Ion implantation can be used to define a thermal dissipation path that allows for better thermal isolation between devices in close proximity on a microelectronics chip, thus providing a means for higher device density combined with better performance.

A multilayer composite structure and a method of preparing a multilayer composite structure are provided. The multilayer composite structure comprises a semiconductor handle substrate having a minimum bulk region resistivity of at least about 500 ohm-cm and comprises a region of nitrogen-reacted nanovoids in the front surface region; a silicon dioxide layer on the surface of the semiconductor handle substrate; a dielectric layer in contact with the silicon dioxide layer; and a semiconductor device layer in contact with the dielectric layer.

Considering ease of electrical conduction tests and the like, electrodes provided mainly above an active region are desirably continuous on a single plane. A semiconductor device is provided, including: a semiconductor substrate; a first top surface electrode and a second top surface electrode that are provided above a top surface of the semiconductor substrate and contain a metal material; and a first connecting portion that electrically connects to the first top surface electrode and contains a semiconductor material, wherein the second top surface electrode has: a first region and a second region that are arranged being separated from each other with the first connecting portion as a boundary in a top view of the semiconductor substrate, and a second connecting portion that connects the first region and the second region above the first connecting portion.

A method for forming a semiconductor device includes incorporating recombination center atoms into a semiconductor substrate. The method further includes, after incorporating the recombination center atoms into the semiconductor substrate, implanting noble gas atoms into a doping region of a diode structure and/or a transistor structure, the doping region being arranged at a surface of the semiconductor substrate.

Ion implantation can be used to define a thermal dissipation path that allows for better thermal isolation between devices in close proximity on a microelectronics chip, thus providing a means for higher device density combined with better performance.

A multilayer composite structure and a method of preparing a multilayer composite structure are provided. The multilayer composite structure comprises a semiconductor handle substrate having a minimum bulk region resistivity of at least about 500 ohm-cm and comprises a region of nitrogen-reacted nanovoids in the front surface region; a silicon dioxide layer on the surface of the semiconductor handle substrate; a dielectric layer in contact with the silicon dioxide layer; and a semiconductor device layer in contact with the dielectric layer.

There is provided a semiconductor device comprising: a semiconductor substrate; an emitter region of a first conductivity type provided inside the semiconductor substrate; a base region of a second conductivity type provided below the emitter region inside the semiconductor substrate; an accumulation region of the first conductivity type provided below the base region inside the semiconductor substrate, and containing hydrogen as an impurity; and a trench portion provided to pass through the emitter region, the base region and the accumulation region from an upper surface of the semiconductor substrate.

Considering ease of electrical conduction tests and the like, electrodes provided mainly above an active region are desirably continuous on a single plane. A semiconductor device is provided, including: a semiconductor substrate; a first top surface electrode and a second top surface electrode that are provided above a top surface of the semiconductor substrate and contain a metal material; and a first connecting portion that electrically connects to the first top surface electrode and contains a semiconductor material, wherein the second top surface electrode has: a first region and a second region that are arranged being separated from each other with the first connecting portion as a boundary in a top view of the semiconductor substrate, and a second connecting portion that connects the first region and the second region above the first connecting portion.

A small semiconductor device having a diode forward voltage less likely to change due to a gate potential is provided. An anode and an upper IGBT structure (emitter and body) are provided in a range in the substrate exposed at the upper surface. A trench, a gate insulating film, and a gate electrode extend along a border of the anode and the upper IGBT structure. Cathode and collector are provided in a range in the substrate exposed at the lower surface. A drift is provided between an upper structure and a lower structure. A crystal defect region extends across the drift above the cathode and the drift above the collector. When a thickness of the substrate is defined as x [m] and a width of a portion of the crystal defect region that protrudes above the cathode is defined as y [m], y0.007x21.09x+126 is satisfied.

Tunneling field-effect transistors including silicon, germanium or silicon germanium channels and III-N source regions are provided for low power operations. A broken-band heterojunction is formed by the source and channel regions of the transistors. Fabrication methods include selective anisotropic wet-etching of a silicon substrate followed by epitaxial deposition of III-N material and/or germanium implantation of the substrate followed by the epitaxial deposition of the III-N material.