H01L21/02573

Device with highly active acceptor doping and method of production thereof

A device including a triple-layer EPI stack including SiGe, Ge, and Si, respectively, with Ga confined therein, and method of production thereof. Embodiments include an EPI stack including a SiGe layer, a Ge layer, and a Si layer over a plurality of fins, the EPI stack positioned between and over a portion of sidewall spacers, wherein the Si layer is a top layer capping the Ge layer, and wherein the Ge layer is a middle layer capping the SiGe layer underneath; and a Ga layer in a portion of the Ge layer between the SiGe layer and the Si layer.

Diamond Seed Technology

Diamond Seed Technology is a material comprising man-made diamond to pure diamond used as semiconductors or conductors to solve the problem of design life expectancy and durability, power generation and output, heat resistance, propulsion, emissions reduction and its flexibility for existing and future designs. This material can be used for various materials, to produce or modify apparatus' and devices such as semiconductors, conductors, fuel cells, light bulb filament illumination, GUI [Graphical User Interfaces; monitor, television, smart screens, portable devices and etc.], LED's, solar cells/panels/bulbs and wherever semiconductors are used in various industries, land, sea and aerospace transportation, portable uses, stationary installations such residential/commercial properties, technological fields and industries and that utilize GUI [Graphic User Interface].

Method of Fabricating Thin, Crystalline Silicon Film and Thin Film Transistors
20200357638 · 2020-11-12 ·

A method of producing a crystalline silicon film includes forming a first silicon film that is amorphous at formation, forming a doped film of silicon or germanium on the first silicon film, the doped film being amorphous at formation; and annealing the structure to crystallize the doped film and the first silicon film. A method of producing a crystalline silicon film includes forming a Si.sub.x1Ge.sub.1-x1 film on a substrate, forming a Si.sub.x2Ge.sub.1-x2 film on the Si.sub.x1Ge.sub.1-x1 film, the Si.sub.x1Ge.sub.1-x1 film being amorphous at formation and having a first thermal budget for crystallization, the Si.sub.x2Ge.sub.1-x2 film being amorphous at formation and having a second thermal budget for crystallization, the second thermal budget being lower than the first thermal budget, forming a silicon film on the Si.sub.x2Ge.sub.1-x2 film, the silicon film being amorphous at formation; and annealing to crystallize the Si.sub.x1Ge.sub.1-x1 film, the Si.sub.x2Ge.sub.1-x2 film, and the silicon film.

Integrated photonics including germanium

A photonic structure can include in one aspect one or more waveguides formed by patterning of waveguiding material adapted to propagate light energy. Such waveguiding material may include one or more of silicon (single-, poly-, or non-crystalline) and silicon nitride.

Devices having a semiconductor material that is semimetal in bulk and methods of forming the same

Devices, and methods of forming such devices, having a material that is semimetal when in bulk but is a semiconductor in the devices are described. An example structure includes a substrate, a first source/drain contact region, a channel structure, a gate dielectric, a gate electrode, and a second source/drain contact region. The substrate has an upper surface. The channel structure is connected to and over the first source/drain contact region, and the channel structure is over the upper surface of the substrate. The channel structure has a sidewall that extends above the first source/drain contact region. The channel structure comprises a bismuth-containing semiconductor material. The gate dielectric is along the sidewall of the channel structure. The gate electrode is along the gate dielectric. The second source/drain contact region is connected to and over the channel structure.

HIGH EFFICIENCY ULTRAVIOLET LIGHT EMITTING DIODE WITH ELECTRON TUNNELLING
20200287084 · 2020-09-10 ·

A method of growing an AlGaN semiconductor material utilizes an excess of Ga above the stoichiometric amount typically used. The excess Ga results in the formation of band structure potential fluctuations that improve the efficiency of radiative recombination and increase light generation of optoelectronic devices, in particular ultraviolet light emitting diodes, made using the method. Several improvements in UV LED design and performance are also provided for use together with the excess Ga growth method. Devices made with the method can be used for water purification, surface sterilization, communications, and data storage and retrieval.

DIAMOND SEMICONDUCTOR SYSTEM AND METHOD
20200266067 · 2020-08-20 ·

Disclosed herein is a new and improved system and method for fabricating monolithically integrated diamond semiconductor. The method may include the steps of seeding the surface of a substrate material, forming a diamond layer upon the surface of the substrate material; and forming a semiconductor layer within the diamond layer, wherein the diamond semiconductor of the semiconductor layer has n-type donor atoms and a diamond lattice, wherein the donor atoms contribute conduction electrons with mobility greater than 770 cm.sup.2/Vs to the diamond lattice at 100 kPa and 300K, and Wherein the n-type donor atoms are introduced to the lattice through ion tracks.

Conductive Diamond Application System
20200230940 · 2020-07-23 · ·

A system is provided. The system includes a 3D printer, which includes a first dispenser and a second dispenser. The first dispenser is configured to apply conductive material to a surface, and the second dispenser is configured to apply conductive diamonds to a surface. The conductive material includes a mixture of an elastomer and at least one of nickel and silver, and the conductive diamonds are between 1 and 10 microns in size.

Integrated trench capacitor formed in an epitaxial layer

A trench capacitor includes at least one epitaxial semiconductor surface layer on a semiconductor substrate having a doping level that is less than a doping level of the semiconductor substrate. A plurality of trenches are formed through at least one half of a thickness of the epitaxial semiconductor surface layer. The epitaxial semiconductor surface layer is thicker than a depth of the plurality of trenches. At least one capacitor dielectric layer lines a surface of the trenches. At least one trench fill layer on the dielectric layer fills the trenches.

METHOD OF FORMING FILM STACKS WITH REDUCED DEFECTS

A method of forming a film stack with reduced defects is provided and includes positioning a substrate on a substrate support within a processing chamber and sequentially depositing polysilicon layers and silicon oxide layers to produce the film stack on the substrate. The method also includes supplying a current of greater than 5 ampere (A) to a plasma profile modulator while generating a deposition plasma within the processing chamber, exposing the substrate to the deposition plasma while depositing the polysilicon layers and the silicon oxide layers, and maintaining the processing chamber at a pressure of greater than 2 Torr to about 100 Torr while depositing the polysilicon layers and the silicon oxide layers.