H01L21/02461

III-V FINS BY ASPECT RATIO TRAPPING AND SELF-ALIGNED ETCH TO REMOVE ROUGH EPITAXY SURFACE
20210249410 · 2021-08-12 ·

A semiconductor device that includes a fin structure of a type III-V semiconductor material that is substantially free of defects, and has sidewalls that are substantially free of roughness caused by epitaxially growing the type III-V semiconductor material abutting a dielectric material. The semiconductor device further includes a gate structure present on a channel portion of the fin structure; and a source region and a drain region present on opposing sides of the gate structure.

INFRARED DETECTING DEVICE AND INFRARED DETECTING SYSTEM INCLUDING THE SAME
20210242362 · 2021-08-05 · ·

Provided are an infrared detecting device and an infrared detecting system including the infrared detecting device. The infrared detecting device includes at least one infrared detector, and the at least one infrared detector includes a substrate, a buffer layer, and at least one light absorbing portion. The buffer layer includes a superlattice structure.

Preparation of compound semiconductor substrate for epitaxial growth via non-destructive epitaxial lift-off

A method is presented for fabricating a substrate comprised of a compound semiconductor. The method includes: growing a sacrificial layer onto a parent substrate; growing an epitaxial template layer on the sacrificial layer; removing the template layer from the parent substrate using an epitaxial lift-off procedure; and bonding the removed template layer to a host substrate using Van der Waals forces and thereby forming a compound semiconductor substrate.

Method for fabrication of orientation-patterned templates on common substrates

A method for preparation of orientation-patterned (OP) templates comprising the steps of: depositing a first layer of a first material on a common substrate by a far-from-equilibrium process; and depositing a first layer of a second material on the first layer of the first material by a close-to-equilibrium process, wherein a first assembly is formed. The first material and the second material may be the same material or different materials. The substrate material may be Al.sub.2O.sub.3 (sapphire), silicon (Si), germanium (Ge), GaAs, GaP, GaSb, InAs, InP, CdTe, CdS, CdSe, or GaSe. The first material deposited on the common substrate may be one or more electronic or optical binary materials from the group consisting of AlN, GaN, GaP, InP, GaAs, InAs, AlAs, ZnSe, GaSe, ZnTe, CdTe, HgTe, GaSb, SiC, CdS, CdSe, or their ternaries or quaternaries. The far-from-equilibrium process is one of MOCVD and MBE, and the close-to-equilibrium process is HVPE.

Pnictide nanocomposite structure for lattice stabilization

A layered structure for semiconductor application is described herein. The layered structure includes III-V semiconductor and uses pnictide nanocomposites to control lattice distortion in a series of layers. The distortion is tuned to bridge lattice mismatch between binary III-V semiconductors. In some embodiments, the layered structure further includes dislocation filters.

HETEROSTRUCTURE SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD

Disclosed is a semiconductor device and a method of fabricating the semiconductor device. The semiconductor device comprises a first III-V compound semiconductor layer having a first material structure, a second semiconductor layer having a second material structure and a third semiconductor layer having a third material structure. An interface between the first semiconductor layer and the second semiconductor layer consists of at least one corresponding crystalline terminating oxide layer of the first semiconductor layer, and an interface between the second semiconductor layer and the third semiconductor layer comprises at least one corresponding crystalline terminating oxide layer of a III-V compound semiconductor layer.

SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
20210198752 · 2021-07-01 ·

The present disclosure provides a semiconductor structure, including a first semiconductor device having a first surface and a second surface, the second surface being opposite to the first surface, a semiconductor substrate over the first surface of the first semiconductor device, and a III-V etch stop layer in contact with the second surface of the first semiconductor device. The present disclosure also provides a manufacturing method of a semiconductor structure, including providing a temporary substrate having a first surface, forming a III-V etch stop layer over the first surface, forming a first semiconductor device over the etch stop layer, and removing the temporary substrate by an etching operation and exposing a surface of the III-V etch stop layer.

Heterostructure semiconductor device and manufacturing method

Disclosed is a semiconductor device and a method of fabricating the semiconductor device. The semiconductor device comprises a first III-V compound semiconductor layer having a first material structure, a second semiconductor layer having a second material structure and a third semiconductor layer having a third material structure. An interface between the first semiconductor layer and the second semiconductor layer consists of at least one corresponding crystalline terminating oxide layer of the first semiconductor layer, and an interface between the second semiconductor layer and the third semiconductor layer comprises at least one corresponding crystalline terminating oxide layer of a III-V compound semiconductor layer.

METHOD FOR GROWING III-V COMPOUND SEMICONDUCTORS ON SILICON-ON-INSULATORS
20210265162 · 2021-08-26 ·

The present disclosure relates to a method for growing III-V compound semiconductors on silicon-on-insulators. Starting from {111}-oriented Si seed surfaces between a buried oxide layer and a patterned mask layer, the III-V compound semiconductor is grown within lateral trenches by metal organic chemical vapor deposition such that the non-defective portion of the III-V compound semiconductor formed on the buried oxide layer is substantially free of crystalline defects and has high crystalline quality.

III-V fins by aspect ratio trapping and self-aligned etch to remove rough epitaxy surface

A semiconductor device that includes a fin structure of a type III-V semiconductor material that is substantially free of defects, and has sidewalls that are substantially free of roughness caused by epitaxially growing the type III-V semiconductor material abutting a dielectric material. The semiconductor device further includes a gate structure present on a channel portion of the fin structure; and a source region and a drain region present on opposing sides of the gate structure.