A semiconductor device includes: a first conductivity type drift region having crystal defects generated by electron-beam irradiation; a first main electrode region of a first conductivity type arranged in the drift region and having an impurity concentration higher than that of the drift region; and a second main electrode region of a second conductivity type arranged in the drift region to be separated from the first main electrode region, wherein the crystal defects contain a first composite defect implemented by a vacancy and oxygen and a second composite defect implemented by carbon and oxygen, and a density of the crystal defects is set so that a peak signal intensity of a level of the first composite defect identified by a deep-level transient spectroscopy measurement is five times or more than a peak signal intensity of a level of the second composite defect.

An insulation film includes a first opening portion in at least one of a cell region and a termination region, and a second opening portion in an interface region. The second opening portion has an opening ratio lower than an opening ratio of the first opening portion. The semiconductor device includes a first impurity layer of a second conductivity type, and a second impurity layer of the second conductivity type. The first impurity layer is disposed on a surface of a semiconductor substrate below the first opening portion. The second impurity layer has impurity concentration lower than impurity concentration of the first impurity layer, and is disposed on the surface of the semiconductor substrate below the second opening portion.

A semiconductor device according to the present invention includes: a semiconductor layer including a first conductivity type semiconductor region and a second conductivity type semiconductor region joined to the first conductivity type semiconductor region; and a surface electrode connected to the second conductivity type region on one surface of the semiconductor layer, including a first Al-based electrode, a second Al-based electrode, an Al-based oxide film interposed between the first Al-based electrode and the second Al-based electrode, and a plated layer on the second Al-based electrode.

Some embodiments of the disclosure provide a semiconductor device. The semiconductor device includes: a doped substrate; a barrier layer, disposed on the doped substrate; a channel layer, disposed between the doped substrate and the barrier layer; and a doped semiconductor structure, disposed in the doped substrate, where a band gap of the barrier layer is greater than a band gap of the channel layer, the doped substrate and the doped semiconductor structure have different polarities, and the doped substrate includes a doped silicon substrate.

In a method of manufacturing a semiconductor device having an oxide film removing step where an oxide film formed on a surface of a semiconductor substrate is partially removed, the oxide film removing step includes: a first step where a resist glass layer is selectively formed on an upper surface of the oxide film without using an exposure step; a second step where the resist glass layer is densified by baking the resist glass layer; and a third step where the oxide film is partially removed using the resist glass layer as a mask, wherein the resist glass layer is made of resist glass which contains at least SiO.sub.2, B.sub.2O.sub.3, Al.sub.2O.sub.3, and at least two oxides of alkaline earth metals selected from a group consisting of CaO, MgO and BaO, and substantially contains none of Pb, As, Sb, Li, Na, K, and Zn.

Hydrogen atoms and crystal defects are introduced into an n− semiconductor substrate by proton implantation. The crystal defects are generated in the n− semiconductor substrate by electron beam irradiation before or after the proton implantation. Then, a heat treatment for generating donors is performed. The amount of crystal defects is appropriately controlled during the heat treatment for generating donors to increase a donor generation rate. In addition, when the heat treatment for generating donors ends, the crystal defects formed by the electron beam irradiation and the proton implantation are recovered and controlled to an appropriate amount of crystal defects. Therefore, for example, it is possible to improve a breakdown voltage and reduce a leakage current.

A semiconductor device includes; a semiconductor substrate including a major surface; a first diffusion region in the major surface in a main cell region; a second diffusion region in the major surface in a terminal region; an insulating film on the major surface and having first and second contact holes on the first and second diffusion regions respectively; a first electrode in the first contact hole and connected to the first diffusion region; a second electrode in the second contact hole and connected to the second diffusion region; a semi-insulating film covering the second electrode; and a third electrode on the first electrode, wherein the first and second electrodes are made of the same material, the first electrode does not completely fill the first contact hole, the second electrode completely fills the second contact hole, and the third electrode completely fills the first contact hole.

A monolithic, vertical, planar semiconductor structure with a number diodes having different intrinsic regions is described. The diodes have intrinsic regions of different thicknesses as compared to each other. In one example, the semiconductor structure includes an N-type silicon substrate, an intrinsic layer formed on the N-type silicon substrate, and a dielectric layer formed on the intrinsic layer. A number of openings are formed in the dielectric layer. Multiple anodes are sequentially formed into the intrinsic layer through the openings formed in the dielectric layer. For example, a first P-type region is formed through a first one the openings to a first depth into the intrinsic layer, and a second P-type region is formed through a second one of the openings to a second depth into the intrinsic layer. Additional P-type regions can be formed to other depths.

A semiconductor device has a silicon film for a diode formed on a semiconductor substrate via an insulating film, and first and second wirings formed on an upper layer of the silicon film. The silicon film has a p-type silicon region and a plurality of n-type silicon regions, and each of the plurality of n-type silicon regions is surrounded by the p-type silicon region in a plan view. The p-type silicon region is electrically connected to the first wiring, and the plurality of n-type silicon regions are electrically connected to the second wiring.

A power semiconductor device comprises a wafer (2) having an active region (AR) and a termination region (TR) laterally surrounding the active region; floating field rings in the termination region; a lifetime control region comprising defects reducing a carrier lifetime; and a protecting layer (6) on the wafer. The protecting layer covers the termination region and comprises a thin portion (61) and a thick portion (62) laterally surrounding the thin portion. The thick portion covers the floating field rings. The lifetime control region (5) extends in a lateral direction throughout the active region and in the termination region throughout a portion which is covered by the thin portion and not in a portion which is covered by the thick portion. According to a fabrication method the lifetime control region is formed by irradiating the wafer (2) with ions using the protecting layer (6) as an irradiation mask.