A memory device includes a first field effect transistor (FET) stack on a first bottom source/drain region, which includes a first vertical transport field effect transistor (VTFET) device between a second VTFET device and the first source/drain region, and a second FET stack on a second bottom source/drain region, which includes a third VTFET device between a fourth VTFET device and the bottom source/drain region. The memory device includes a third FET stack on a third bottom source/drain region, which includes a fifth VTFET between a sixth VTFET and the third source/drain region, which is laterally adjacent to the first and second source/drain regions. The memory device includes a first electrical connection interconnecting a gate structure of the third VTFET with a gate structure of the fifth VTFET, and a second electrical connection interconnecting a gate structure of the second VTFET with a gate structure of the sixth VTFET.

Techniques herein include methods of forming channel structures for field effect transistors having a channel current path parallel to a surface of a substrate. 3D in-situ horizontal or lateral growth of the channel and source/drain regions allows for a custom doping in the 3D horizontal nanosheet direction for NMOS and PMOS devices. An ultra-short channel length is achieved with techniques herein because the channel is epitaxially grown in the 3D horizontal nanosheet direction at the monolayer level. Since the channel is grown in a dielectric cavity, a precise channel cross sectional area can be tuned.

A semiconductor die includes a semiconductor substrate and a transistor array disposed over the semiconductor substrate. The transistor array includes unit cells and spacers. The unit cells are disposed along rows of the transistor array extending in a first direction and columns of the transistor array extending in a second direction perpendicular to the first direction. The spacers encircle the unit cells. The unit cells include source contacts and drain contacts separated by interlayer dielectric material portions. First sections of the spacers contacting the interlayer dielectric material portions are thicker than second sections of the spacers contacting the source contacts and the drain contacts.

A CFET includes a fin that has a bottom channel portion, a top channel portion, and a channel isolator between the bottom channel portion and the top channel portion. The CFET further includes a source and drain stack that has a bottom source or drain (S/D) region connected to the bottom channel portion, a top S/D region connected to the top channel portion, a source-drain isolator between the bottom S/D region and the top S/D region. The CFET further includes a spacer foot physically connected to a base sidewall portion of the bottom S/D region and a buried S/D contact that is physically connected to an upper sidewall portion of the bottom S/D region. The CFET may further include a common gate around the bottom channel portion, around the top channel portion, and around the channel isolator.

A semiconductor device, the device including: a first level including control circuits, where the control circuits include a plurality of first transistors and a plurality of metal layers; and a memory level disposed on top of the first level, where the memory level includes an array of memory cells, where each of the memory cells includes at least one second transistor, where the control circuits control access to the array of memory cells, where the first level is bonded to the memory level, where the bonded includes oxide to oxide bonding regions and a plurality of metal to metal bonding regions, and where at least a portion of the array of memory cells is disposed directly above at least one of the plurality of metal to metal bonding regions.

A semiconductor device includes a substrate; a 1.sup.st transistor formed above the substrate, and having a 1.sup.st transistor stack including a plurality of 1.sup.st channel structures, a 1.sup.st gate structure surrounding the 1.sup.st channel structures, and 1.sup.st and 2.sup.nd source/drain regions at both ends of the 1.sup.st transistor stack in a 1.sup.st channel length direction; and a 2.sup.nd transistor formed above the 1.sup.st transistor in a vertical direction, and having a 2.sup.nd transistor stack including a plurality of 2.sup.nd channel structures, a 2.sup.nd gate structure surrounding the 2.sup.nd channel structures, and 3.sup.rd and 4.sup.th source/drain regions at both ends of the 2.sup.nd transistor stack in a 2.sup.nd channel length direction, wherein the 3.sup.rd source/drain region does not vertically overlap the 1.sup.st source/drain region or the 2.sup.nd source/drain region, and the 4.sup.th source/drain region does not vertically overlap the 1.sup.st source/drain region or the 2.sup.nd source/drain region.

A semiconductor structure and a forming method thereof are provided. One form of a semiconductor structure includes: a first device structure, including a first substrate and a first device formed on the first substrate, the first device including a first channel layer structure located on the first substrate, a first device gate structure extending across the first channel layer structure, and a first source-drain doping region located in the first channel layer structure on two sides of the first device gate structure; and a second device structure, located on a front surface of the first device structure, including a second substrate located on the first device structure and a second device formed on the second substrate, the second device including a second channel layer structure located on the second substrate, a second device gate structure extending across the second channel layer structure, and a second source-drain doping region located in the second channel layer structure on two sides of the second device gate structure, where projections of the second channel layer structure and the first channel layer structure onto the first substrate intersect non-orthogonally. The electricity of the first device can be led out according to the present disclosure.

An integrated circuit includes a first set of devices, a set of metal layers and a header circuit. The first set of devices are configured to operate on a first supply voltage, and are located on a first layer of the integrated circuit. The set of metal layers are above the first layer, and includes a first metal layer and a second metal layer. The first metal layer extends in at least a first direction and a second direction. The header circuit is above the first set of devices. At least a portion of the header circuit is positioned between the first metal layer and the second metal layer. The header circuit is configured to provide the first supply voltage to the first set of devices, and is configured to be coupled to a first voltage supply having the first supply voltage.

A method of manufacturing a semiconductor memory device includes processing a first substrate including a first align mark and a first structure, processing a second substrate including a second align mark and a second structure, orientating the first substrate and the second substrate such that the first structure and the second structure face each other, and controlling alignment between the first structure and the second structure by using the first align mark and the second align mark to couple the first structure with the second structure.

A semiconductor device including a first chip and a second chip. The first chip includes: a first substrate; a first transistor that is provided on the first substrate; and a first pad that is provided above the first transistor and that is electrically connected to the first transistor. The second chip includes: a second pad that is provided on the first pad; a second substrate that is provided above the second pad and that includes a first diffusion layer and a second diffusion layer, at least one of the first diffusion layer and the second diffusion layer being electrically connected to the second pad; and an isolation insulating film or an isolation trench that extends at least from an upper surface of the second substrate to a lower surface of the second substrate within the second substrate and that isolates the first diffusion layer from the second diffusion layer.