H01L21/82285

Vertical transport transistors with equal gate stack thicknesses

Methods of forming semiconductor devices include forming vertical semiconductor channels on a bottom source/drain layer in a first-type region and a second-type region. A gate dielectric layer is formed on sidewalls of the vertical semiconductor channels. A first-type work function layer is formed in the first-type region. A second-type work function layer is formed in both the first-type region and the second-type region. A thickness matching layer is formed in the second-type region such that a stack of layers in the first-type region has a same thickness as a stack of layers in the second-type region. Top source/drain regions are formed on a top portion of the vertical channels.

VERTICAL TRANSPORT TRANSISTORS WITH EQUAL GATE STACK THICKNESSES
20180350811 · 2018-12-06 ·

Integrated chips include a first semiconductor device and a second semiconductor device. The first semiconductor device includes a semiconductor channel, a first-type work function layer formed from a first material on the semiconductor channel, and a second-type work function layer formed from a second material on the first-type work function later layer. The second semiconductor device includes a semiconductor channel, a second-type work function layer formed the second material on the semiconductor channel, and a thickness matching layer formed on the second-type work function layer of the second semiconductor device, the thickness matching layer having a thickness roughly equal to a thickness of the first-type work function layer.

Method of forming a semiconductor component having multiple bipolar transistors with different characteristics
10134637 · 2018-11-20 · ·

A semiconductor component is formed by providing a substrate having partially formed first and second transistors, a base electrode stack formed over the transistors, first and second emitter windows formed in the electrode stack over first and second collector regions of the transistors, and an oxide layer extending over the collector regions. A process entails forming a mask layer in a selected emitter window, optionally forming a selectively implanted collector (SIC) in an un-masked emitter window, and removing an oxide layer and forming an epitaxial layer in the un-masked emitter window. The process further entails forming an oxide layer over the epitaxial layer and repeating the operations of forming a mask layer for another selected emitter window, optionally forming a SIC in another un-masked emitter window, and removing an oxide layer and forming an epitaxial layer in the un-masked emitter window. The epitaxial layers may have different epitaxial growth profiles.

Fabrication of integrated circuit structures for bipolar transistors
10121884 · 2018-11-06 · ·

Methods according to the present disclosure include: providing a substrate including: a first semiconductor region, a second semiconductor region, and a trench isolation (TI) laterally between the first and second semiconductor regions; forming an epitaxial layer on at least the first semiconductor region of the substrate, wherein the epitaxial layer includes a first semiconductor base material positioned above the first semiconductor region of the substrate; forming an insulator region on at least the first semiconductor base material, the trench isolation (TI), and the second semiconductor region; forming a first opening in the insulator over the second semiconductor region; and growing a second semiconductor base material in the first opening, wherein a height of the second semiconductor base material above the substrate is greater than a height of the first semiconductor base material above the substrate.

VERTICAL TRANSPORT TRANSISTORS WITH EQUAL GATE STACK THICKNESSES
20180315755 · 2018-11-01 ·

Semiconductor devices and methods of forming the same include forming vertical semiconductor channels on a bottom source/drain layer in a first-type region and a second-type region. A gate dielectric layer is formed on sidewalls of the vertical semiconductor channels. A first-type work function layer is formed in the first-type region. A second-type work function layer is formed in both the first-type region and the second-type region. A thickness matching layer is formed in the second-type region such that a stack of layers in the first-type region has a same thickness as a stack of layers in the second-type region. Top source/drain regions are formed on a top portion of the vertical channels.

VERTICAL TRANSPORT TRANSISTORS WITH EQUAL GATE STACK THICKNESSES
20180315756 · 2018-11-01 ·

Methods of forming semiconductor devices include forming vertical semiconductor channels on a bottom source/drain layer in a first-type region and a second-type region. A gate dielectric layer is formed on sidewalls of the vertical semiconductor channels. A first-type work function layer is formed in the first-type region. A second-type work function layer is formed in both the first-type region and the second-type region. A thickness matching layer is formed in the second-type region such that a stack of layers in the first-type region has a same thickness as a stack of layers in the second-type region. Top source/drain regions are formed on a top portion of the vertical channels.

Semiconductor device and semiconductor device manufacturing method
10109726 · 2018-10-23 · ·

A semiconductor device including a mesa portion formed on a front surface side of a semiconductor substrate; a floating portion formed on the front surface side of the semiconductor substrate; a trench formed surrounding the floating portion and separating the mesa portion from the floating portion; an electrode formed inside the trench; and an outside wiring portion formed along an arrangement direction of the mesa portion and the floating portion, outside the region surrounded by the trench. An edge of the outside wiring portion on the mesa portion and floating portion side includes a protruding portion formed in at least part of a region opposite the floating portion and protruding beyond the trench toward the floating portion side, and a recessed portion formed in at least part of a region opposite the mesa portion and recessed to the outside wiring portion side farther than the protruding portion.

Vertical transport transistors with equal gate stack thicknesses

Semiconductor devices and methods of forming the same include forming vertical semiconductor channels on a bottom source/drain layer in a first-type region and a second-type region. A gate dielectric layer is formed on sidewalls of the vertical semiconductor channels. A first-type work function layer is formed in the first-type region. A second-type work function layer is formed in both the first-type region and the second-type region. A thickness matching layer is formed in the second-type region such that a stack of layers in the first-type region has a same thickness as a stack of layers in the second-type region. Top source/drain regions are formed on a top portion of the vertical channels.

Bipolar junction semiconductor device and method for manufacturing thereof

A bipolar junction semiconductor device and associated method of manufacturing, the bipolar junction semiconductor device has a P type substrate, a N type buried layer formed in the substrate, a P type first epitaxial layer formed on the buried layer, a P type second epitaxial layer formed on the first epitaxial layer, a PNP BJT unit formed in the first and second epitaxial layers at a first active area, a NPN BJT unit formed in the first and second epitaxial layers at a second active area and a first isolation structure of N type formed in the first and second epitaxial layers at an isolation area. The isolation area is located between the first active area and the second active area, the first isolation structure connected with the buried layer forms an isolation barrier.

Complementary bipolar junction transistor

The present disclosure provides embodiments of semiconductor devices. In one embodiment, the semiconductor device includes a dielectric layer and a fin-shaped structure disposed over the dielectric layer. The fin-shaped structure includes a first p-type doped region, a second p-type doped region, and a third p-type doped region, and a first n-type doped region, a second n-type doped region, and a third n-type doped region interleaving the first p-type doped region, the second p-type doped region, and the third p-type doped region. The first p-type doped region, the third p-type doped region and the third n-type doped region are electrically coupled to a first potential. The second p-type doped region, the first n-type doped region and the second n-type doped region are electrically coupled to a second potential different from the first potential.