Patent classifications
H01L21/76267
Back-gate effect control via doping
Methods and structures for mitigating back-gate effects in a radio frequency (RF) silicon-on-insulator (SOI) substrate, RF-SOI, are presented. According to one aspect, a first implant or junction is formed in a region of a trap-rich layer (TRL) of the RF-SOI that is located below a first circuit/device to protect. The first implant or junction is fully contained within the TRL. A planar surface area of the first implant and/or junction fully contains a projection of a planar surface area of the first circuit and/or device. The first implant or junction is biased via a through BOX contact (TBC) that penetrates the BOX layer at a shallow trench isolation region formed in the RF-SOI. According to another aspect, a second implant or junction is formed in a region of the TRL below a second circuit/device. The first and second implants or junctions are disjoint and separated by an undoped region of the TRL.
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
A method for manufacturing a semiconductor device includes forming an electrode on a structure body. The structure body includes a first insulating film, a second insulating film, and a semiconductor part. The electrode includes a first electrode part and a second electrode part. The first electrode part extends in a first direction and travers a region directly above the semiconductor part. The second electrode part extends from the first electrode part in a second direction. The method includes forming a first semiconductor part. The method includes forming a first mask on the structure body. The method includes forming a second semiconductor part in a portion of the first semiconductor part by using the first mask and the electrode as a mask to ion-implant an impurity. The method includes removing the first mask. The method includes forming a contact connected to the one part.
BACK-GATE EFFECT CONTROL VIA DOPING
Methods and structures for mitigating back-gate effects in a radio frequency (RF) silicon-on-insulator (SOI) substrate, RF-SOI, are presented. According to one aspect, a first implant or junction is formed in a region of a trap-rich layer (TRL) of the RF-SOI that is located below a first circuit/device to protect. The first implant or junction is fully contained within the TRL. A planar surface area of the first implant and/or junction fully contains a projection of a planar surface area of the first circuit and/or device. The first implant or junction is biased via a through BOX contact (TBC) that penetrates the BOX layer at a shallow trench isolation region formed in the RF-SOI. According to another aspect, a second implant or junction is formed in a region of the TRL below a second circuit/device. The first and second implants or junctions are disjoint and separated by an undoped region of the TRL.