Patent classifications
H
ELECTRICITY
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H01
ELECTRIC ELEMENTS
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H01L
SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/70
Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
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H01L21/77
Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
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H01L21/78
with subsequent division of the substrate into plural individual devices
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H01L21/82
to produce devices, e.g. integrated circuits, each consisting of a plurality of components
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H01L21/822
the substrate being a semiconductor, using silicon technology
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H01L21/8232
Field-effect technology
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H01L21/8234
MIS technology; , i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
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H01L21/823431
with a particular manufacturing method of transistors with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
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