H01L2224/85423

METHOD FOR MANUFACTURING WIRE BONDING STRUCTURE, WIRE BONDING STRUCTURE, AND ELECTRONIC DEVICE
20170062381 · 2017-03-02 ·

A manufacturing method for a wire bonding structure of the present invention includes a step of preparing a wire made of Cu and a step of joining the wire to a first joining target formed on an electronic device. Before the joining step, the wire has an outer circumferential surface and a withdrawn surface. The withdrawn surface is withdrawn toward a central axis of the wire from the outer circumferential surface. In the joining step, ultrasonic vibration is applied to the wire in a state in which the withdrawn surface is pressed against the first joining target.