H01L27/1465

Germanium-silicon light sensing apparatus

A method for fabricating an image sensor array having a first group of photodiodes for detecting light at visible wavelengths a second group of photodiodes for detecting light at infrared or near-infrared wavelengths, the method including growing a germanium-silicon layer on a semiconductor donor wafer; defining pixels of the image sensor array on the germanium-silicon layer; defining a first interconnect layer on the germanium-silicon layer, wherein the interconnect layer includes a plurality of interconnects coupled to the first group of photodiodes and the second group of photodiodes; defining integrated circuitry for controlling the pixels of the image sensor array on a semiconductor carrier wafer; defining a second interconnect layer on the semiconductor carrier wafer, wherein the second interconnect layer includes a plurality of interconnects coupled to the integrated circuitry; and bonding the first interconnect layer with the second interconnect layer.

Short-wave infrared focal plane arrays, and methods for utilization and manufacturing thereof
11757060 · 2023-09-12 · ·

Short-wave infrared (SWIR) focal plane arrays (FPAs) comprising a Si layer through which light detectable by the FPA reaches photodiodes of the FPA, at least one germanium (Ge) layer including a plurality of distinct photosensitive areas including at least one photosensitive area in each of a plurality of photosensitive photosites, each of the distinct photosensitive areas comprising a plurality of proximate steep structures of Ge having height of at least 0.5 μm and a height-to-width ratio of at least 2, and methods for forming same.

IMAGE SENSOR INCLUDING SILICON VERTICALLY STACKED WITH GERMANIUM LAYER
20230352514 · 2023-11-02 ·

Various embodiments of the present disclosure are directed towards an integrated chip having a first image sensor element including a first doped region disposed within a substrate. The substrate comprises a first material and has a first surface opposite a second surface. A second image sensor element overlies the first image sensor element. The second image sensor element includes an active layer disposed in the substrate directly over the first doped region. The first doped region and the active layer are spaced vertically between the first and second surfaces of the substrate. The active layer comprises a second material different from the first material.

CMOS image sensor with LED flickering reduction and low color cross-talk

CMOS image sensor with LED flickering reduction and low color cross-talk are disclosed. In one embodiment, an image sensor includes a plurality of pixels arranged in rows and columns of a pixel array that is disposed in a semiconductor substrate. Each pixel includes a plurality of large subpixels (LPDs) and at least one small subpixel (SPD). A plurality of color filters are disposed over individual subpixels. Each individual SPD is laterally adjacent to at least one other SPD.

SHORT-WAVE INFRARED SPECTRUM DETECTOR AND PREPARATION METHOD THEREOF

Disclosed is a short-wave infrared spectrum detector, including: a photosensitive chip, including a plurality of detection pixels; a substrate; and a wavelength division component array, including a plurality of wavelength division pixels, each of the plurality of wavelength division pixels corresponding to a narrowband transmission spectrum, wherein the photosensitive chip and the wavelength division component array are monolithically integrated on both sides of the substrate, and an orthographic projection of each of the plurality of wavelength division pixels on the substrate covers an orthographic projection of at least one detection pixel on the substrate. The wavelength division structure and the photosensitive chip are integrated, so that each pixel has the ability of frequency-selective light spectrum detection, and a short-wave infrared spectrum detector integrated with wavelength division and detection is formed, realizing the miniaturization of the short-wave infrared spectral detection system.

SYSTEM-ON-CHIP CAMERA WITH INTEGRATED LIGHT SENSOR(S) AND METHOD OF PRODUCING A SYSTEM-ON-CHIP CAMERA
20220328551 · 2022-10-13 · ·

The system-on-chip camera comprises a semiconductor body with an integrated circuit, a sensor substrate, sensor elements arranged in the sensor substrate according to an array of pixels, a light sensor in the sensor substrate apart from the sensor elements, and a lens or an array of lenses on a surface of incidence. Filter elements, which may especially be interference filters for red, green or blue, are arranged between the sensor elements and the surface of incidence.

System-on-chip camera with integrated light sensor(s) and method of producing a system-on-chip camera
11411035 · 2022-08-09 · ·

The system-on-chip camera comprises a semiconductor body (1) with an integrated circuit (40), a sensor substrate (2), sensor elements (3) arranged in the sensor substrate according to an array of pixels, a light sensor (4) in the sensor substrate apart from the sensor elements, and a lens or an array of lenses (15) on a surface of incidence (30). Filter elements (11, 12, 13), which may especially be interference filters for red, green or blue, are arranged between the sensor elements and the surface of incidence.

Wafer level shim processing

An integrated circuit assembly including a first wafer bonded to a second wafer with an oxide layer, wherein a first surface of the first wafer is bonded to a first surface of the second wafer. The assembly can include a bonding oxide on a second surface of the second wafer, wherein a surface of the bonding oxide is polished. The assembly can further include a shim secured to the bonding oxide on the second surface of the second wafer to reduce bow of the circuit assembly.

Methods for fabricating mechanically stacked multicolor focal plane arrays and detection devices

Methods of fabricating multicolor, stacked detector devices and focal plane arrays are disclosed. In one embodiment, a method of fabricating a stacked multicolor device includes forming a first detector by depositing a first detector structure on a first detector substrate, and depositing a first ground plane on the first detector structure, wherein the first ground plane is transmissive to radiation in a predetermined spectral band. The method further includes bonding an optical carrier wafer to the first ground plane, removing the first detector substrate, and forming a second detector. The second detector is formed by depositing a second detector structure on a second detector substrate, and depositing a second ground plane on the second detector structure. The method further includes depositing a dielectric layer on one of the first detector structure and the second ground plane, bonding the first detector to the second detector, and removing the second detector substrate.

IMAGING DEVICE AND ELECTRONIC APPARATUS
20220109017 · 2022-04-07 ·

An imaging device according to one embodiment of the present disclosure includes a first electrode, a second electrode, and a photoelectric converter. The first electrode includes an oxide semiconductor material having an amorphous state. The second electrode is opposed to the first electrode. The photoelectric converter is provided between the first electrode and the second electrode, and includes a compound semiconductor material.