Disclosed herein are various embodiments for high performance wireless data transfers. In an example embodiment, laser chips are used to support the data transfers using laser signals that encode the data to be transferred. The laser chip can be configured to (1) receive a digital signal and (2) responsive to the received digital signal, generate and emit a variable laser signal, wherein the laser chip comprises a laser-emitting epitaxial structure, wherein the laser-emitting epitaxial structure comprises a plurality of laser-emitting regions within a single mesa structure that generate the variable laser signal. Also disclosed are a number of embodiments for a photonics receiver that can receive and digitize the laser signals produced by the laser chips. Such technology can be used to wireless transfer large data sets such as lidar point clouds at high data rates.

A vertical cavity surface emitting laser (VCSEL) device comprises an interior light generating region, an exterior light emitting surface, and a spatial modulation region monolithically integrated with the interior light generating region so that the spatial modulation region is located between the interior light generating region and the exterior light emitting surface. The spatial modulation region is configured to shape the light generated by the interior light generating region before the generated light is emitted from the exterior light emitting surface. The VCSEL device may be configured to emit a beam of light along a predetermined direction, to emit a beam of light having a predetermined beam divergence, and/or to emit a beam of light having a predetermined shape or structure transverse to a direction of propagation so that the beam of light forms a predetermined spot or pattern of light when projected onto a surface. A plurality of VCSEL devices and a method for use in manufacturing a VCSEL device are also disclosed.

In some embodiments, the present disclosure relates to a method of making a microlens for a VCSEL device. The method includes forming a first lens layer over a second reflector layer. The first lens layer has a first average concentration of a first element. A first additional reflector layer is formed over the first lens layer. A second lens layer is formed over the first additional reflector layer. The second lens layer has a second average concentration of the first element greater than the first average concentration. A second additional reflector layer is formed over the second lens layer. An oxidation process is performed to oxidize peripheral portions of the first and second lens layers to form oxidized peripheral portions of the first and second lens layer. The oxidized peripheral portions of the second lens layer are wider than the oxidized peripheral portions of the first lens layer.

A light-emitting device includes a vertical-cavity surface-emitting laser, the resonant cavity of which is transverse multimode supporting transverse modes having rotational symmetry of order two about a main optical axis, and an index-contrast grating including a plurality of pads. The pads include: a central pad, a plurality of peripheral pads, which are periodically arranged along one or more lines that are concentric with respect to the central pad, and which are arranged so that the grating has, with respect to the main optical axis, a rotational symmetry of uneven order higher than or equal to three.

A proximity sensor which uses very narrow divergent beams from Vertical Cavity Surface Emitting Laser (VCSEL) for the illumination source is disclosed. Narrow divergent beams in the range 0.5 to 10 degrees can be achieved to provide high proximity sensing accuracy in a small footprint assembly. One approach to reducing the beam divergence is to increase the length of the VCSEL resonant cavity using external third mirror. A second embodiment extends the length of the VCSEL cavity by modifying the DBR mirrors and the gain region. Optical microlenses can be coupled with the VCSEL to collimate the output beam and reduce the beam divergence. These can be separate optical elements or integrated with the VCEL by modifying the substrate output surface profile or an added a transparent layer. These methods of beam divergence reduction are incorporated into various embodiment configurations to produce a miniature proximity sensor suitable for cell phones and tablets.

Optical devices and methods of manufacturing and operating such optical devices. In an embodiment, an optical device includes a substrate, a multi-layer structure having a first surface in contact with a first surface of the substrate, a first mirror disposed over a second surface of the multi-layer structure, a second mirror disposed over a second surface of the substrate, an intermediate mirror within the multi-layer structure, and an optical gain structure within the multi-layer structure. The device may include a first optically resonant cavity within the multi-layer structure, bounded by the first mirror and the intermediate mirror, where the first optically resonant cavity includes the optical gain structure. The device may further include a second optically resonant cavity, bounded by the first and second mirrors, where the second optically resonant cavity includes the first optically resonant cavity, the second optically reflective layer, and the substrate.

A light emitting element array includes a plurality of light emitting elements 10A arranged. Each light emitting element 10A includes: a stacked structure 20 including a stack of a first compound semiconductor layer 21 having a first surface 21a and a second surface 21b, an active layer 23 facing the second surface 21b of the first compound semiconductor layer 21, and a second compound semiconductor layer 22 having a first surface 22a and a second surface 22b; a first light reflection layer 41 formed on a base part surface 90 located on a first surface side of the first compound semiconductor layer 21; and a second light reflection layer 42 formed on a second surface side of the second compound semiconductor layer 22 and having a flat shape. The base part surface 90 extends to a peripheral region 99 surrounded by the plurality of light emitting elements. The base part surface 90 has a concavo-convex shape, and is differentiable.

Techniques for reducing the risk for an unsafe eye condition associated with light sources. In an example, a light source package is described. The light source package includes a package body defining an interior volume and including an opening. The package also includes a light source contained inside the interior volume of the package body. The package also includes an optical element that occupies at least a portion of the opening of the package body. An electrically conductive material is disposed over a surface of the optical element. This material may be electrically coupled with a system. The system accesses an electrical parameter of the material, determines a damage associated with the optical element based on the electrical parameter, and initiates a corrective action associated with the light source based on the damage.

A vertical cavity surface emitting laser (VCSEL) device includes a microlens arranged over a reflector stack. The reflector stack includes alternating reflector layers of a first material and a second material. The microlens stack includes a first lens layer, a second lens layer arranged over the first lens layer, and a third lens layer arranged over the second lens layer. The first lens layer includes a first average concentration of a first element and has a first width. The second lens layer includes a second average concentration of the first element greater than the first average concentration and has a second width smaller than the first width. The third lens layer includes a third average concentration of the first element greater than the second average concentration and has a third width smaller than the second width.

A laser such as a vertical-cavity surface-emitting laser (VCSEL) emits laser light. A beam shaping metasurface is configured to apply a beam shaping profile to the laser light to generate shaped laser light in response to receiving the laser light.