H01L21/02653

GERMANIUM CONTAINING NANOWIRES AND METHODS FOR FORMING THE SAME
20190326394 · 2019-10-24 ·

Provided herein are tapered nanowires that comprise germanium and gallium, as well as methods of forming the same. The described nanowires may also include one or more sections of a second semiconductor material. Methods of the disclosure may include vapor-liquid-solid epitaxy with a gallium catalyst. The described methods may also include depositing a gallium seed on a surface of a substrate by charging an area of the substrate using an electron beam, and directing a gallium ion beam across the surface of the substrate.

Method for the synthesis of catalyst doped ZnS nanostructures

A method of synthesizing catalyst doped ZnS nanostructures including preparing a silicon substrate by vacuum depositing a metal catalyst nanostructure on an ultrathin silicon oxide layer, doping a zinc sulfide (ZnS) nanostructure with a catalyst of the metal catalyst nanostructure including at least one of gold (Au), manganese (Mn), and tin (Sn), and modulating ZnS intrinsic defects by the concentration of the catalyst and the size of the ZnS and metal catalyst nanostructures, in which the catalyst is dissolved in a nanowire of the ZnS nanostructure during growth, the concentration of the catalyst in the nanowire is dependent on the size of the catalyst, and the doping is tuned by growth conditions.

Heterogeneous integration of 3D SI and III-V vertical nanowire structures for mixed signal circuits fabrication
10319642 · 2019-06-11 · ·

A method of forming Si or Ge-based and III-V based vertically integrated nanowires on a single substrate and the resulting device are provided. Embodiments include forming first trenches in a Si, Ge, III-V, or Si.sub.xGe.sub.1-x substrate; forming a conformal SiN, SiO.sub.xC.sub.yN.sub.z layer over side and bottom surfaces of the first trenches; filling the first trenches with SiO.sub.x; forming a first mask over portions of the Si, Ge, III-V, or Si.sub.xGe.sub.1-x substrate; removing exposed portions of the Si, Ge, III-V, or Si.sub.xGe.sub.1-x substrate, forming second trenches; forming III-V, III-V.sub.xM.sub.y, or Si nanowires in the second trenches; removing the first mask and forming a second mask over the III-V, III-V.sub.xM.sub.y, or Si nanowires and intervening first trenches; removing the SiO.sub.x layer, forming third trenches; and removing the second mask.

Synthesis of metal oxide surfaces and interfaces with crystallographic control using solid-liquid-vapor etching and vapor-liquid-solid growth

The present invention provides integrated nanostructures comprising a single-crystalline matrix of a material A containing aligned, single-crystalline nanowires of a material B, with well-defined crystallographic interfaces are disclosed. The nanocomposite is fabricated by utilizing metal nanodroplets in two subsequent catalytic steps: solid-liquid-vapor etching, followed by vapor-liquid-solid growth. The first etching step produces pores, or negative nanowires within a single-crystalline matrix, which share a unique crystallographic direction, and are therefore aligned with respect to one another. Further, since they are contained within a single, crystalline, matrix, their size and spacing can be controlled by their interacting strain fields, and the array is easily manipulated as a single entityaddressing a great challenge to the integration of freestanding nanowires into functional materials. In the second, growth, step, the same metal nanoparticles are used to fill the pores with single-crystalline nanowires, which similarly to the negative nanowires have unique growth directions, and well-defined sizes and spacings. The two parts of this composite behave synergistically, since this nanowire-filled matrix contains a dense array of well-defined crystallographic interfaces, in which both the matrix and nanowire materials convey functionality to the material. The material of either one of these components may be chosen from a vast library of any material able to form a eutectic alloy with the metal in question, including but not limited to every material thus far grown in nanowire form using the ubiquitous vapor-liquid-solid approach. This has profound implications for the fabrication of any material intended to contain a functional interface, since high interfacial areas and high quality interfacial structure should be expected. Technologies to which this simple approach could be applied include but are not limited to p-n junctions of solar cells, battery electrode arrays, multiferroic materials, and plasmonic materials.

Porous substrates, articles, systems and compositions comprising nanofibers and methods of their use and production
10279341 · 2019-05-07 · ·

Porous and/or curved nanofiber bearing substrate materials are provided having enhanced surface area for a variety of applications including as electrical substrates, semipermeable membranes and barriers, structural lattices for tissue culturing and for composite materials, production of long unbranched nanofibers, and the like. A method of producing nanofibers is disclosed including providing a plurality of microparticles or nanoparticles such as carbon black particles having a catalyst material deposited thereon, and synthesizing a plurality of nanofibers from the catalyst material on the microparticles or nanoparticles. Compositions including carbon black particles having nanowires deposited thereon are further disclosed.

Methods for the continuous, large-scale manufacture of functional nanostructures

A method for forming nanostructures including introducing a hollow shell into a reactor. The hollow shell has catalyst nanoparticles exposed on its interior surface. The method also includes introducing a precursor into the reactor to grow nanostructures from the interior surface of the hollow shell from the catalyst nanoparticles.

ELECTROSTATIC CONTROL OF METAL WETTING LAYERS DURING DEPOSITION
20190112708 · 2019-04-18 ·

There is disclosed a system for the electrostatic control of a metal wetting layer during deposition and a method of electrostatically controlling a metal wetting layer during deposition using a deposition system. In one example, control of the metal wetting layer is provided by changing or applying an electrostatic field acting on a deposited material or acting on a substrate on which a material is deposited. In another example, control is of the thickness of the metal wetting layer. In another example, control is of the presence or absence of the metal wetting layer. The metal wetting layer can be a liquid metal or liquid metal alloy, for example the metal wetting layer could be Boron, Aluminium, Indium, Gallium or Thallium. In another example, control is of the thickness, or presence, of a Gallium wetting layer during GaN film growth.

Nanowire device having graphene top and bottom electrodes and method of making such a device

A composition of matter comprising a plurality of nanowires on a substrate, said nanowires having been grown epitaxially on said substrate in the presence of a metal catalyst such that a catalyst deposit is located at the top of at least some of said nanowires, wherein said nanowires comprise at least one group III-V compound or at least one group II-VI compound or comprises at least one non carbon group IV element; and wherein a graphitic layer is in contact with at least some of the catalyst deposits on top of said nanowires.

Methods of growing heteroepitaxial single crystal or large grained semiconductor films and devices thereon
10199529 · 2019-02-05 · ·

A method is disclosed for making semiconductor films from a eutectic alloy comprising a metal and a semiconductor. Through heterogeneous nucleation said film is deposited at a deposition temperature on flexible substrates, such as glass. Specifically said film is vapor deposited at a fixed temperature in said deposition temperature where said deposition temperature is above a eutectic temperature of said eutectic alloy and below a temperature at which the substrate softens. Such films are nearly to entirely free of metal impurities and have widespread application in the manufacture and benefit of photovoltaic and display technologies.

Methods of growing heteroepitaxial single crystal or large grained semiconductor films and devices thereon
10199518 · 2019-02-05 · ·

A method is provided for making smooth crystalline semiconductor thin-films and hole and electron transport films for solar cells and other electronic devices. Such semiconductor films have an average roughness of 3.4 nm thus allowing for effective deposition of additional semiconductor film layers such as perovskites for tandem solar cell structures which require extremely smooth surfaces for high quality device fabrication.