Alignment of a first micro-electronic component to a receiving surface of a second micro-electronic component is realized by a capillary force-induced self-alignment, combined with an electrostatic alignment. The latter is accomplished by providing at least one first electrical conductor line along the periphery of the first component, and at least one second electrical conductor along the periphery of the location on the receiving surface of the second component onto which the component is to be placed. The contact areas surrounded by the conductor lines are covered with a wetting layer. The electrical conductor lines may be embedded in a strip of anti-wetting material that runs along the peripheries to create a wettability contrast. The wettability contrast helps to maintain a drop of alignment liquid between the contact areas so as to obtain self-alignment by capillary force. By applying appropriate charges on the conductor lines, electrostatic self-alignment is realized, which improves the alignment obtained through capillary force and maintains the alignment during evaporation of the liquid.

Alignment of a first micro-electronic component to a receiving surface of a second micro-electronic component is realized by a capillary force-induced self-alignment, combined with an electrostatic alignment. The latter is accomplished by providing at least one first electrical conductor line along the periphery of the first component, and at least one second electrical conductor along the periphery of the location on the receiving surface of the second component onto which the component is to be placed. The contact areas surrounded by the conductor lines are covered with a wetting layer. The electrical conductor lines may be embedded in a strip of anti-wetting material that runs along the peripheries to create a wettability contrast. The wettability contrast helps to maintain a drop of alignment liquid between the contact areas so as to obtain self-alignment by capillary force. By applying appropriate charges on the conductor lines, electrostatic self-alignment is realized, which improves the alignment obtained through capillary force and maintains the alignment during evaporation of the liquid.

A chip package including a semiconductor substrate is provided. A recess is in the semiconductor substrate, wherein the semiconductor substrate has at least one spacer protruding from the bottom of the recess. A conducting layer is disposed on the semiconductor substrate and extends into the recess. A method for forming the chip package is also provided.

Alignment of a first micro-electronic component to a receiving surface of a second micro-electronic component is realized by a capillary force-induced self-alignment, combined with an electrostatic alignment. The latter is accomplished by providing at least one first electrical conductor line along the periphery of the first component, and at least one second electrical conductor along the periphery of the location on the receiving surface of the second component onto which the component is to be placed. The contact areas surrounded by the conductor lines are covered with a wetting layer. The electrical conductor lines may be embedded in a strip of anti-wetting material that runs along the peripheries to create a wettability contrast. The wettability contrast helps to maintain a drop of alignment liquid between the contact areas so as to obtain self-alignment by capillary force. By applying appropriate charges on the conductor lines, electrostatic self-alignment is realized, which improves the alignment obtained through capillary force and maintains the alignment during evaporation of the liquid.

A chip package including a semiconductor substrate is provided. A recess is in the semiconductor substrate and adjoins a side edge of the semiconductor substrate, wherein the semiconductor substrate has at least one spacer protruding from the bottom of the recess. A conducting layer is disposed on the semiconductor substrate and extends into the recess.

A heterogeneous chip stacking structure includes a first chip and a second chip. The first chip has a plurality of first convex pillar structures gradually formed outward from the first chip within a first predetermined time, and each of the first convex pillar structures has a first bonding pad portion. The second chip has a plurality of second convex pillar structures gradually formed outward from the second chip within a second predetermined time, and each of the second convex pillar structures has a second bonding pad portion. The first chip is configured to be disposed on the second chip, and the first bonding pad portions of the first convex pillar structures of the first chip and the second bonding pad portions of the second convex pillar structures of the second chip are in direct contact with each other and tightly coupled with each other, respectively.

A heterogeneous chip stacking method includes providing a first chip, in which the first chip has a plurality of first convex pillar structures, and each first convex pillar structure has a first bonding pad portion; providing a second chip different from the first chip, in which the second chip has a plurality of second convex pillar structures, and each second convex pillar structures having a second bonding pad portion; placing the first chip on the second chip, in which the first bonding pad portions of the first convex pillar structures and the second bonding pad portions of the second convex pillar structures are in direct contact with each other respectively; and then applying at least one of a predetermined pressure, a predetermined temperature, and a predetermined ultrasonic frequency to tightly couple the first bonding pad portions and the second bonding pad portions with each other respectively.

A heterogeneous chip stacking device includes a substrate carrying structure, a position-limiting substrate structure, a first cover structure, a second cover structure and a chip carrying structure. The position-limiting substrate structure is detachably disposed on the substrate carrying structure. The first cover structure is detachably disposed above the position-limiting substrate structure. The second cover structure is detachably disposed on the first cover structure. The chip carrying structure is movably disposed above the substrate carrying structure. The position-limiting substrate structure has a plurality of position-limiting grooves for respectively accommodating a plurality of first chips. The first cover structure is disposed on the first chips to press the first chips, and the first cover structure has a plurality of first openings configured to respectively accommodate a plurality of second chips. The second cover structure has a plurality of second openings configured to respectively communicate with the first openings.

An image sensing device includes an upper substrate configured to include a pixel region and a first peripheral region located outside the pixel region, a lower substrate configured to include a logic region and a second peripheral region located outside the logic region, the logic region configured to generate an image based on the electrical signals from the unit pixels, light reception elements disposed over the upper substrate and configured to transmit the incident light to the pixel region, an insulation layer disposed between the upper substrate and the lower substrate, a light reception alignment mark disposed in the first peripheral region and configured to assist positioning of the light reception elements, and an alignment pattern disposed between the first peripheral region and the second peripheral region and in the insulation layer. The alignment pattern is configured to absorb light used to measure the light reception alignment mark.

A semiconductor structure includes a first die and a plurality of first dummy pads. The first die includes a first interconnect structure and a first active pad electrically connected to the first interconnect structure. The first dummy pads laterally surround the first active pad and are electrically floating.