The embodiments described herein are directed to a method for reducing fin oxidation during the formation of fin isolation regions. The method includes providing a semiconductor substrate with an n-doped region and a p-doped region formed on a top portion of the semiconductor substrate; epitaxially growing a first layer on the p-doped region; epitaxially growing a second layer different from the first layer on the n-doped region; epitaxially growing a third layer on top surfaces of the first and second layers, where the third layer is thinner than the first and second layers. The method further includes etching the first, second, and third layers to form fin structures on the semiconductor substrate and forming an isolation region between the fin structures.

The embodiments described herein are directed to a method for reducing fin oxidation during the formation of fin isolation regions. The method includes providing a semiconductor substrate with an n-doped region and a p-doped region formed on a top portion of the semiconductor substrate; epitaxially growing a first layer on the p-doped region; epitaxially growing a second layer different from the first layer on the n-doped region; epitaxially growing a third layer on top surfaces of the first and second layers, where the third layer is thinner than the first and second layers. The method further includes etching the first, second, and third layers to form fin structures on the semiconductor substrate and forming an isolation region between the fin structures.

An integrated circuit includes a first cell, a second cell, a buffer zone and a first power rail. The first cell includes a first set of fins extending in a first direction. Each fin of the first set of fins corresponds to a transistor of a first set of transistors. The second cell includes a second set of fins extending in the first direction. Each fin of the second set of fins corresponds to a transistor of a second set of transistors. The second set of fins is separated from the first set of fins in a second direction. The buffer zone is between the first cell and the second cell. The first power rail extends in the first direction, and overlaps at least the buffer zone. The first power rail is in a first metal layer, and is configured to supply a first voltage.

A semiconductor device structure includes a first S/D feature over a first device region of a substrate, a plurality of first semiconductor layers over the first device region of the substrate, and each first semiconductor layer is in contact with the first source/drain feature, a first gate electrode layer surrounding a portion of each first semiconductor layer, and a first dielectric spacer contacting the first S/D feature, the first dielectric spacer disposed between and in contact with two first semiconductor layers of the plurality of the first semiconductor layers. The substrate comprises a first dopant region underneath the first S/D feature and a second dopant region underneath first gate electrode layer and radial outwardly of the first dopant region, the first dopant region comprising first dopants having a first conductivity type and a first dopant concentration and the second dopant region comprising the first dopants having a second dopant concentration less than the first dopant concentration.

Wells formed in a semiconductor device can be discharged faster in a transition from a stand-by state to an active state. The semiconductor device includes an n-type well applied, in an active state, with a power supply voltage and, in a stand-by state, with a voltage higher than the power supply voltage, a p-type well applied, in the active state, with a ground voltage and, in the stand-by state, with a voltage lower than the ground voltage, and a path which, in a transition from the stand-by state to the active state, electrically couples the n-type well and the p-type well.

A tunnel field effect transistor includes a source region and a drain region, positioned on a substrate, a channel region positioned between the source region and the drain region and having a first length in a first direction, a gate electrode positioned on the channel region, and a gate insulating layer positioned between the channel region and the gate electrode, wherein the source region is doped with impurities of a first conductivity type and the drain region is doped with impurities of a second conductivity type that is different from the first conductivity type, and one of the source region and the drain region includes an extension region extending toward the other region, the extension region being positioned under the channel region to form a constant current independent of a gate voltage of the gate electrode.

Disclosed are a semiconductor apparatus, a manufacturing method therefor, and an electronic equipment comprising the semiconductor apparatus. According to the embodiments, the semiconductor apparatus includes a first device and a second device on a substrate that are opposite each other. The first device and the second device each include a channel portion, source/drain portions on both sides of the channel portion that are connected to the channel portion, and a gate stack overlapping the channel portion. The channel portion includes a first portion extending in a vertical direction relative to the substrate and a second portion extending from the first portion in a transverse direction relative to the substrate. The second portion of the channel portion of the first device and the second portion of the channel portion of the second device extend toward or away from each other.

Embodiments described herein may be related to apparatuses, processes, and techniques related to well biasing using a buried power rail (BPR) within a circuit structure. Embodiments include using a silicide material between the BPR and a well, where the silicide material provides ohmic contact between the BPR and the well. Other embodiments may be described and/or claimed.

An integrated circuit (IC) structure includes a continuous well including first through third well portions. The continuous well is one of an n-well or a p-well, the first well portion extends in a first direction, the second well portion extends from the first well portion in a second direction perpendicular to the first direction, and the third well portion extends from the first well portion in the second direction parallel to the second well portion.

An IC includes a first and second active areas (AA) with a second conductivity type, a source and drain region, and an LDD extension to the source and drain in the first AA having a first conductivity type. A first bent-gate transistor includes a first gate electrode over the first AA extending over the corresponding LDD. The first gate electrode includes an angled portion that crosses the first AA at an angle of 45° to 80°. A second transistor includes a second gate electrode over the second AA extending over the corresponding LDD including a second gate electrode that can cross an edge of the second AA at an angle of about 90°. A first pocket distribution of the second conductivity type provides a pocket region under the first gate electrode. A threshold voltage of the first bent-gate transistor is ≥30 mV lower as compared to the second transistor.