A method of fabricating a thin film battery may comprise: depositing a first stack of blanket layers on a substrate, the first stack comprising a cathode current collector, a cathode, an electrolyte, an anode and an anode current collector; laser die patterning the first stack to form one or more second stacks, each second stack forming the core of a separate thin film battery; blanket depositing an encapsulation layer over the one or more second stacks; laser patterning the encapsulation layer to open up contact areas to the anode current collectors on each of the one or more second stacks; blanket depositing a metal pad layer over the encapsulation layer and the contact areas; and laser patterning the metal pad layer to electrically isolate the anode current collectors of each of the one or more thin film batteries. For electrically non-conductive substrates, cathode contact areas are opened-up through the substrate.

The adhesion between metal foil serving as a current collector and a negative electrode active material is increased to enable long-term reliability. An electrode active material layer (including a negative electrode active material or a positive electrode active material) is formed over a base, a metal film is formed over the electrode active material layer by sputtering, and then the base and the electrode active material layer are separated at the interface therebetween; thus, an electrode is formed. The electrode active material particles in contact with the metal film are bonded by being covered with the metal film formed by the sputtering. The electrode active material is used for at least one of a pair of electrodes (a negative electrode or a positive electrode) in a lithium-ion secondary battery.

Various methods and apparatus relating to three-dimensional battery structures and methods of manufacturing them are disclosed and claimed. In certain embodiments, a three-dimensional battery comprises a battery enclosure, and a first structural layer within the battery enclosure, where the first structural layer has a first surface, and a first plurality of conductive protrusions extend from the first surface. A first plurality of electrodes is located within the battery enclosure, where the first plurality of electrodes includes a plurality of cathodes and a plurality of anodes, and wherein the first plurality of electrodes includes a second plurality of electrodes selected from the first plurality of electrodes, each of the second plurality of electrodes being in contact with the outer surface of one of said first plurality of conductive protrusions. Some embodiments relate to processes of manufacturing energy storage devices with or without the use of a backbone structure or layer.

A battery structure includes an anode packaging material having a first textured surface and an anode metal formed on the first textured surface. A separator is formed on the anode metal. A cathode packaging material includes a second textured surface. A cathode metal is formed on the second textured surface. An active cathode paste is formed on the cathode metal and brought into contact with the separator such that any gap is filled with electrolyte.

Protective layers in lithium-ion electrochemical cells, and associated electrodes and methods, are generally described. The protective layers may comprise lithium-ion-conductive inorganic ceramic materials, such as lithium oxide, lithium nitride, and/or lithium oxysulfide. The resulting lithium-ion electrochemical cells may exhibit enhanced performance, including reduced capacity fade rates and reduced self-discharge rates.

An object is to achieve a manufacturing apparatus that can fully automate the manufacturing of a solid-state secondary battery. A mask alignment chamber, a first transfer chamber connected to the mask alignment chamber, a second transfer chamber connected to the first transfer chamber, a first film formation chamber connected to the second transfer chamber, a third transfer chamber connected to the first transfer chamber, and a second film formation chamber connected to the third transfer chamber are included. The first film formation chamber has a function of forming a positive electrode active material layer or a negative electrode active material layer by a sputtering method, the second film formation chamber has a function of forming a solid electrolyte layer by co-evaporation of an organic complex of lithium and SiOx (0<x≤2), and a substrate is transferred between the mask alignment chamber and the first film formation chamber and between the mask alignment chamber and the second film formation chamber without being exposed to the air.

Metrology systems and processing methods for continuous lithium ion battery (LIB) anode pre-lithiation and solid metal anode protection are provided. In some embodiments, the metrology system integrates at least one complementary non-contact sensor to measure at least one of surface composition, coating thickness, and nanoscale roughness. The metrology system and processing methods can be used to address anode edge quality. The metrology system and methods can facilitate high quality and high yield closed loop anode pre-lithiation and anode protection layer deposition, alloy-type anode pre-lithiation stage control improves LIB coulombic efficiency, and anode coating with pinhole free and electrochemically active protection layers resist dendrite formation.

A method of manufacturing an anode structure (10) for a lithium battery is described. The method includes a first deposition of lithium on a first flexible support (21) to provide a lithium anode-first sublayer (12-1) with a first lithium surface (31); a second deposition of lithium on a second flexible support (22) to provide a lithium anode-second sublayer (12-2) with a second lithium surface (32); and combining the lithium anode-first sublayer (12-1) and the lithium anode-second sublayer (12-2) by pressing the first lithium surface and the second lithium surface together to form a lithium metal anode layer (12). Further described are a lithium battery layer stack with an anode structure manufactured according to the described method, and a vacuum deposition system for manufacturing an anode structure as described herein.

An electrode, in particular for micro-batteries, produced in a plurality of layers with intermediate steps of masking a first layer leaving some parts of the latter exposed in order next to produce a removal of material eliminating defects. After removal of the masking layer, the second layer can be formed. Other layers can then follow in the same way.

The present application relates to methods for depositing two-dimensional materials (e.g., MoS.sub.2, WS.sub.2, MoTe.sub.2, MoSe.sub.2, WSe.sub.2, BN, BN—C composite, and the like) onto lithium electrodes. Battery systems incorporating lithium metal electrodes coated with two-dimensional materials are also described. Methods may include intercalating the two-dimensional materials to facilitate flow of Lithium ions in and out of the lithium electrode. Two-dimensional material coated lithium electrodes provide for high cycling stability and significant performance improvements. Systems and methods further provide electrodes having carbon structures (e.g., carbon nanotubes (CNTs), graphene, porous carbon, free-standing 3D CNTs, etc.) with sulfur coatings.