from an optical resonator, the spatial filter being configured to filter out a portion of the light or of the output light around the optical axis.

A laser system produces pulses having wavelengths between 2000 nm and 2100 nm, peak output powers greater than 1 kW, average powers greater than 10 W, pulse widths variable from 0.5 to 10 nsec, pulse repetition frequencies variable from 0.1 to over 2 MHz, and a pulse extinction of at least 60 dB. Pulses from a diode laser having a wavelength between 1000 nm and 1100 nm are amplified by at least one fiberoptic amplifier and applied as the pump input to an Optical Parametric Amplifier (OPA). A cw laser provides an OPA seed input at a wavelength between 2000 nm and 2200 nm. The idler output of the OPA having difference frequency wavelength between 2000 nm and 2100 nm is further amplified by a crystal amplifier. The fiberoptic amplifier can include Ytterbium-doped fiberoptic. The crystal amplifier can include a Ho:YAG, Ho:YLF, Ho:LuAG, and/or a Ho:Lu2O3 crystal.

A laser delivery device may include a connector portion at a proximal end of the laser delivery device and an optical fiber connecting the connector portion to a distal end of the laser delivery device. The connector portion may include a capillary at least partially surrounding a proximal portion of the optical fiber, and the capillary may include dimples on at least a portion of a circumferential surface thereof.

A system for generating extreme ultraviolet light, in which a target material inside a chamber is irradiated with a laser beam to be turned into plasma, includes a first laser apparatus configured to output a first laser beam, a second laser apparatus configured to output a pedestal and a second laser beam, and a controller connected to the first and second laser apparatuses and configured to cause the first laser beam to be outputted first, the pedestal to be outputted after the first laser beam, and the second laser beam having higher energy than the pedestal to be outputted after the pedestal.

A heat sink assembly may include an alignment body with an opening configured to receive a crystal rod, wherein the opening is configured to maintain a crystalline orientation of the crystal rod relative to a physical orientation of the alignment body. The heat sink assembly may include a first cooling stack, wherein the first cooling stack includes a first cutout to receive the crystal rod and the alignment body. The heat sink assembly may include a second cooling stack, wherein the second cooling stack includes a second cutout to receive the crystal rod and the alignment body, and wherein the first cooling stack and the second cooling stack are configured to mate and at least partially sandwich the crystal rod and the alignment body.