A semiconductor device includes a first conductivity-type substrate, and a cell region including: a second conductivity type deep well; first and second non-deep wells having the second conductivity-type, the first and second non-deep wells being in corresponding first and second portions of the substrate, the first and second portions of the substrate being in the deep well; and first, second, third and fourth transistor-regions. The first and second transistor-regions are correspondingly in the first and second non-deep wells and include first conductivity-type first transistors. The third and fourth transistor-regions are in the third and fourth portions of the substrate which are in the deep well, and include second transistors having the second conductivity-type. The first transistor-region is configured for a first power domain. The second, third and fourth transistor-regions are configured for a second power domain that is different than the first power domain.

There are provided a semiconductor device, a method of manufacturing the same, and an electronic device including the device. According to an embodiment, the semiconductor device may include a substrate, and a first device and a second device formed on the substrate. Each of the first device and the second device includes a first source/drain layer, a channel layer and a second source/drain layer stacked on the substrate in sequence, and also a gate stack surrounding a periphery of the channel layer. The channel layer of the first device and the channel layer of the second device are substantially co-planar.

A method of forming a semiconductor structure. A first sacrificial gate is formed on a substrate. A spacer is formed on a sidewall of the first sacrificial gate. In the substrate, adjacent to the first sacrificial gate, a source region and a drain region are formed. A channel region is formed between the source region and the drain region. The first sacrificial gate is removed, and a gate trench is formed on the channel region between the spacers. The substrate is etched via the gate trench, thereby forming a recessed trench between the source region and the drain region, and extending into the substrate. The recessed trench has a hexagonal cross-sectional profile. A stress inducing material layer is then formed in the recessed trench. A channel layer is epitaxially grown on the stress inducing material layer. A gate structure is formed on the channel layer.

Aspects of the present disclosure provide a 3D semiconductor apparatus and a method for fabricating the same. The 3D semiconductor apparatus can include a first semiconductor device including sidewall structures of a first gate metal sandwiched by dielectric layers, a first epitaxially grown channel surrounded by the sidewall structures; a second semiconductor device formed on the same substrate adjacent to the first semiconductor device that includes sidewall structures of a second gate metal sandwiched by dielectric layers, a second epitaxially grown channel surrounded by the sidewall structures; a salicide layer formed between the first and second semiconductor devices and metallization contacting each of the S/D regions and the gate regions. The 3D semiconductor apparatus may include a P+ epitaxially grown channel formed on the same substrate adjacent to an N+ epitaxially grown channel, the P+ epitaxially grown channel separated from N+ epitaxially grown channel by a diffusion break.

A semiconductor device including a first source/drain region at a lower portion thereof, a second source/drain region at an upper portion thereof, a channel region between the first source/drain region and the second source/drain region and close to peripheral surfaces thereof, and a body region inside the channel region. The semiconductor device may further include a gate stack formed around a periphery of the channel region.

The disclosed technology provides a semiconductor device, a manufacturing method thereof, and an electronic device including the device. An example semiconductor device includes a substrate; a first device and a second device on the substrate. Each of the first device and the second device include a first source/drain layer, a channel layer, and a second source layer that are sequentially stacked, from bottom to top, on the substrate, and a gate stack around at least a part of an outer periphery of the channel layer, with sidewalls of the respective channel layers of the first device and the second device extending at least partially along different crystal planes or crystal plane families.

A semiconductor device includes a semiconductor layer having a first doped region, a second doped region, and a third doped region. Each of the regions has the same dopant type. The first doped region extends further into a thickness of the semiconductor layer than the second or third doped regions, and the third doped region provides a conductive pathway between the first doped region and the second doped region. The semiconductor device also includes a first transistor and a second transistor. The first doped region is beneath the first transistor and the second doped region is beneath the second transistor. By using a commonly doped well region that includes each of the first, second, and third doped regions, at least the first and second transistors can be integrated closer together which lowers the overall device footprint. The transistors may be FETs, or other transistor technology.

In an integrated circuit supporting complementary metal oxide semiconductor (CMOS) integrated circuits, latch-up immunity is supported by surrounding a hot n-well with an n-well strap spaced from the hot n-well by a specified distance in accordance with design rules. The n-well strap is positioned between the hot n-well and other n-well or n-type diffusion structures.

A method of forming a semiconductor structure. A first sacrificial gate is formed on a substrate. A spacer is formed on a sidewall of the first sacrificial gate. In the substrate, adjacent to the first sacrificial gate, a source region and a drain region are formed. A channel region is formed between the source region and the drain region. The first sacrificial gate is removed, and a gate trench is formed on the channel region between the spacers. The substrate is etched via the gate trench, thereby forming a recessed trench between the source region and the drain region, and extending into the substrate. The recessed trench has a hexagonal cross-sectional profile. A stress inducing material layer is then formed in the recessed trench. A channel layer is epitaxially grown on the stress inducing material layer. A gate structure is formed on the channel layer.

In a semiconductor integrated circuit device using buried power lines, a first standard cell includes a buried power line extending in the X direction to supply VDD1, and a transistor is supplied with VDD1 from the buried power line. A second standard cell includes a buried power line extending in the X direction to supply VDD1 and an upper-layer power line formed in a layer above the buried power line to supply VDD. A transistor of the second standard cell is supplied with VDD from the upper-layer power line. The upper-layer power line overlaps the buried power line in planar view.