A system for generating magnetized plasma and sustaining plasma's magnetic field comprises a plasma generator for generating magnetized plasma and a flux conserver in which the generated magnetized plasma is injected and confined. A central conductor comprises an upper central conductor and a lower central conductor that are electrically connected forming a single integrated conductor. The upper central conductor and an outer electrode form an annular plasma propagating channel. The lower central conductor extends out of the plasma generator and into the flux conserver such that an end of the inner electrode is electrically connected to a wall of the flux conserver. A power system provides a formation current pulse and a sustainment current pulse to the central conductor to form the magnetized plasma, inject such plasma into the flux conserver and sustain plasma's magnetic field.

A plasma source assembly for use with a substrate processing chamber is described. The assembly includes a spring which is disposed between electrodes and a dielectric ring.

A plasma source assembly for use with a substrate processing chamber is described. The assembly includes a spring which is disposed between electrodes and a dielectric ring.

The present invention is an electrical device that can seal an array of glass ampules and micro ampules using plasma arc produced by electricity. The device can produce high temperature by making mini plasma arcs which will melt down the glass and make a permanent seal. The arc is produced in a sealing head which covers the plasma arc and can focus the heat in a very small area so that the heat can be directly transferred to the glass without any intermediate, thereby increasing the efficiency. The plasma arc can increase the heat by using multiplication of the arcs encased in the sealing head.

The present invention is an electrical device that can seal an array of glass ampules and micro ampules using plasma arc produced by electricity. The device can produce high temperature by making mini plasma arcs which will melt down the glass and make a permanent seal. The arc is produced in a sealing head which covers the plasma arc and can focus the heat in a very small area so that the heat can be directly transferred to the glass without any intermediate, thereby increasing the efficiency. The plasma arc can increase the heat by using multiplication of the arcs encased in the sealing head.

Approaches herein provide a system for determining whether one or more consumable parts of a plasma device has been removed or replaced while the plasma device and associated sensors lie dormant or are no longer receiving data, e.g., when the plasma device is power-off. The approaches herein determine whether certain types of data stored in a controller's memory are still valid, for example, for the purposes of determining degradation and/or end-of-life of the consumable parts. In the case that one or more consumable parts has been serviced or replaced, the data stored in the controller memory may no longer be considered valid for the consumable part(s). In one approach, the controller determines a status of a switch or a conformal film in the device following start-up, and determines, based on the position of the switch or the conformal film, whether the consumable part has been removed or replaced.

Approaches herein provide a system for determining whether one or more consumable parts of a plasma device has been removed or replaced while the plasma device and associated sensors lie dormant or are no longer receiving data, e.g., when the plasma device is power-off. The approaches herein determine whether certain types of data stored in a controller's memory are still valid, for example, for the purposes of determining degradation and/or end-of-life of the consumable parts. In the case that one or more consumable parts has been serviced or replaced, the data stored in the controller memory may no longer be considered valid for the consumable part(s). In one approach, the controller determines a status of a switch or a conformal film in the device following start-up, and determines, based on the position of the switch or the conformal film, whether the consumable part has been removed or replaced.

A high power DC steam plasma torch system (S) includes a steam plasma torch assembly (1) wherein superheated steam (46) is used as the main plasma forming gas, thereby resulting in a very reactive steam plasma plume. The superheated steam (46) is injected internally directly into the plasma plume via a ceramic lined steam feed tube (25) for reducing condensation of steam before reaching the plasma plume. The superheated steam (46) flows through a gas vortex (16) which has tangentially drilled holes thereby resulting in a high speed gas swirl that minimizes electrode erosion. In the present steam plasma torch system (S), the plasma torch assembly (1) is ignited using an ignition contactor which is housed external to the plasma torch assembly (1). The superheated steam (46) is injected into the plasma plume using a water cooled steam vortex generator assembly (15).

A high power DC steam plasma torch system (S) includes a steam plasma torch assembly (1) wherein superheated steam (46) is used as the main plasma forming gas, thereby resulting in a very reactive steam plasma plume. The superheated steam (46) is injected internally directly into the plasma plume via a ceramic lined steam feed tube (25) for reducing condensation of steam before reaching the plasma plume. The superheated steam (46) flows through a gas vortex (16) which has tangentially drilled holes thereby resulting in a high speed gas swirl that minimizes electrode erosion. In the present steam plasma torch system (S), the plasma torch assembly (1) is ignited using an ignition contactor which is housed external to the plasma torch assembly (1). The superheated steam (46) is injected into the plasma plume using a water cooled steam vortex generator assembly (15).

A novel plasma generation and containment system includes a first electrode, a second electrode, a power source, and an electromagnet. The first electrode and the second electrode are electrically coupled via a wire to form an open circuit. The voltage is asserted on the open circuit to form a spark between the first electrode and the second electrode to form a closed circuit. Then, a current is asserted on the closed circuit to form a plasma between the first electrode and the second electrode. The electromagnet provides a magnetic field to contain and compress the plasma.