A semiconductor apparatus with an isolation portion between vertically adjacent elements and an electronic device including the semiconductor apparatus are provided. The semiconductor apparatus may include: a substrate; a first vertical semiconductor element and a second vertical semiconductor element stacked on the substrate sequentially, each of the first vertical semiconductor element and the second vertical semiconductor element including a first source/drain region, a channel region and a second source/drain region stacked sequentially in a vertical direction; and an isolation structure configured to electrically isolate the first vertical semiconductor element from the second vertical semiconductor element, and the isolation structure including a pn junction.

An integrated circuit having a transistor architecture includes a first semiconductor body and a second semiconductor body. The first and second semiconductor bodies are arranged vertically (e.g., stacked configuration) or horizontally (e.g., forksheet configuration) with respect to each other, and separated from one another by insulator material, and each can be configured for planar or non-planar transistor topology. A first gate structure is on the first semiconductor body, and includes a first gate electrode and a first high-k gate dielectric. A second gate structure is on the second semiconductor body, and includes a second gate electrode and a second high-k gate dielectric. In an example, the first gate electrode includes a layer comprising a compound of silicon and one or more metals; the second gate structure may include a silicide workfunction layer, or not. In one example, the first gate electrode is n-type, and the second gate electrode is p-type.

Described herein are integrated circuit (IC) devices that include devices that include fin-based field-effect transistors (FinFETs) integrated over gate-all-around (GAA) transistors. The GAA transistors may serve to provide high-performance compute logic, and may be relatively low-voltage transistors, while FinFETs may be more suitable than GAA transistors for providing high-voltage transistors, and, therefore, may serve to provide peripheral logic for backend memory arrays implemented over the same support structure over which the GAA transistors and the FinFETs are provided. Such an arrangement may address the fundamental voltage incompatibility by integrating a mix of FinFETs and GAA transistors in stacked complimentary FET (CFET) architecture to enable embedded 1T-1X based memories.

Transistor devices are provided. A transistor device includes a substrate. The transistor device includes a lower transistor having a lower gate and a lower channel region on the substrate. The transistor device includes an upper transistor having an upper gate and an upper channel region. The lower transistor is between the upper transistor and the substrate. The transistor device includes an isolation region that separates the lower channel region of the lower transistor from the upper channel region of the upper transistor. Moreover, the lower gate of the lower transistor contacts the upper gate of the upper transistor. Related methods of forming a transistor device are also provided.

A complementary metal oxide semiconductor (CMOS) device and method of making including a transistor of a first type formed on a first substrate and a transistor of a second type formed on a second substrate. The CMOS device is formed when the first substrate is bonded to the second substrate,

A monolithic three dimensional integrated circuit is provided. The monolithic three dimensional integrated circuit includes a first cell layer having a first cell having a first active component of the monolithic three dimensional integrated circuit. A second layer having a second cell including a second active component. The second cell layer is formed vertically above the first cell layer. The first cell layer having the first active component and the second cell layer having the second active component are formed on a single die. The first cell has a smaller metal pitch than the second cell. A buried via electrically couples the first active component of the first cell of the first cell layer with the second active component of the second cell of the second cell layer.

A stacked field effect transistor device is provided. The stacked field effect transistor device includes a lower semiconductor channel segment between a first pair of source/drains, and an upper semiconductor channel segment between a second pair of source/drains. The stacked device further includes a gate dielectric layer on the upper and lower semiconductor channel segments, and a first work function material layer on the gate dielectric layer on the lower semiconductor channel segment. The stacked device further includes a first conductive gate fill on the first work function material layer, and a replacement work function material layer on the gate dielectric layer on the upper semiconductor channel segment and the first conductive gate fill, wherein the replacement work function material layer is a different work function material from the first work function material layer. The device further includes a replacement conductive gate fill on the replacement work function material layer.

Integrated circuits including lateral diodes. In an example, diodes are formed with laterally neighboring source and drain regions (diffusion regions) configured with different polarity epitaxial growths (e.g., p-type and n-type), to provide an anode and cathode of the diode. In some such cases, dopants may be used in the channel region to create or otherwise enhance a PN or PIN junction between the diffusion regions and the semiconductor material of a channel region. The channel region can be, for instance, one or more nanoribbons or other such semiconductor bodies that extend between the oppositely-doped diffusion regions. In some cases, nanoribbons making up the channel region are left unreleased, thereby preserving greater volume through which diode current can flow. Other features include skipped epitaxial regions, elongated gate structures, using isolation structures in place of gate structures, and/or sub-fin conduction paths that are supplemental or alternative to a channel-based conduction path.

A 3D semiconductor device, the device including: a first level including a plurality of first metal layers; a second level, where the second level overlays the first level, where the second level includes at least one single crystal silicon layer, where the second level includes a plurality of transistors, where each transistor of the plurality of transistors includes a single crystal channel, where the second level includes a plurality of second metal layers, where the plurality of second metal layers include interconnections between the transistors of the plurality of transistors, where the second level is overlaid by a first isolation layer; and a connective path between the plurality of transistors and the plurality of first metal layers, where the connective path includes a via disposed through at least the single crystal silicon layer, and where at least one of the plurality of transistors includes a gate all around structure.

An integrated circuit component includes a first layer including first and second areas of epitaxy material. The first layer has a first polarity. The component further includes a second layer including third and fourth areas of epitaxy material. The second layer has a second polarity that is different than the first polarity. The third area is arranged at least partially above the first area, and the fourth area is arranged at least partially above the second area. The integrated circuit component further includes an interconnect in direct contact with one of the first area and the third area and in direct contact with one of the second area and the fourth area. The interconnect has a top surface that does not extend substantially above an uppermost surface of the second layer.