Patent classifications
H01L21/8236
SEMICONDUCTOR DEVICE HAVING DEEP TRENCH STRUCTURE AND METHOD OF MANUFACTURING THEREOF
A semiconductor device includes etch stop films formed on the first gate electrode, the first source region, the first drain region, and the shallow trench isolation regions, respectively. First interlayer insulating films are formed on the etch stop film, respectively. Deep trenches are formed in the substrate between adjacent ones of the first interlayer insulating films to overlap the shallow trench isolation regions. Sidewall insulating films are formed in the deep trenches, respectively. A gap-fill insulating film is formed on the sidewall insulating film. A second interlayer insulating film is formed on the gap-fill insulating film. A top surface of the second interlayer insulating film is substantially planar and a bottom surface of the second interlayer insulating film is undulating.
SEMICONDUCTOR DEVICE HAVING DEEP TRENCH STRUCTURE AND METHOD OF MANUFACTURING THEREOF
A semiconductor device includes etch stop films formed on the first gate electrode, the first source region, the first drain region, and the shallow trench isolation regions, respectively. First interlayer insulating films are formed on the etch stop film, respectively. Deep trenches are formed in the substrate between adjacent ones of the first interlayer insulating films to overlap the shallow trench isolation regions. Sidewall insulating films are formed in the deep trenches, respectively. A gap-fill insulating film is formed on the sidewall insulating film. A second interlayer insulating film is formed on the gap-fill insulating film. A top surface of the second interlayer insulating film is substantially planar and a bottom surface of the second interlayer insulating film is undulating.
Semiconductor device and related method of adjusting threshold voltage in semiconductor device during manufacture via counter doping in diffusion region
A semiconductor device includes a substrate (110); a buried layer (120) formed on the substrate (110), a diffusion layer (130) formed on the buried layer (120), wherein the diffusion layer (130) includes a first diffusion region (132) and a second diffusion region (134), and an impurity type of the second diffusion region (134) is opposite to an impurity type of the first diffusion region (132); the diffusion layer (134) further comprises a plurality of third diffusion regions (136) formed in the second diffusion region, wherein an impurity type of the third diffusion region (136) is opposite to the impurity type of the second diffusion region (134); and a gate (144) formed on the diffusion layer (130).
Semiconductor device and related method of adjusting threshold voltage in semiconductor device during manufacture via counter doping in diffusion region
A semiconductor device includes a substrate (110); a buried layer (120) formed on the substrate (110), a diffusion layer (130) formed on the buried layer (120), wherein the diffusion layer (130) includes a first diffusion region (132) and a second diffusion region (134), and an impurity type of the second diffusion region (134) is opposite to an impurity type of the first diffusion region (132); the diffusion layer (134) further comprises a plurality of third diffusion regions (136) formed in the second diffusion region, wherein an impurity type of the third diffusion region (136) is opposite to the impurity type of the second diffusion region (134); and a gate (144) formed on the diffusion layer (130).
INTEGRATED SEMICONDUCTOR DEVICE AND ELECTRONIC APPARATUS
The present application provides an integrated semiconductor device and an electronic apparatus, comprising a semiconductor substrate and a first doped epitaxial layer having a first region, a second region, and a third region; a partition structure is arranged in the third region; the first region is formed having at least two second doped deep wells, and the second region is formed having at least two second doped deep wells; a dielectric island partially covers a region between two adjacent doped deep wells in the first region and second region; a gate structure covers the dielectric island; a first doped source region is located on the two sides of the gate structure, and a first doped source region located in the same second doped deep well is separated; a first doped trench is located on the two sides of the dielectric island in the first region, and extends laterally to the first doped source region.
CONSTANT CURRENT CIRCUIT AND SEMICONDUCTOR DEVICE
A constant current circuit includes a depletion-type NMOS transistor having a drain connected to a constant current output terminal, and a resistance element provided between the depletion-type NMOS transistor and a ground terminal. The depletion-type NMOS transistor includes a first depletion-type NMOS transistor and a second depletion-type NMOS transistor which are connected in parallel and arranged to have current directions forming an angle of 90 degrees. The resistance element includes a first resistor and a second resistor which are arranged to have current directions forming an angle of 90 degrees.
CONSTANT CURRENT CIRCUIT AND SEMICONDUCTOR DEVICE
A constant current circuit includes a depletion-type NMOS transistor having a drain connected to a constant current output terminal, and a resistance element provided between the depletion-type NMOS transistor and a ground terminal. The depletion-type NMOS transistor includes a first depletion-type NMOS transistor and a second depletion-type NMOS transistor which are connected in parallel and arranged to have current directions forming an angle of 90 degrees. The resistance element includes a first resistor and a second resistor which are arranged to have current directions forming an angle of 90 degrees.
Gate stacks for stack-fin channel I/O devices and nanowire channel core devices
A semiconductor device includes a substrate; an I/O device over the substrate; and a core device over the substrate. The I/O device includes a first gate structure having an interfacial layer; a first high-k dielectric stack over the interfacial layer; and a conductive layer over and in physical contact with the first high-k dielectric stack. The core device includes a second gate structure having the interfacial layer; a second high-k dielectric stack over the interfacial layer; and the conductive layer over and in physical contact with the second high-k dielectric stack. The first high-k dielectric stack includes the second high-k dielectric stack and a third dielectric layer.
Switching field plate power MOSFET
A power MOSFET IC device including a source-down enhancement mode transistor formed in a semiconductor substrate and a depletion mode transistor formed in a doped region of the semiconductor substrate. A gate terminal of the depletion mode transistor is formed over at least a portion of the doped region as a field plate that is switchably connectable to a source terminal of the source-down enhancement mode transistor. A control circuit may be provided to facilitate a connection between the gate terminal of the depletion mode transistor and the source terminal of the source-down enhancement mode transistor when the power MOSFET integrated circuit is in an OFF state. The control circuit may also be configured to facilitate connection of the gate terminal of the depletion mode transistor to a gate terminal of the source-down enhancement mode FET device or to an external driver that provides a reference voltage, when the power MOSFET is in an ON state.
Switching field plate power MOSFET
A power MOSFET IC device including a source-down enhancement mode transistor formed in a semiconductor substrate and a depletion mode transistor formed in a doped region of the semiconductor substrate. A gate terminal of the depletion mode transistor is formed over at least a portion of the doped region as a field plate that is switchably connectable to a source terminal of the source-down enhancement mode transistor. A control circuit may be provided to facilitate a connection between the gate terminal of the depletion mode transistor and the source terminal of the source-down enhancement mode transistor when the power MOSFET integrated circuit is in an OFF state. The control circuit may also be configured to facilitate connection of the gate terminal of the depletion mode transistor to a gate terminal of the source-down enhancement mode FET device or to an external driver that provides a reference voltage, when the power MOSFET is in an ON state.