H01L2021/60097

Vertically integrated wafers with thermal dissipation
09812428 · 2017-11-07 · ·

Technologies are generally described related to three-dimensional integration of integrated circuits (ICs) with spacing for heat dissipation. According to some examples, a self-aligned silicide may be formed in a temporary silicon layer and removed subsequent to bonding of the wafers to achieve improved contact between the combined ICs and enhanced heat dissipation through added spacing between the ICs.

VERTICALLY INTEGRATED WAFERS WITH THERMAL DISSIPATION
20170040295 · 2017-02-09 · ·

Technologies are generally described related to three-dimensional integration of integrated circuits (ICs) with spacing for heat dissipation. According to some examples, a self-aligned silicide may be formed in a temporary silicon layer and removed subsequent to bonding of the wafers to achieve improved contact between the combined ICs and enhanced heat dissipation through added spacing between the ICs.

TUNABLE LOW-COST PASSIVATION COATING FOR FACILITATING FLUXLESS BONDING OF COPPER SOLDER INTERCONNECTS IN FLIP CHIP ASSEMBLY

The invention provides improved techniques for bonding copper to solder or other types of flip chip devices using a passivation coating on copper. The surface of a substrate is cleaned prior to mounting a flip chip device onto the substrate. The substrate is rinsed to remove residual artifacts remaining on the surface subsequent to the cleaning. Subsequent to the rinsing, a protective coating is applied to the surface of the substrate to produce a coated substrate. Copper pillars with solder caps extending from the flip chip device are bonded to metallic features on the surface of the coated substrate.