Patent classifications
H01L2224/05567
Semiconductor package and manufacturing method thereof
A semiconductor package and a manufacturing method thereof are provided. The semiconductor package includes a lower structure including a semiconductor chip having a chip terminal; an external connection terminal connecting the semiconductor chip to an external device; and an intermediate connection structure including an upper surface and a lower surface opposite to the upper surface, and positioned between the lower structure and the external connection terminal.
Semiconductor device with metal plugs and method for manufacturing the same
A semiconductor device includes a first substrate, a first insulating film provided on the first substrate, and a first plug provided in the first insulating film. The device further includes a first layer provided on the first insulating film and a first metal layer provided on the first plug in the first layer and electrically connected to the first plug. The device further includes a second metal layer including a first portion provided in the first layer and a second portion provided on the first layer and electrically connected to the first metal layer.
LAYER STRUCTURES FOR MAKING DIRECT METAL-TO-METAL BONDS AT LOW TEMPERATURES IN MICROELECTRONICS
Layer structures for making direct metal-to-metal bonds at low temperatures and shorter annealing durations in microelectronics are provided. Example bonding interface structures enable direct metal-to-metal bonding of interconnects at low annealing temperatures of 150° C. or below, and at a lower energy budget. The example structures provide a precise metal recess distance for conductive pads and vias being bonded that can be achieved in high volume manufacturing. The example structures provide a vertical stack of conductive layers under the bonding interface, with geometries and thermal expansion features designed to vertically expand the stack at lower temperatures over the precise recess distance to make the direct metal-to-metal bonds. Further enhancements, such as surface nanotexture and copper crystal plane selection, can further actuate the direct metal-to-metal bonding at lowered annealing temperatures and shorter annealing durations.
SEMICONDUCTOR PACKAGE AND MANUFACTURING METHOD THEREOF
A semiconductor package includes a substrate, a first insulation layer, a conductive via and a conductive trace. The substrate includes a conductive component. The first insulation layer is formed on the substrate and having a first through hole exposing the conductive component. The conductive via is formed within the first through hole. The conductive trace is directly connected to the conductive via which is located directly above the first through hole.
High density pillar interconnect conversion with stack to substrate connection
A semiconductor device assembly can include a semiconductor device having a substrate and vias electrically connected to circuitry of the semiconductor device. Individual vias can have an embedded portion extending from the first side to the second side of the substrate and an exposed portion projecting from the second side of the substrate. The assembly can include a density-conversion connector comprising a connector substrate and a first array of contacts formed at the first side thereof, the first array of contacts occupying a first footprint area on the first side thereof, and wherein individual contacts of the first array are electrically connected to the exposed portion of a corresponding via of the semiconductor device. The assembly can include a second array of contacts electrically connected to the first array, formed at the second side of the connector substrate, and occupying a second footprint area larger than the first footprint area.
Semiconductor device with through semiconductor via and method for fabricating the same
The present application discloses a semiconductor device and a method for fabricating the semiconductor device. The semiconductor device includes a first semiconductor structure, a second semiconductor structure, a through semiconductor via, and an insulation layer. The first semiconductor structure includes a first circuit layer and a first main bonding layer in the first circuit layer and substantially coplanar with a front face of the first circuit layer. The second semiconductor structure includes a second circuit layer on the first circuit layer and a second main bonding layer in the second circuit layer, and topologically aligned with and contacted to the first main bonding layer. The through semiconductor via is along the second semiconductor structure and the first and second main bonding layer, and extending to the first circuit layer. The insulation layer is positioned on a sidewall of the through semiconductor via.
RF DEVICES WITH ENHANCED PERFORMANCE AND METHODS OF FORMING THE SAME UTILIZING LOCALIZED SOI FORMATION
The present disclosure relates to a radio frequency (RF) device including a device substrate, a thinned device die with a device region over the device substrate, a first mold compound, and a second mold compound. The device region includes an isolation portion, a back-end-of-line (BEOL) portion, and a front-end-of-line (FEOL) portion with a contact layer and an active section. The contact layer resides over the BEOL portion, the active section resides over the contact layer, and the isolation portion resides over the contact layer to encapsulate the active section. The first mold compound resides over the device substrate, surrounds the thinned device die, and extends vertically beyond the thinned device die to define an opening over the thinned device die and within the first mold compound. The second mold compound fills the opening and directly connects the isolation portion of the thinned device die.
DISPLAY SUBSTRATE, METHOD FOR PREPARING DISPLAY SUBSTRATE, AND DISPLAY DEVICE
Multiple first recesses are formed on the side of an inorganic insulating layer facing towards multiple LEDs. Orthographic projections of the first recesses on a driving substrate do not overlap orthographic projections of the LEDs on the driving substrate. Thus, when a first planarization layer covering the multiple LEDs is formed on the side of the multiple LEDs facing away from the driving substrate, the first recesses can be filled with the first planarization layer, so that a contact area between the first planarization layer and the inorganic insulating layer can be increased, a binding force between the first planarization layer and the inorganic insulating layer can be increased, and the risk of peeling off the first planarization layer can be reduced, thereby improving the stability of a QD-LED device.
ARRAY SUBSTRATE, METHOD FOR FABRICATING SAME, AND DISPLAY DEVICE
An array substrate, a method for fabricating the same, and a display device are provided. The method includes: forming a passivation layer on an array substrate, wherein the array substrate includes a thin film transistor and a conductive pad, and the passivation layer covers the thin film transistor and the conductive pad; forming a full-surface carbon film on the passivation layer; and patterning the carbon film and the passivation layer to remove the passivation layer and the carbon film corresponding to the conductive pad by a patterning process to obtain the array substrate.
Hybrid bonding with through substrate via (TSV)
A semiconductor device structure is provided. The semiconductor device structure includes a first polymer layer formed between a first substrate and a second substrate, and a first conductive layer formed over the first polymer. The semiconductor device includes a first through substrate via (TSV) formed over the first conductive layer, and the conductive layer is in direct contact with the first TSV and the first polymer.