A nozzle of a plasma arc torch is provided. The nozzle is configured to reduce fluid pressure surging in a nozzle plenum. The nozzle comprises a nozzle body having a proximal end and a distal end. The nozzle plenum is defined between the nozzle body and an electrode of the plasma arc torch. The nozzle includes a nozzle plenum gas inlet located at the proximal end of the nozzle body, a plasma gas exit orifice located at the distal end of the nozzle body, a plasma gas passageway fluidly connecting the nozzle plenum gas inlet to the plasma gas exit orifice, and an isolation chamber fluidly connected to the plasma gas passageway and the nozzle plenum. The isolation chamber is sized to receive a volume of substantially stagnant gas to reduce the fluid pressure surging in the nozzle plenum.

The present invention provides a glow discharge assembly that includes an electrically conductive cylindrical screen, a flange assembly, an electrode, an insulator and a non-conductive granular material. The electrically conductive cylindrical screen has an open end and a closed end. The flange assembly is attached to and electrically connected to the open end of the electrically conductive cylindrical screen. The flange assembly has a hole with a first diameter aligned with a longitudinal axis of the electrically conductive cylindrical screen. The electrode is aligned with the longitudinal axis of the electrically conductive cylindrical screen and extends through the hole of the flange assembly into the electrically conductive cylindrical screen. The insulator seals the hole of the flange assembly around the electrode and maintains a substantially equidistant gap between the electrically conductive cylindrical screen and the electrode. The non-conductive granular material is disposed within the substantially equidistant gap.

A translatable electrode for use in a cartridge assembly for a contact start plasma arc torch including an electrode body having a longitudinal axis and including a proximal end and a distal end. The proximal end including a spiral groove and a contact surface at a proximal end face shaped to electrically communicate with a cathodic element. The translatable electrode also including at least one emissive insert disposed within the distal end of the electrode body and proximate a distal end face. The translatable electrode including at least one baffle disposed between the proximal and distal end of the electrode body. The translatable electrode also including a gas flow dampening region disposed circumferentially about the distal end and adjacent the distal end face and positioned between the at least one baffle and the distal end face.

The present disclosure relates to a thermal plasma processing apparatus capable of efficiently using thermal plasma and securing a reaction time for the thermal decomposition of the processing gas. A Thermal plasma processing apparatus according to an embodiment of the present disclosure includes a torch part in which an arc is generated between a negative electrode and a positive electrode, and in which a processing gas to be thermally decomposed by the arc is injected between the negative electrode and the positive electrode, a power supply part configured to be connected to the negative electrode and the positive electrode and to apply a high voltage between the negative electrode and the positive electrode, and a reaction part configured to communicate with the torch part and to generate turbulence in the processing gas passing through the torch part.

A torch head for a liquid-cooled plasma arc torch is provided. The torch head includes a torch body and a torch insulator, coupled to the torch body, having a substantially non-conductive insulator body. The torch insulator includes (i) a first liquid coolant channel, disposed within the insulator body, configured to conduct a fluid flow from the torch head into a consumable cartridge along a first preexisting flow path, (ii) a first liquid return channel, disposed within the insulator body, configured to return at least a portion of the fluid flow from the cartridge to the torch head along the first preexisting flow path, and (iii) a gas channel, disposed within the insulator body, configured to conduct a first gas flow from the torch head to the cartridge along a second preexisting flow path. The first and second preexisting flow paths are fluidly isolated from each other.

A method for using a plasma torch includes delivering a plasma gas through a plasma gas flow channel of a plasma torch while ionizing the plasma gas to produce a plasma arc that extends between the electrode and the workpiece. Additionally, shield fluid is delivered through a shield flow channel at a first pressure. A piercing operation to produce a pierce hole in the workpiece using the plasma arc is initiated while the shield fluid is delivered through the shield flow channel at the first pressure. After conducting the piercing operation for an amount of time, the shield fluid is delivered to the shield flow channel at a second pressure that is higher than the first pressure. Subsequent to the piercing operation, performing a cutting operation that forms a cut in the workpiece that originates at and extends away from a boundary of the pierce hole.

An apparatus for treating a substrate includes a support unit that supports the substrate and a nozzle that dispenses liquid plasma to etch a film formed on the substrate supported on the support unit.

A robotic treatment system includes a robotic arm comprising a tool mount, and a plurality of tools, each of the plurality of tools removably connectable to the tool mount. The system further includes a distribution assembly, which includes a distribution source, a distribution feed cable, a distribution return cable, and a plurality of distribution valves. Each of the plurality of distribution valves regulates a distribution flow through the distribution feed cable to one of the plurality of tools or the distribution return cable from one of the plurality of tools. The system further includes a supply assembly, which includes a supply controller, a plurality of substrate feeders, and a plurality of supply feed cables. The system further includes a main controller, the main controller in operable communication with the robotic arm, the supply controller, and each of the plurality of distribution valves.

A liquid cooled electrode for a contact start plasma arc cutting torch is provided. The electrode includes an elongated body defining a longitudinal axis. The elongated body includes a proximal end shaped to matingly engage a torch body of the plasma arc cutting torch and a distal end located substantially opposite of the proximal end along the longitudinal axis. The electrode also includes one or more contact surfaces disposed on an external surface of the distal end of the electrode body between the proximal and distal ends. The one or more contact surfaces are shaped to physically contact a nozzle disposed within the plasma arc cutting torch during a portion of a pilot arc initiation process. The physical contact is configured to support transmission of a pilot arc current between the electrode and the nozzle with a density of at least about 3000 amps per square inch.

In some aspects, torch receptacles for coupling a plasma arc torch to a torch lead can include: a body having a first end to connect to the torch lead and a second end to connect to a torch body; a set of ports within the first end to fluidly connect to a set of fluid conduits within the torch lead; and a multiway valve within the body and fluidly connected to the set of ports and to a torch gas conduit formed in the second end, the multiway valve being configured to: i) manipulate a flow of fluids between the first end and the second end to select from primary gases entering the set of ports, ii) deliver a selected primary gas to the torch body through the torch gas conduit, and iii) fluidly connect the torch gas conduit to a gas supply manifold of the plasma cutting system.