Patent classifications
H01L29/7455
Enhancements to cell layout and fabrication techniques for MOS-gated devices
An insulated gate turn-off (IGTO) device, formed as a die, has a layered structure including a p+ layer (e.g., a substrate), an n epi layer, a p-well, trenched insulated gate regions formed in the p-well, and n+ regions between the gate regions, so that vertical NPN and PNP transistors are formed. The device may be formed of a matrix of cells or may be interdigitated. To turn the device on, a positive voltage is applied to the gate, referenced to the cathode. The cells further contain a vertical p-channel MOSFET, for rapidly turning the device off. The p-channel MOSFET may be made a depletion mode device by implanting boron ions at an angle into the trenches to create a p-channel. This allows the IGTO device to be turned off with a zero gate voltage while in a latch-up condition, when the device is acting like a thyristor.
INSULATED GATE TURN-OFF DEVICE WITH DESIGNATED BREAKDOWN AREAS BETWEEN GATE TRENCHES
An insulated gate turn-off (IGTO) device, formed as a die, has a layered structure including a p+ layer (e.g., a substrate), an n drift layer, a p-well, trenched insulated gates formed in the p-well, and n+ regions between at least some of the gates, so that vertical npn and pnp transistors are formed. A cathode electrode is on top, and an anode electrode is on the bottom of the substrate. The device is formed of a matrix of cells. To turn the device on, a positive voltage is applied to the gates, referenced to the cathode electrode. To direct high energy electrons away from a gate oxide layer on the sidewalls of the trenches, boron is implanted between the trenches so p+ regions are formed in the mesas of the less-doped p-well. The p+ regions break down during an over-voltage event before the p-well breaks down in the mesas.
LATERAL INSULATED GATE TURN-OFF DEVICE WITH INDUCED EMITTER
A lateral insulated gate turn-off device includes an n-drift layer, a p-well formed in the n drift layer, a shallow n+ type region formed in the well, a shallow p+ type region formed in the well, a cathode electrode shorting the n+ type region to the p+ type region, a trenched first gate extending through the n+ type region and into the well, a p+ type anode region laterally spaced from the well, an anode electrode electrically contacting the p+ type anode region, and a trenched second gate extending from the p+ type anode region into the n-drift layer. For turning the device on, a positive voltage is applied to the first gate the reduce the base width of the npn transistor, and a negative voltage is applied to the second gate to effectively extend the p+ emitter of the pnp transistor further into the n-drift layer to improve performance.
Semiconductor device and method of manufacturing same
A semiconductor device includes a first barrier film covering the main surface of the active region and the insulating film layer, the first barrier film having an ohmic contact hole that exposes a contact portion of the ohmic contact formation region within the window of the insulating film layer; a base contact layer filled into the ohmic contact hole and making ohmic contact with the contact portion of the ohmic contact formation region; a second barrier film made of titanium, covering the base contact layer and the first barrier film; and a third barrier film made of titanium oxide and titanium nitride, covering a surface of the second barrier film.
Compositions and methods for marking hydrocarbon compositions with non-mutagenic dyes
The disclosure provides dyes for marking hydrocarbon compositions. More particularly, the disclosure relates to non-mutagenic dyes for marking hydrocarbon compositions.
Vertical insulated gate turn-off thyristor with intermediate p+ layer in p-base formed using epitaxial layer
An insulated gate turn-off thyristor has a layered structure including a p+ layer (e.g., a substrate), an n-epi layer, a p-well, vertical insulated gate regions formed in the p-well, and an n layer over the p-well and between the gate regions, so that vertical npn and pnp transistors are formed. After forming the p-well, boron ions are implanted into the exposed surface of the p-well to form a p+ region. The n-epi layer is then grown over the p-well and the p+ region, and the boron in the p+ region is diffused upward into the n-epi layer and downward to form an intermediate p+ region. The p-well's highly doped intermediate region enables improvement in the npn transistor efficiency as well as enabling more independent control over the characteristics of the n-type layer (emitter) and the overall dopant concentration and thickness of the p-type base to optimize the thyristor's performance.
Insulated gate semiconductor device and method of manufacturing same
An insulated gate semiconductor device includes p.sup.+ gate bottom protection regions embedded in a drift layer at the bottoms of trenches that goes through n.sup.+ source regions and p-type base regions, and p.sup.+ base bottom embedded regions embedded in the drift layer below the base regions. The base bottom embedded regions have trapezoidal shapes due to a channeling phenomenon, and the bottom surfaces of the base bottom embedded regions are deeper than the bottom surfaces of the gate bottom protection regions.
ELECTRIC FIELD SHIELDING IN SILICON CARBIDE METAL-OXIDE-SEMICONDUCTOR (MOS) DEVICE CELLS USING BODY REGION EXTENSIONS
The subject matter disclosed herein relates to semiconductor power devices, such as silicon carbide (SiC) power devices. In particular, the subject matter disclosed herein relates to shielding regions in the form of body region extensions for that reduce the electric field present between the well regions of neighboring device cells of a semiconductor device under reverse bias. The disclosed body region extensions have the same conductivity-type as the body region and extend outwardly from the body region and into the JFET region of a first device cell such that a distance between the body region extension and a region of a neighboring device cell having the same conductivity type is less than or equal to the parallel JFET width. The disclosed shielding regions enable superior performance relative to a conventional stripe device of comparable dimensions, while still providing similar reliability (e.g., long-term, high-temperature stability at reverse bias).
Enclosed gate runner for eliminating miller turn-on
A semiconductor structure is provided, which includes a semiconductor device, a first conductive layer, and a gate runner. The semiconductor device includes an upper surface, a gate terminal, a source terminal, and a drain terminal. The first conductive layer is deposited on the upper surface and coupled to the source terminal. The gate runner is overlapped with the first conductive layer and coupled to the gate terminal. The gate runner and the first conductive layer are configured to contribute a parasitic capacitance between the gate terminal and the source terminal.
Dual fin silicon controlled rectifier (SCR) electrostatic discharge (ESD) protection device
The present disclosure relates to a Dual Fin SCR device having two parallel fins on which cathode, anode, n- and p-type triggering taps are selectively doped, wherein one Fin (or group of parallel Fins) comprises anode and n-tap, and other Fin (or group of parallel Fins) comprises cathode and p-tap. As key regions of the proposed SCR (anode and cathode), which carry majority of current after triggering, are placed diagonally, they provide substantial benefit in terms of spreading current and dissipating heat. The proposed SCR ESD protection device helps obtain regenerative feedback between base-collector junctions of two back-to-back bipolar transistors, which enables the proposed SCR to shunt ESD current. The proposed SCR design enables lower trigger and holding voltage for efficient and robust ESD protection. The proposed SCR device/design helps offer a tunable trigger voltage and a holding voltage with highfailure threshold.